ZQ-OM01401

L 1. (b ) 2. R 3. L 4.

100

8 (Metric) 04 2 x Rc1/2 (Branch specification) F06 G3/4*2 *3 The same thread type selected for e is used for the port. t Supply valve/Release valve combination u Electrical entry F04 2 x G1/2*2 (Branch specification) N06 NPT3/4 5/16" (Inch) N04 2 x NPT1/2 (Branch specification) L plug connector M plug connector L: Lead wire length 0.3 m M: Lead wire length 0.3 m K1 Supply valve (N.C.),

3M/SMseries

Pod NVF3000 NVF5000 Supply SUP Cylindet cYL.1, CYL.2 A , B Exhaust EXH.1, EXH.2 Rl, R2 Symbol (SirEle solenoid) l c 1 : c Y L . 1 l IC2:CYL.2 lEl :EXH.r I {E2:EXH.2] Lubricant 1.

IR1000/2000/3000

Description IR1000 IR1010 IR1020 IR2000 IR2010 IR2020 / 2120 IR3000 IR3010 IR3020 / 3120 Bracket P36201023 P36202028 P36203018 Pressure gauge G33-2-01 G33-4-01 G43-4-01 G43-4-01 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-10-01 Accuracy 3% (full span) 2 Series IR1000/2000/3000 Construction IR1000 IR2000 IR3000 Fixed throttle SUP side passage OUT side passage SUP side passage SUP side passage

ZL3-OM00601

No.ZL3-OM00601-B 2.

ZL3-OM00801

N06 NPT3/4 5/16(inch) N04 2xNPT1/2 6) 5 DC24V *1G JIS B0202 ISO1603 ISO1179 8) Z 7 L L 0.3(m) 11) A NPN LO B PNP M M 0.3(m) MO 12) 9) M SI (kPa) D P (:psi) E 10) 14 GN (G) B G *7ZL212 27mm ZL212 (2 /1 , 4 ) E (2 ) F (2 ) V (1 ) 13 G 2m) W (2m) 5 No.ZL3-OM00801-A 2. 2.1 (1/P) (2/V) ZL3 ZL6 (3/E) // / (G) (2/V) 2.2 ZL6 1 ZL6 (ZL6-SC1-A) 2), 6 No.ZL3-OM00801-A 3. 3.1

lVFl 10

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solenl '1 '100 vAc ,2 2OO VAC 5 24 VDC s 'r io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solenl '1 '100 vAc ,2 2OO VAC 5 24 VDC s 'r io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

60, 4 station manifold base part number) SY3260-5G-C6 2 sets (double solenoid part number) SY3160-5G-M5 ... 2 sets (single solenoid part number) Enter the part numbers of valves and options to be mounted under the manifold base part number, in order, starting from station No. 1 as shown in the drawing.

9.8

(Refer to Copy function on page 8.) 3 Series ZSE10(F)/ISE10 Dimensions ZSE10(F)/ISE10 M5 6.4 (7.7) (30) 2 x 3.3 M5 x 0.8 (12) 1.2 25 13 3.5 9.8 51.8 4.2 ZSE10(F)/ISE10 M5R 1.2 6.4 25 51.8 4.2 9.8 4.5 M5 x 0.8 4 Digital Pressure Switch Series ZSE10(F)/ISE10 ZSE10(F)/ISE10 01 6.4 2 x 3.3 1.2 Width across flats 10 Width across flats 12 11 13 13 25 3.5 8 R1/8 9.8 12.5 51.8 4.2 ZSE10(F)/ISE10

Digital Pressure Switch

ZSE10F: 5.0 kPa -22No.PS-OMM0005-J [F 2] Setting of OUT2 Page 28 Same setting as [F 1] OUT1.

AKH/AKB Series

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

AKH/AKB Series Check Valve with One-touch Fitting

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

Air Slide Table Series MXP

4 each MXP6-PS GR-L-005 (5g) GR-L-010 (10g) Cylinder unit GR-L-020 (20g) GR-L-050 (50g) MXPJ6 No. Description Material Note Component Parts u q w i o y !3 !2 !

IDX-OM-W016

/ Installation 2 1 Transportation . 2 1 2 2 Installation . 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 2 2 2 4 Drain Tube . 2 3 2 2 5 Electric Wiring . 2 4 2 3 Cautions for Reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Modular mounting type 2-port solenoid valve JSXM21-AN301R-5G-U-F 1 pc.

Series ZSE10(F)/ISE10 Digital Pressure Switch ®

Option ZS-39-5G ZS-39-B ZS-39-D ZS-39-R ZS-39-01 ZS-39-N1 ZS-39-N2 Lead wire with connector (with connector cover) (5 cores, 2 m) Panel mount adapter Panel mount adapter + Front protective cover DIN rail adapter Front protective cover R1/8 piping adapter NPT1/8 piping adapter Made to Order 1

Parallel Style Air Gripper: Wide Type Series MHL2

) 1 8 1 8 1 8 Rc (G , NPT ) 1 8 1 8 1 8 Auto switch mounting groove (4 locations) (Finger closing port) (Finger opening port) 2 x M10 x 1.5 (Rack screw) Width across flats 17 (2 locations) Width across flats 19 (2 locations) 2 x M12 x 1.75 Closed E (Piston rod screw) Open F 4 x M12 x 1.75 through (Thread for mounting attachment) (mm) J 252 370 450 B C D E F G H 148 206 246 Model MHL2-40D

Air Slide Table Series MXQ

Retraction End Stroke adjustment range (mm) A B C F G H J K 1) E D Model Applicable size 5 16.5 MXQ-AT 6 (L) MXQ 6 (L) 6 7 2.5 19 17.5 10.5 8 M5 x 0.8 M2.5 x 6 15 26.5 MXQ-AT 6 (L)-X11 5 19.5 MXQ-AT 8 (L) D H E 8 8 3 22 21 12.5 10 M6 x 1 M3 x 8 MXQ 8 (L) 15 29.5 MXQ-AT 8 (L)-X11 F 25 39.5 MXQ-AT 8 (L)-X12 5 23.5 MXQ-AT12 (L) MXQ12 (L) M8 x 1 M4 x 10 10 12 4 29 28 16 16 15 33.5 MXQ-AT12 (L