Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: H (Stainless Steel Body, FKM Seal, Class B Coil), Option: F (Foot Bracket)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: J (Stainless Steel Body, EPDM Seal, Class B Coil), Option: F (Foot Bracket)

ZL3-OM00801

N06 NPT3/4 5/16(inch) N04 2xNPT1/2 6) 5 DC24V *1G JIS B0202 ISO1603 ISO1179 8) Z 7 L L 0.3(m) 11) A NPN LO B PNP M M 0.3(m) MO 12) 9) M SI (kPa) D P (:psi) E 10) 14 GN (G) B G *7ZL212 27mm ZL212 (2 /1 , 4 ) E (2 ) F (2 ) V (1 ) 13 G 2m) W (2m) 5 No.ZL3-OM00801-A 2. 2.1 (1/P) (2/V) ZL3 ZL6 (3/E) // / (G) (2/V) 2.2 ZL6 1 ZL6 (ZL6-SC1-A) 2), 6 No.ZL3-OM00801-A 3. 3.1

VT317

type Max. number of stations Applicable solenoid valve B mount 20 stations (1) VO317(3) Port location (Direction)/Port size A Exhaust port Symbol Type R P Base (Side) Base (Side) Base (Side) ( ) 1 4 3 8 1 Common (2) ( ) 1 4 3 8 1 4 Base (Side) Base (Side) Base (Side) VV317-02-053-02 3 Individual 1 4 1 4 1 4 Individual exhaust Note 1) For more than 3 stations, supply air both sides of P port

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: -, Option: -, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: N (NPT)

IR1000/2000/3000

8 L Rc(PT) 1/4 X1 Port size Rc(PT) 3/8 IRM Rc(PT) 1/2 Refer to page 8 for details.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow Type (Metal Body) Flow rate and effective area AS220M-02 Model AS120M AS220M-01 R 1/4 Cylinder side Tubing side M5 x 0.8 10-32UNF NPT 1/8 NPT 1/4 R 1/8 Port size Rc 1/4 Rc 1/8 l/min (ANR) {Nl/min} Flow rate 38 7 12 Controlled flow Effective area mm 0.6 0.1 0.2 l/min (ANR) {Nl/min} 420 Flow rate 105 280 Free flow 6.5 1.6 4.3 Effective area mm Note) Flow rates are values measured with

Microspeed Cylinder: Double Acting/Single Rod Series CM2X ø 20, ø 25, ø 32, ø 40 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

UZ Without auto switch L 40 150 CM2X With auto switch CDM2X C73 Number of auto switches L 40 150 2 pcs. 1 pc.

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: L (Stainless Steel Body, FKM Seal, Class B Coil), Option: F (Foot Bracket)

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 8

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Piston seal: 1 pc. 12 16 20 25 CQSX12-PS Rod seal: 1 pc. CQSX16-PS Tube gasket: 1 pc. CQSX20-PS Grease pack (10g): 1 pc. CQSX25-PS 2. Grease packs When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 6

Series: 250 [3 Port COM (Single Unit)], Voltage: 12VDC, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 110VAC 50/60Hz, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 6 (12VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: L (Stainless Steel Body, FKM Seal, Class B Coil), Option: F (Foot Bracket)

Series: 250 [3 Port COM (Single Unit)], Voltage: 3 (110VAC 50/60Hz), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: L (Stainless Steel Body, FKM Seal, Class B Coil), Option: F (Foot Bracket)

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: L (Stainless Steel Body, FKM Seal, Class B Coil)

Fitting Type: B (Branch Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5G (Tube O.D. 1/4", Tubing Size 3/4"x5/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female), Thread: N (NPT)