AKH/AKB Series

Effective area (mm) Weight g A M5, UNF10-32> H L M Model (Width across flats) AKH04-M5 AKH04-01S AKH06-M5 AKH06-01S AKH06-02S AKH08-01S AKH08-02S AKH08-03S AKH10-02S AKH10-03S AKH10-04S AKH12-03S AKH12-04S 8 10 M5 x 0.8 1/8 M5 x 0.8 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 30 31.7 21.2 20.6 22.2 22.9 24 27.7 36 35.5 48.3 40.8 41.3 54 46.5 5 10 Applicable tubing 2.8

Series VCL

54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70

180° Angular Style Air Gripper Series MHY2/MHW2

MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 4.3 7.4 7.4 17.7 37.2 2.9 5.9 5.9 17.7 37.2 10 12 12 16 20 7 10 10 15 20 Model Applicable bolts Max. tightening torque (Nm) Max. screw-in depth (lmm) MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D M5 x 0.8 M6 x 1 M6 x

VCL

M5 8 81.5 1/4, 3/8 VCL31 24 25 59 46 57 60 54.5 48.5 101 57 68 104 30 50 36.5 13.5 15 32 25 23 M5 8 86 1/2 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 107 22 45 41 11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70

AKH/AKB Series Check Valve with One-touch Fitting

Effective area (mm) Weight g A M5, UNF10-32> H L M Model (Width across flats) AKH04-M5 AKH04-01S AKH06-M5 AKH06-01S AKH06-02S AKH08-01S AKH08-02S AKH08-03S AKH10-02S AKH10-03S AKH10-04S AKH12-03S AKH12-04S 8 10 M5 x 0.8 1/8 M5 x 0.8 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 30 31.7 21.2 20.6 22.2 22.9 24 27.7 36 35.5 48.3 40.8 41.3 54 46.5 5 10 Applicable tubing 2.8

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Material Description Pilot valve assembly AXT627-42-1 (M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1 (M5 x 50) AXT627-10-1 VFR53/54/55 8 NBR Hexagon socket head screw Gasket 9 10 AXT627-42-1 (M5 x 50) Refer to How to Order Pilot Valve Assembly on page 1298.

Angular Style Air Gripper Series MHC2/MHCA2/MHCM2

9@0@1 rtyui!3 weui!0!1!8!9@0 w!0!1 e !4 Order 1 piece finger assembly per one unit.

IR1000/2000/3000

Precautions. 60 50 50 Rc 1/8 2-Rc 1/4 Pressure gauge port Port size M6 x P0.5 15.5 82 60 IR3120-0 9 Mounting hole 48 2.3 Bracket (Option) 76 148 Bleed 43 Pressure gauge (Option) EXH(3) OUT(2) SUP(1) 22 15.5 M5 depth 7 Rc 1/2 Exhaust port 66 9 68 66 IN Bleed 2-Rc 1/8 Pressure gauge port 2-Rc 1/4 to 1/2 Port size 22 76 144 43 EXH(3) SUP(1) OUT(2) Rc 1/2 Exhaust port 68 66 66 2-Rc 1/4 to 1/

9.8

Suction Verification High Vacuum Suction Work 1 Work 2 Work n Max. A P-1 H-1 n-1 Formula for Obtaining the Set-Value Min.

Manifold Specifications

+ COM (For COM specifications, specify them separately.) 1 3 5 6 VZ1120MOZ-M5 Applicable valve model Rated voltage 100 VAC 50/60 Hz, 110 VAC 50/60 Hz, 24 VDC, 12 VDC Note 1) Value at manifold base mounted, single operating Note 2) Withstand voltage specification of wiring unit part is equivalent to JIS C 0704 class 1.

