Manifold Specifications

VK Applicable solenoid valve Type 25 (Non plug-in type) How to Order D 25 05 00C VV4Z1 VZ 4(A), 2(B) port G L M D G L M D VZ1120-M5 Stations VF VZ110-M5 (3 port valve) 02 2 stations 1(P), 3(R) port One-touch fitting for 6 VFR Applicable blanking plate assembly VZ1000-10-2A 20 20 stations SUP/EXH block mounting position VP4 DIN rail length specified B D U Both sides: 2 to 20 stations D side

Manifold Specifications

Non plug-in type N T F Symbol 24 24 stations NPTF G Option VV5ZS3-51FD-091-01-MP5 VZS3150-5FZ VZS3250-5FZ 1 5 2 Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Note) Maximum stations 51F 16 stations 51G 15 stations 51 24 stations Symbol Port size 1 1 8 02 Rc 1 4 01 Rc (Manifold base) (2 position single) VV5ZS3-50-071-01-M5 VZS3150-5G 1 5 Embedded type One-touch

Manifold Specifications

Non plug-in type Thread type 02 2 stations Standard Nil NPT Rc N T F Symbol 24 24 stations NPTF G Option VV5ZS2-51FD-091-01-MP5 VZS2150-5FZ VZS2250-5FZ 1 5 2 Note) Maximum stations 51F 16 stations 51G15 stations 51 24 stations Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Symbol Port size 1 1 8 01 Rc (Manifold base) (2 position single) VV5ZS2-51-071-01-M5

lVFl 10

B Locking ' Special Order option t Consult factory for availability NVF 1100-ODO{IT (drx ) Lamp and Sorga Protec-tion Z rv/Lamp/Surge Protection S dsurqe Protection Onlv L.mp and S dsurge Only BRACKET (Sutfix "F') .[ otMEr{stoNs A B c D E F 1.35 (34.41 1.34 (34.11 0.61 115.4) 0.83 Q 1 t 1.76 1.77 (44.9) Millamte.s in Parenthe$s rxfENsroNs A B c D E F G H J K It N o P o R 64.7) 0.83 (21) l.t

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

B Locking ' Special Order option t Consult factory for availability NVF 1100-ODO{IT (drx ) Lamp and Sorga Protec-tion Z rv/Lamp/Surge Protection S dsurqe Protection Onlv L.mp and S dsurge Only BRACKET (Sutfix "F') .[ otMEr{stoNs A B c D E F 1.35 (34.41 1.34 (34.11 0.61 115.4) 0.83 Q 1 t 1.76 1.77 (44.9) Millamte.s in Parenthe$s rxfENsroNs A B c D E F G H J K It N o P o R 64.7) 0.83 (21) l.t

IDX-OM-W016

/8 226 410 473 67 125 304 33 73 31 36 154 21 330 231 15 IDFA4E to 11E B A D E Q SWITCH WITH LAMP AIR INLET THERMOMETER EVAPORATION AIR OUTLET G F C DRAFT AIR OUTLET VENTILATION VENTILATION (O.D.10 LENGTH:0.8m) DRAIN TUBE TERMINAL BLOCK (820) J K L H 4-13 P M N POWER SUPPLY ENTRY(17) GROMMET Measuremm Model Thread Size A B C D E F G H J K L M N P Q IDFA4E Rc1/2 453 13 498 283 275 IDFA6E 455

Vacuum Unit Ejector / Vacuum Pump System

4] [5] [1] Rated pressure range and function E 0 to -101 kPa Pressure switch for vacuum Open collector 2 outputs F -100 to 100 kPa V -100 to 100 kPa Pressure switch with energy saving function Open collector 1 output [2] Output specifications [3] Unit specifications Nil Unit selection function Note 1) A NPN M SI unit only Note 2) B PNP Note 1) The unit selection function is not available

Vacuum Unit Ejector / Vacuum Pump System

-101 kPa Pressure switch for vacuum Open collector 2 outputs F -100 to 100 kPa V -100 to 100 kPa Pressure switch with energy saving function Open collector 1 output [2] Output specifications [3] Unit specifications A NPN Nil Unit selection function Note 1) B PNP M SI unit only Note 2) Note 1) Unit selection function is not available in Japan due to new measurement law.

