I

|vF3l3O (B) (A) ' 0 1 c 2 Clo6td C.l49r rd d#{Ft ffi# E I S E 2 {R2XPXB1) Low power consumption -1.8WDc (F2)(P)(F1l NVF3S3O Exh.Bt C.ii.. i{VF3,(3O (B) (A) c1 c2 ryffTfl-TTrl,* Er\llt'lll/'Es) EI SE2 Pr.aqa ConL. NVF353O f l Operating prs6sur range 2 pGiEon singb 20 -129 PSI S(1.5 -gkgF) 2 pssition double-15-128 P$l (1 -gkgflcm'?)

ZQ-OM01301

ZQ-OM01301-A Vacuum Pump System Manifold ZZQ108A-S O C-A (1) (2) (3) (4) (3) Vacuum release pressure supply port (PD port) (1) Number of stations B None (Release pressure is 01 1 stations supplied from the P port.) 02 2 stations C Note 2) Provided (Breaking pressure: Supplied : from D port) 08 8 stations Note 2) Select S for the Option Symbol (10). (4) Shipping condition (2) Vacuum pressure

100

ZL1 Series ZL3/ZL6 Series q q Thread type Nil Rc thread F G thread N NPT thread Port block assembly Adapter assembly for bottom mounting * 2 pcs.

ZQ-OM01401

) (3) (4) 1 (1) 2) 01 1 S () 02 2 P () : 08 8 (3) (PD) 1) 1 B (: P ) 3 (: PD ) C 2) 1) 3)12S 0.5 8 0.7 6 (4) 1.0 4 2) 8 4 A 4) Assy 6 - No.ZQ-OM01401-B ZQ000 U A-K15L B-EA M G-3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (1) U (6) M 6) (2) M SI (kPa) 6) (:psi) P K1 N.C.

IR1000/2000/3000

Description IR1000 IR1010 IR1020 IR2000 IR2010 IR2020 / 2120 IR3000 IR3010 IR3020 / 3120 Bracket P36201023 P36202028 P36203018 Pressure gauge G33-2-01 G33-4-01 G43-4-01 G43-4-01 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-10-01 Accuracy 3% (full span) 2 Series IR1000/2000/3000 Construction IR1000 IR2000 IR3000 Fixed throttle SUP side passage OUT side passage SUP side passage SUP side passage

ZL3-OM00601

Pipe tape Leave one thread Vacuum (2/V) port Vacuum pressure sensing port (G) Surface to fix the port block (Width across flats: 40mm) Surface to fix the body (Width across flats: 40mm) Exhaust (3/E) port Port type Thread size Recommended tightening torque (Nm) Pressure sensing port (G) Rc1/8,G1/8,NPT1/8 3-5 Rc1/2,G1/2,NPT1/2 28 to 30 Vacuum (2/V) port Rc3/4,G3/4,NPT3/4 28 to 30 Exhaust (

ZL3-OM00801

N06 NPT3/4 5/16(inch) N04 2xNPT1/2 6) 5 DC24V *1G JIS B0202 ISO1603 ISO1179 8) Z 7 L L 0.3(m) 11) A NPN LO B PNP M M 0.3(m) MO 12) 9) M SI (kPa) D P (:psi) E 10) 14 GN (G) B G *7ZL212 27mm ZL212 (2 /1 , 4 ) E (2 ) F (2 ) V (1 ) 13 G 2m) W (2m) 5 No.ZL3-OM00801-A 2. 2.1 (1/P) (2/V) ZL3 ZL6 (3/E) // / (G) (2/V) 2.2 ZL6 1 ZL6 (ZL6-SC1-A) 2), 6 No.ZL3-OM00801-A 3. 3.1

3M/SMseries

++t&F Eft!

lVFl 10

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solen2 2OO VAC 5 24 VDC s 'r io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solen2 2OO VAC 5 24 VDC s 'r io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

size 20 25 32 40 Number of auto switches Port thread type Nil TN TF 20mm 25mm 32mm 40mm Rc NPT G Nil S n 2 pcs. 1 pc.

Series ZSE10(F)/ISE10 Digital Pressure Switch ®

Option ZS-39-5G ZS-39-B ZS-39-D ZS-39-R ZS-39-01 ZS-39-N1 ZS-39-N2 Lead wire with connector (with connector cover) (5 cores, 2 m) Panel mount adapter Panel mount adapter + Front protective cover DIN rail adapter Front protective cover R1/8 piping adapter NPT1/8 piping adapter Made to Order 1

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

60, 4 station manifold base part number) SY3260-5G-C6 2 sets (double solenoid part number) SY3160-5G-M5 ... 2 sets (single solenoid part number) Enter the part numbers of valves and options to be mounted under the manifold base part number, in order, starting from station No. 1 as shown in the drawing.

AKH/AKB Series

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

AKH/AKB Series Check Valve with One-touch Fitting

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

Air Slide Table Series MXP

9 12 GR-S-020 (20 g) MXP12-PS 16 GR-S-050 (50 g) MXP16-PS GR-L-005 (5 g) GR-L-010 (10 g) Cylinder unit GR-L-020 (20 g) GR-L-050 (50 g) D-X Individual -X 199 Series MXP Dimensions: MXPJ6 MXPJ6-5 , depth 2.5 2.5 H 7 5 3 3.5 4 x M3 x 0.5, depth 3 +0.030 0 B D 0.05 1 16.5 3.5 18 14 13 20 6 6 E 5 +0.030 0 Piping port , depth 2.5 2.5 Pilot hole diameter 3.3 2 x M4 x 0.7 6 2 x M3 x 0.5 QL F 13.5

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Modular mounting type 2-port solenoid valve JSXM21-AN301R-5G-U-F 1 pc.

IDX-OM-W016

/ Installation 2 1 Transportation . 2 1 2 2 Installation . 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 2 2 2 4 Drain Tube . 2 3 2 2 5 Electric Wiring . 2 4 2 3 Cautions for Reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart

Parallel Style Air Gripper: Wide Type Series MHL2

) 1 8 1 8 1 8 Rc (G , NPT ) 1 8 1 8 1 8 Auto switch mounting groove (4 locations) (Finger closing port) (Finger opening port) 2 x M10 x 1.5 (Rack screw) Width across flats 17 (2 locations) Width across flats 19 (2 locations) 2 x M12 x 1.75 Closed E (Piston rod screw) Open F 4 x M12 x 1.75 through (Thread for mounting attachment) (mm) J 252 370 450 B C D E F G H 148 206 246 Model MHL2-40D

Air Slide Table Series MXQ

45 55 65 75 100 125 150 175 J 56 56 56 66 90 100 150 205 230 I 16 16 16 16 16 31 20 18 18 NN 2 2 2 2 2 3 4 4 4 H 55 55 55 65 80 44 66 66 G 23 23 23 23 32 44 31 56 N 4 4 4 4 4 6 8 8 8 HA 55 55 55 65 80 65 88 132 132 Model F 55 46 55 65 75 60 48 60 65 GA 23 23 23 23 32 72 88 97 122 KA 170 223 248 NA 4 4 4 4 4 4 8 8 8 MXQ2510 MXQ2520 MXQ2530 MXQ2540 MXQ2550 MXQ2575 MXQ25-100 MXQ25-125 MXQ25