lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

Precision Regulator Series IR1000/2000/3000

NBR 1 1 P36203010#1 AP100 P36203010#1 Damper 7 NBR, other P36201021 1 1 P36202026 1 P36202026 O-ring 8 H-NBR 2.5 x 1.05 2 2 1.42 x 1.52 3 1.42 x 1.52 O-ring 9 NBR 1 1 4.5 x 1 3 3 4.5 x 1 4.5 x 1 4.5 x 1 O-ring 10 NBR 10 x 1.3 1 1 27.8 x 1.5 1 1 JISB2401P11 1 27.8 x 1.5 JISB2401P11 O-ring 11 NBR JISB2401P5 Note) 1 1 JISB2401P5 Note) O-ring 12 NBR JISB2401P16 Note) 2 2 JISB2401P16

Digital Pressure Switch

digit Hysteresis mode Hys teresis 0 to variable 1 Window comparator mode Output voltage (rated pressure range) 1 to 5 V 2.5%F.S. 0.6 to 5 V Analogue Voltage output 2.5%F.S. output Linearity 1%F.S.

3M/SMseries

Pod NVF3000 NVF5000 Supply SUP Cylindet cYL.1, CYL.2 A , B Exhaust EXH.1, EXH.2 Rl, R2 Symbol (SirEle solenoid) l c 1 : c Y L . 1 l IC2:CYL.2 lEl :EXH.r I {E2:EXH.2] Lubricant 1.

ZQ-OM01301

(October 1999) Vacuum ejector system Manifold ZZQ108A-B S C-A (1) (2)(3) (4) (3) Vacuum release pressure supply port (PD port) (1) Number of stations B None (Release pressure is 01 1 stations supplied from the P port.) 02 2 stations C Note 1) Provided (Breaking pressure: Supplied : from D port) 08 8 stations Note 1) If the standalone product does not have the energy saving function, select

7.4

Electrical entry Type of actuation S07 1 5 5 G Connector kit SS0755-07C4C S0715-5G S0725-5G S07A5-5G 1 setManifold base part no. 3 setsValve part no. (Stations 1 to 3) 2 setsValve part no. (Stations 4 to 5) 2 setsValve part no.

3 Port Air Operated Valve Series SYJA300

8 1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 Type SS3YJ5-41-01 1/8 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5

4/5 Port Air Operated Valve Series SYJA3000

Example: SS5YJ7-20-03 1 pc. (Manifold base) SYJ7120-5G-01 2 pcs. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) SS5YJ7-41-03-01 1 pc. (Manifold base) SYJ7140-5LZ 1 pc. (Valve) SYJ7240-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Hexagon socket head cap screw End block L End block R 1 2 3 Refer to How to Order below. Refer to Table (1) (including 1 pc. of y). Refer to Table (1) (including 1 pc. of t). Table (1) ZQ13M--(-Q)Note 1) 4 Ejector assembly (1 pc. each in t and y is included.)

Compact Vacuum Unit Ejector/ Vacuum Pump System

ZB-OM00201-B Model Indication for Manifold (1) Number of stations 01 1 station 02 2 stations 12 12 stations (2) Pressure sensor/Vacuum pressure switch mountable Note 1) NIL Sensor/ switch non-mountable base S Sensor/ switch mountable base Note 1) Select S when the model with either the pressure sensor or the pressure switch for vacuum is selected for how-to-order for the single unit (8)

IDX-OM-W016

IDFA Series 5 Troubleshooting 5 1 IDX-OM-W016 Air dryer6 References 6 References 6-1 Specifications Model Specification IDFA3E IDFA4E IDFA6E IDFA8E IDFA11E IDFA15E1 At Outlet Pressure Dew 12m3/h 24m3/h 36m3/h 65m3/h 80m3/h 120m3/h Point of 3 At Outlet Pressure Dew Air Flow Rate (ANR)(Note 1) 15m3/h 31m3/h 46m3/h 83m3/h 101m3/h 152m3/h Point of 7 At Outlet Pressure Dew 17m3/h 34m3/h 50m3/h

IR1000/2000/3000

only) 0 1 Accessories None With bracket With pressure gauge Nil B G Regulating pressure range Port size For series IR1000/2000 Application Symbol Size 0 1 2 0.005 to 0.2MPa 0.005 to 0.4MPa 0.005 to 0.8MPa IR1000 IR2000 IR3000 01 02 03 04 1/8 1/4 3/8 1/2 Note) The air operated type is model IR2120 only.

Air Slide Table Series MXP

Wa = 1 x 1.2 = 1.2 Wa = 1 x 1.2 = 1.2 Allowable load mass coefficient : Graph (1) Allowable load mass coefficient : Graph (1) = 1 = 1 Max. allowable load mass Wmax: Table (2) Max. allowable load mass Wmax: Table (2) Wmax = 1.2 1 = 0.2/1.2 = 0.17 Wmax = 1.2 1 = 0.2/1.2 = 0.17 1 = W/Wa 1 = W/Wa Find the load factor of the load mass 1. 3-2 Load Factor of Static Moment M = W x 9.8 (Ln + An)

Manifold Specifications

Non plug-in type Thread type 02 2 stations Standard Nil NPT Rc N T F Symbol 24 24 stations NPTF G Option VV5ZS2-51FD-091-01-MP5 VZS2150-5FZ VZS2250-5FZ 1 5 2 Note) Maximum stations 51F 16 stations 51G15 stations 51 24 stations Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Symbol Port size 1 1 8 01 Rc (Manifold base) (2 position single) VV5ZS2-51-071-01-M5

Manifold Specifications

Non plug-in type N T F Symbol 24 24 stations NPTF G Option VV5ZS3-51FD-091-01-MP5 VZS3150-5FZ VZS3250-5FZ 1 5 2 Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Note) Maximum stations 51F 16 stations 51G 15 stations 51 24 stations Symbol Port size 1 1 8 02 Rc 1 4 01 Rc (Manifold base) (2 position single) VV5ZS3-50-071-01-M5 VZS3150-5G 1 5 Embedded type One-touch

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Combination example q Air combination AC20B-02E-D 1 pc. Spacer with bracket Y200T-D 1 pc. Modular mounting type 2-port solenoid valve JSXM21-AN301R-5G-U-F 1 pc.

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Series P port/Thread VV2Q22-05 1 set Manifold part No. 2 3 VQ20 VQ30 Rc3/8 NPT3/8 NPTF3/8 G3/8 VQ21M1-5G-C6 00N 00T 00F 4 sets Valve part No. (Stations 1 to 4) Stations VQ21M1-5G-C8 1 set Valve part No.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

Parallel Style Air Gripper: Wide Type Series MHL2

8@1@5 tyu@3@4 Replacement part: grease pack part no. GR-S-005 (5g) GR-S-010 (10g) GR-S-020 (20g) GR-S-005 (5g) GR-S-010 (10g) GR-S-020 (20g) GR-S-005 (5g) GR-S-010 (10g) GR-S-010 (10g), GR-S-020 (20g) (1 pack each) Order one finger assembly and pinion assembly per unit. For piston assembly and rack, order 2 pieces per unit. For rod cover assembly, order 4 pieces per unit.