Vacuum Unit

ue DC() Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less FUNC Blue DC() Voltage output type: 1 to 5 V Output impedance: Approx. 1 k Pilot valve for supply Pilot valve for supply + Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less pe: 1 to 5 V e: Approx. 1 k B C A B C A Coil + + Max. 80 mA Residual voltage: 2 V

90

PS and PD port dimensions 1,4 Common supply (PV) port 1 Metric size: 2 x 8 D Inch size: 2 x 5/16" 2 x Common supply (PD) port 4 62 53 37.4 C 38 8.4 B 26.4 2 x Common exhaust (EXH) port 2 3.5 n x Individual exhaust (EXH) port 3 10.5 n x Vacuum (V) port (Built-in suction filter) (n1) x 15 15 33 (mm) Number of stations Hexagon width across flats B A D C Port type 1 2 3 4 5 6 7 8 9 10 06 08

Series VS

1 1/4, 3/8,1/2 SIZE 2 3/8, 1/2,3/4 SIZE 3 3/4, 1 6 PORTS, 1, 3,5 PORTS 2) SIZE 1 1/4, 3/8,1/2 SIZE 2 3/8, 1/2,3/4 SIZE 3 1/2, 3/4,1 2 PORTS, 2, 4 PORTS 3) ALL DIMENSIONS ARE IN MILLIMETERS SMC SMC BB CC 2 2 2 2 AA S R Q 4 4 4 4 U T X Y Z V W PITCH NOTE #2 Q 81 R 49 5.5 S A 177.5 B 119 C 9 D 50.5 105 H 20.5 I J 58.5 F 108 96.5 87 G K L M N 22 79.5 52.5 48.5 E O P 52 T 26.5 26 41 28 20.5 18

Microspeed Cylinder

B Through hole/ Double end tap common (standard) Number of auto switches Bore size 12 16 20 25 2 pcs. 1 pc.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Flow Rate Characteristics/Weight Flow rate characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Grommet Valve model C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 0.58 kg (For AC) 0.63 kg (For DC) VO325 4.1 0.24 1.0 4.4 0.18 1.0 4.5 0.15 1.0 4.3 0.23 1.0 VO325V (Vacuum spec. type) Precautions Changing from N.C. to N.O.

VZ5000

Note 1) At rated voltage Note 2) Plug-in should be ZNR 3-3-68 5 Port Solenoid Valve Base Mounted Series VZ5000 (2) Flow Characteristics/Weight Flow characteristics (1) Port size Valve model Type of actuation Weight (g) 1 4/2 (P A/B) 4, 2 (A, B) 1, 5, 3 (P , EA, EB) 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] Grommet 200(120) 240(160) C [dm3/(sbar)] Cv b Cv b Single Double Closed center Exhaust

I

Pod NVF3000 NVF5000 Supply SUP Cylindet cYL.1, CYL.2 A , B Exhaust EXH.1, EXH.2 Rl, R2 Symbol (SirEle solenoid) l c 1 : c Y L . 1 l IC2:CYL.2 lEl :EXH.r I {E2:EXH.2] Lubricant 1.

4/5 Port Air Operated Valve Series SYJA3000

Note 3) 5 port base mounted without sub-plate: SYJA540 5-2-23 Series SYJA5000 Dimesions: Body Ported Dimensions: Base Mounted 2 position single: SYJA5140-01 2 position single: SYJA5120-M5(-F) 41.5 (For mounting) 2-4.3 M5 x 0.8 (Pilot port) 1 Manual override 15 5 11 A B A B 1 M5 x 0.8 (Pilot port) 10 24 A B 19 R P 2-2.6 2-3.5 4 37.5 (For mounting) (For manifold mounting) (Bracket) 47 42 Manual

3 Port Air Operated Valve Series SYJA300

(Value in the initial state) VA Body ported SA Series SYJA500 VA With Bracket VM VR Air operated valve type SYJA5 2-M5-F, SYJA7 2-01-F 1 2 1 2 Note) Bracket is not mounted.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For connector cable of M8 connector, refer to page 90. 49 Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) y e q t r q t r w w (B) 2 (A) 4 (A) 4 (B) 2 i i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 t q r w 5 (R1) 3 (R2)

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

-mGm-m VX VNl VQ Dotted line: Bracket mounting style (-F) 4.3-9 Series VQ20/30 Dimensions/Series VQ30 DIN connector (Y) VQ31A1-mYmm-m Dotted line: Bracket mounting style (-F) 4.3-10 Series VQ20/30 For Dry Air, Pilot Operated 2 Port Solenoid Valve How to Order Manifold VV2Q 2 2 08 How to Order Manifold Assembly List valve and option part numbers under the manifold base part number.

Parallel Style Air Gripper: Wide Type Series MHL2

) 1 8 1 8 1 8 Rc (G , NPT ) 1 8 1 8 1 8 Auto switch mounting groove (4 locations) (Finger closing port) (Finger opening port) 2 x M10 x 1.5 (Rack screw) Width across flats 17 (2 locations) Width across flats 19 (2 locations) 2 x M12 x 1.75 Closed E (Piston rod screw) Open F 4 x M12 x 1.75 through (Thread for mounting attachment) (mm) J 252 370 450 B C D E F G H 148 206 246 Model MHL2-40D