Compact Vacuum Unit

0.457 0.457 0.402 0.571 V V (inch) (n1) x 0.402 L n 1 2 L1 L2 1.14 0.85 1.54 1.25 3 1.94 1.65 4 2.35 2.06 5 2.75 2.46 6 3.15 2.86 7 3.55 3.26 8 3.95 3.66 9 4.35 4.06 10 4.76 4.46 11 5.16 4.87 12 5.56 5.27 Refer to page 14 for the dimensions for the various vacuum (V) ports. 01 M5 ZB3 L(O)-P 0 1 1 3 K1 Q1 ZZB-S M5 Air pressure SUP Vacuum pressure SUP (PV) port 2 x 1/8, M5 thread depth 0.197

Precision Regulator

, NBR 1 1 P36203009#1 P36203009#1 17 Valve Brass, NBR 1 1 P36203010#1 P36203010#1 18 Damper NBR, other P36201021 1 1 1 P36202026 P36202026 19 O-ring H-NBR 2.5 x 1.05 3 2 2 1.42 x 1.52 1.42 x 1.52 20 O-ring NBR 3 1 3 1 4.5 x 1 4.5 x 1 4.5 x 1 4.5 x 1 21 O-ring NBR 10 x 1.3 1 1 1 1 1 JISB2401P11 JISB2401P11 27.8 x 1.5 27.8 x 1.5 22 O-ring NBR JISB2401P5 Note 2) JISB2401P5 Note

Digital Pressure Switch

The tightening torque of piping must be 1 Nm for M5 (This is equivalent to approximate 1/6 extra tightening after manual tightening.) and 7 to 9 Nm for R1/8 and NPT1/8. Exceeding this value can damage the piping. For piping of the Pressure switch, hold the piping with a spanner on the metal part of the piping (Piping attachment).

Air Slide Table/Long Stroke Type Series MXY

H Section AA TH (Head height of mounting bolt) +0.03 0 RL 10 10 T TB +0.03 0 R RH Detail of part U Q QL (n x 1) x Q B -Mounting reference planes D PR PR max18 B B PH PH Type of centralized piping on one side without switch rail Type of shock absorber (Only for MXY12) FH FW MA L LA M HR J JH F FL H HA MM MB Model M5 x 0.8 (Width across flats 2.5) MXY6 24 8.5 32 28 M3 x 0.5 18 0.5 60 20 3 12

Precision Regulator Series IR1000/2000/3000

NBR 1 1 P36203010#1 AP100 P36203010#1 Damper 7 NBR, other P36201021 1 1 P36202026 1 P36202026 O-ring 8 H-NBR 2.5 x 1.05 2 2 1.42 x 1.52 3 1.42 x 1.52 O-ring 9 NBR 1 1 4.5 x 1 3 3 4.5 x 1 4.5 x 1 4.5 x 1 O-ring 10 NBR 10 x 1.3 1 1 27.8 x 1.5 1 1 JISB2401P11 1 27.8 x 1.5 JISB2401P11 O-ring 11 NBR JISB2401P5 Note) 1 1 JISB2401P5 Note) O-ring 12 NBR JISB2401P16 Note) 2 2 JISB2401P16

100

4 ZL3 only Supply valve/Release valve Vacuum pressure sensor Ejector q Max. suction flow rate w Standard supply pressure e Vacuum (2/V) port size/ Supply (1/P) port applicable tubing O.D. r Exhaust method 3 300 L/min (ANR)*1 M 0.35 MPa H 0.50 MPa Nil Silencer exhaust 6 600 L/min (ANR)*1 Symbol Vacuum (2/V) port Supply (1/P) port 06 Rc3/4 P Port exhaust (Rc1, G1, NPT1)*3 *1 Branch, Port exhaust

lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

ZQ-OM01301

valve ZQ1-CV 7 V port fitting VVQ1000-50A-C4 (1) Specifications 50A-M5 Without fitting (M5x0.8) 50A-C3 3.2 (Straight) (1) 50A-C4 4 (Straight) Clip (10 pcs. are included in one set) 50A-C6 6 (Straight) A A F1-LC3 3.2(Elbow) ZK1-CP-A F1-LC4 4 (Elbow) 8 Bracket assembly ZQ1-BK1-A 24 - Doc.