Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: -, Material: -, Option: -, CE Compliance: -

Series VS

12 N SMC SMC O P NOTES: 1) SIZE 1 1/4,3/8, 1/2 SIZE 2 3/8, 1/2,3/4 SIZE 3 3/4, 1 6 PORTS,1,3,5 PORTS 2) SIZE 1 1/4,3/8, 1/2 SIZE 2 3/8, 1/2,3/4 SIZE 3 1/2, 3/4,1 2 PORTS,2,4 PORTS 3) ALL DIMENSIONS ARE IN MILLIMETERS SIDE U SIDE D n 3 STATION 2 1 SMC SMC BB 2 2 2 2 2 2 AA S R Q 4 4 4 4 4 4 U T X Y Z V W PITCH NOTE #2 177.5 A 119 B 9 C 50.5 D 48.5 E 58.5 F 87 G 105 H 20.5 I 26.5 J 20.5 K

Plug-in/Plug Lead: Single Unit

2 4 T 5 1 3 SQ 16 16 13 A 40 53 66 53 66 B A VQ5000 VQ0 2 4 14 5 1 3 12 Manual override 2-6.5 Mounting hole 17.5 13.5 35 53 35 53 VQ4 3-Rc 1/2 (P), 4 (A), 2 (B) port VQ5 Bottom ported drawing VQZ 16 M5 ground screw VQD SMC 4(A), 2(B) port 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 Rc 1/8 PE port Rc 1/8 External pilot port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 3 position

3M/SMseries

Pod NVF3000 NVF5000 Supply SUP Cylindet cYL.1, CYL.2 A , B Exhaust EXH.1, EXH.2 Rl, R2 Symbol (SirEle solenoid) l c 1 : c Y L . 1 l IC2:CYL.2 lEl :EXH.r I {E2:EXH.2] Lubricant 1.

VZ3000

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

Table of Contents

Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !

Manifold Specifications

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

Low Profile Air Gripper Series MHF2

x 0.8 Finger opening port M5 x 0.8 Finger closing port MHF 2 x 5.5 1 1 E-E MHL +0.1 0 Close: 0 Open: 121 MHR Use the attached hexagon socket head screws for mounting holes.

Compact Vacuum Unit Ejector/ Vacuum Pump System

2001 (JIS B8392-1:2003).

MHx-OMY0005

2. 1) 2) 3) 9 3. 4. <> AS1211F-M3 AS1201F-M5 AS1000 AS1002F 2-4. 1. 2. 2. 4. 1

VQ20/30

Series P port/Thread type VV2Q22-05 1 set VQ21M1-5G-C6 4 sets Manifold part No. Valve part No. (Stations 1 to 4) Valve part No. (Station 5) 2 3 Nil 00N 00T 00F VQ20 VQ30 Rc 3/8 NPT 3/8 NPTF 3/8 G 3/8 VQ21M1-5G-C8 1 set Stations VC 01 1 station is the symbol for assembly. Add a in front of the part numbers for solenoid valves, etc., to be mounted.

ZB-OM00301

LN1 1/8 LN3 5/32 10 ZFAZFBZFC 11 10 - No.ZB-OM00301 / 1 01 1 / 02 2 S / 1 S 12 12 PV PD 2 PD PVPD 01 Rc1/8 M5 M50.8PVPD 01N NPT1/8 2 01F G1/8 M5 M50.8 M50.8 M-5P ZB03 ZB04 ZB05 ZB06 PV N.C.

VZS

Non plug-in type N T F Symbol 24 24 stations NPTF G Option 1 5 2 VV5ZS3-51FD-091-01-MP5 VZS3150-5FZ VZS3250-5FZ Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Note) Maximum stations 51F 16 stations 51G 15 stations 51 24 stations Symbol Port size 1 1 8 02 Rc 1 4 01 Rc (Manifold base) (2 position single) 1 5 VV5ZS3-50-071-01-M5 VZS3150-5G Embedded type One-touch

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: Rc, Material: G (Stainless Steel Body, NBR Seal Class B Coil)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: Rc, Material: Brass Body, NBR Seal, Class B Coil, Option: F (Foot Bracket)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: Rc, Material: L (Stainless Steel Body, FKM Seal, Class B Coil)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: Rc, Material: H (Stainless Steel Body, FKM Seal, Class B Coil)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: Rc, Material: B (Brass Body, EPDM Seal, Class B Coil)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: Rc, Material: A (Brass Body, FKM Seal, Class B Coil)