lVFl 10

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

Precision Regulator Series IR1000/2000/3000

Description IR1000 IR1010 IR1020 IR2000 IR2010 IR2020/2120 IR3000 IR3010 IR3020/3120 P362030-201 Bracket P36201023 P36202028 Pressure gauge2 G33-4-01 G43-4-01 G33-2-01 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-4-01 G43-10-01 1 A bracket and two mounting screws (M5 x 35) To mount the bracket, remove two body screws (M5 x 30) on the name plate on the opposite side and replace the attached two

Digital Pressure Switch

Description Part number Remarks Panel mount adapter ZS-39-B Panel mount adapter + Front protective cover ZS-39-D Front protective cover ZS-39-01 Lead wire with connector + connector cover ZS-39-5G 5 cores, 2 m R1/8 conversion adapter ZS-39-N1 NPT1/8 conversion adapter ZS-39-N2 DIN rail mounting adapter ZS-39-R : Made to Order -10No.PS-OMM0005-J Summary of Product parts Names of individual

3M/SMseries

Series/Port Size Type of Actuation 2 position 2 position single double @ ]zNPTF w %NPTF titvF30(X) NVF3q)O 3 Dosition 3 po6ition 3 pogition closed cnter exhaust center pressue center . t : ' . " i : , : stlfm'JNfils #Nll;117.h ainnMh HlfFinlh NVF5000 NVF5000 2 pBition 2 position 3 position single double closed center M 3 position 3 posilion exhaLrst center Plessule centl %NPTF ffi^ 4il7h

ZQ-OM01301

class is 2:6:3 of ISO08573-1:2010JISB83921:2012 .

7.4

Electrical entry Type of actuation S07 1 5 5 G Connector kit SS0755-07C4C S0715-5G S0725-5G S07A5-5G 1 setManifold base part no. 3 setsValve part no. (Stations 1 to 3) 2 setsValve part no. (Stations 4 to 5) 2 setsValve part no.

3 Port Air Operated Valve Series SYJA300

Flow Characteristics/Weight Flow characteristics C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Weight (g) Pilot port size Type of actuation Port size SYJA512-M5 SYJA522-M5 0.12 0.18 0.39 0.45 0.47 0.66 0.14 0.18 0.45 0.45 N.C. 0.53 0.66 M5 x 0.8 Body ported 45 N.O. M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C.

4/5 Port Air Operated Valve Series SYJA3000

) SS5YJA5-42-03-01 1 set SYJA5140 1 set SYJA5240 1 set SYJ5000-21-1A 1 set 3 position closed center 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 3 (R) 1 (P) 3 (R) The asterisk denotes the symbol for assembly.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

1, 2, 3 and 4.

Compact Vacuum Unit Ejector/ Vacuum Pump System

Manual override Note 3) NIL Non-locking push type B Locking type (Tool required) Semi-standard Note 3) Only the push locking type (no symbol) is available for the latching Note 4) Refer to Table 3 for the accessory. Table 1.

IDX-OM-W016

IDFA Series 5 Troubleshooting 5 1 IDX-OM-W016 Air dryer6 References 6 References 6-1 Specifications Model Specification IDFA3E IDFA4E IDFA6E IDFA8E IDFA11E IDFA15E1 At Outlet Pressure Dew 12m3/h 24m3/h 36m3/h 65m3/h 80m3/h 120m3/h Point of 3 At Outlet Pressure Dew Air Flow Rate (ANR)(Note 1) 15m3/h 31m3/h 46m3/h 83m3/h 101m3/h 152m3/h Point of 7 At Outlet Pressure Dew 17m3/h 34m3/h 50m3/h

IR1000/2000/3000

Description IR1000 IR1010 IR1020 IR2000 IR2010 IR2020 / 2120 IR3000 IR3010 IR3020 / 3120 Bracket P36201023 P36202028 P36203018 Pressure gauge G33-2-01 G33-4-01 G43-4-01 G43-4-01 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-10-01 Accuracy 3% (full span) 2 Series IR1000/2000/3000 Construction IR1000 IR2000 IR3000 Fixed throttle SUP side passage OUT side passage SUP side passage SUP side passage

Air Slide Table Series MXP

3 and !4 each MXP6-PS GR-L-005 (5g) GR-L-010 (10g) Cylinder unit GR-L-020 (20g) GR-L-050 (50g) MXPJ6 No. Description Material Note Component Parts u q w i o y !3 !2 !

Manifold Specifications

For details, refer to pages 3-7-19 and 3-7-20.

Manifold Specifications

Non plug-in type N T F Symbol 24 24 stations NPTF G Option VV5ZS3-51FD-091-01-MP5 VZS3150-5FZ VZS3250-5FZ 1 5 2 Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Note) Maximum stations 51F 16 stations 51G 15 stations 51 24 stations Symbol Port size 1 1 8 02 Rc 1 4 01 Rc (Manifold base) (2 position single) VV5ZS3-50-071-01-M5 VZS3150-5G 1 5 Embedded type One-touch

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

(Port size 1/8 type) (Port size 1/4, 3/8 type) Flow Rate Characteristics JSX Series Body Material Stainless Steel Body Material Stainless Steel A A 2 x J 2 x J Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts B B 1/4, 3/8 1/8 C C F F D E D 31.3 E H G 2 x M5 x 3 [mm] Size Port size A B C D E F G H J 20 1/8 13 46 7 40 56 1.5 5.3 20, 30 1/4, 3/8

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Series P port/Thread VV2Q22-05 1 set Manifold part No. 2 3 VQ20 VQ30 Rc3/8 NPT3/8 NPTF3/8 G3/8 VQ21M1-5G-C6 00N 00T 00F 4 sets Valve part No. (Stations 1 to 4) Stations VQ21M1-5G-C8 1 set Valve part No.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

Parallel Style Air Gripper: Wide Type Series MHL2

3!6@6 <16 to 25>eo!0 !4!6@6#0 <32, 40>ei!4!