Air Slide Table Series MXQ

Contents D6 8 12 16 20 25 MXQ 6-PS MXQ 8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS GR-S-005 (5g) GR-S-010 (10g) GR-S-020 (20g) GR-S-050 (50g) GR-L-005 (5g) GR-L-010 (10g) GR-L-020 (20g) GR-L-050 (50g) 8 12 16 20 25 6 8 12 16 20 25 MXQ 8R-PS MXQ12R-PS MXQ16R-PS MXQ20R-PS MXQ25R-PS MXQ 6P-PS MXQ 8P-PS MXQ12P-PS MXQ16P-PS MXQ20P-PS MXQ25P-PS -X Guide Individual -X Cylinder 127 Series MXQ Auto Switch

Microspeed Cylinder: Double Acting/Single Rod Series CM2X ø 20, ø 25, ø 32, ø 40 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

CM2X32-PS Grease pack (10g): 1 pc. Boss-cut flange type (1 pc.) CM2X40-PS Boss-cut trunnion type (1 pc.) 2. Grease packs When maintenance requires only grease, use the following part numbers to order.

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 8

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

CQSX20-PS Grease pack (10g): 1 pc. CQSX25-PS 2. Grease packs When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 6

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

CUX16-PS CUX20-PS M3 0.54 10% CUX25-PS M4 1.23 10% Grease pack (10g): 1 pc. CUX32-PS M5 2.55 10% Due to cylinder structure, 10mm bore size seals cannot be replaced. M6 4.02 10% 2. Grease pack When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) Operation Warning 1.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

(Contact us when vibration exceeds 10G.) 2 R(EXH)port piping Take care that exhaust air is not throttled. (Otherwise, delay in response or cylinder malfuction may result.) 1 Ensure that voltage leakage across the coil is as follows. DC coil: No more than 2% of the rated voltage.

Precautions 1

.: GR-S-010 (10g) How to order solenoid valves VZ390Voltage Electrical entry 1567 Series CVM5 Basic Style (B) CVM5B Bore size Stroke Manual override Width across flats B2 Width across flats B1 x x Width across flats NA S + Stroke ZZ + Stroke Built-in One-touch fitting One-touch fitting port size With rod boot l 8 8 Width across flats B3 e JH JW f h ZZ + Stroke For DIN terminal and double

Cotton Element/Stainless Steel 304 Core: 10G (Nominal Filtration Accuracy: 0.5 μm)

Response speed: 5ms or less , Proof pressure: 500 kPa , Low flow rate range , Output: 1 to 5V analog (non-linear) , Piping specification: M5 female threads, Weight 10g (not including the lead wire), FLOW SWITCH, INSTRUMENTATION, IFW/PFW FLOW SWITCH, 2X, IFW/PFW NO SIZE ALL OTHER, .22312 lb

MWP_E

Grease weight GR-S-010 10g GR-S-020 20g -15- Basic Circuit for Cylinder Operation The basic circuit for operating the product with air filter, regulator, solenoid valve and speed controller (meter-out) is shown in the following figure. It is possible to use a quick exhaust. Regulator Air source Speed controller Air filter Solenoid valve .

CEx-OMI0064

100ms) 5 / 5ms ()/60ms () RS-232C NPN PNP NPN PNP Max DC30V 50mA Max DC30V 50mA Max DC30V 50mA Max DC30V 50mA AC100 AC100 AC100 AC100 DC24V DC24V DC24V DC24V 240V 240V 240V 240V (10%) (10%) (10%) (10%) (10%) (10%) (10%) (10%) 20VA 10W 20VA 10W 20VA 10W 20VA 10W AC : AC1500V,1 : AC500V,1 AC :DC500V,50M 0 +50() 35 85%RH() (1s) 2000V,600V 1055Hz 0.75mm X,Y,Z 2 10G

CEU1

2 + CE1-R00C CE1-R* CE1-R*C 4 4 4 4 EE FL No. 6.5 FL EE OUT1OUT2OUT3 ( ) ,ON/OFF CEU1 CEU1P CEU1-D CEU1P-D 3 (DIN ) LCD() 5 (-9.9.9) () E 2ROM(6.5 :FL) 90 20kHz RS10ms () DC10.813.2V60mA 100ms NPN PNP NPN PNP Max DC30V 50mA Max DC30V 50mA Max DC30V 50mA Max DC30V 50mA AC80120V50/60 z DC21.626.4V 10VA 5W AC1500V1 AC500V 1 DC500V50 0+50 3585RH 1500V600V Hz 2 10G

MONOSASHI-KUN WITH BRAKE CONTROLLER

Range 050 Operating Humidity Range 25%85% Shock Resistance 1055Hz, Amplitude 0.75mm Each Axis for 2 hours Noise Resistance Square Wave (1s Pulse Width) Between 100 VAC line1500V, I/O line 600V Impact Resistance 10G, 3 times at each axis Proof Voltage AC1500V, 1Min(less than 3mA) , between Case & AC Line AC500V, 1Min(less than 3mA) , between Case & 12VDC Current Consumption Below 1.0A Insulation

CEx-OMQ0013

9 AN400-04 AS420-04 12 * 3. 3-1 () 40 50 63 80 100 1.5Mpa 0.75MPa 1Mpa 0.5MPa 0.1Mpa 0.3MPa 50500mm/s 060 850mm 800mm 800mm 750mm 750mm 7-500mm JIS B0209 3-2 CEU2 CEU2P (DIN ) PRESET PROGRAM RUN LCD() 116132 P.T.P point to point 1 9.9mm 0.1mm RAM 5mm 4 2 END NPN PNP DC30V50mA DC30V50mA AC100V1550Hz/60Hz DC24V100.4A 050 2585 1055Hz0.75mm XYZ 2 1 AC 1500V600V 10G

CEx-OMG0106

Range 0~50 Operating Humidity Range 25~85% Shock Resistance 10~55Hz, Amplitude 0.75mm Each Axis for 2 hours Noise Resistance Square Wave (1s Pulse Width) 1500V at Power Terminal, 600V at Input Terminal Impact Resistance 10G, 3 times at each axis Proof Voltage AC1500V, 1Min (less than 3mA), between Case & AC Line AC500V, 1Min (less than 3mA), between Case & 12VDC Current Consumption Below

CEx-OMQ0011

Emax 0.43 5=0.841 OK ML2B32 P19 21 5-1 () 25 32 40 0.10.8MPa 0.30.5MPa 1.2MPa 0.75MP 1001500mms( 100500mms) 560 mm 0+1.8 JIS B0209 Rc1/8 Rc1/4 5 6 8 5-2 CEU2 CEU2P (DIN ) PRESET PROGRAM RUN LCD() 116132 P.T.P point to point 1 9.9 0.1mm RAM 8K 5mm 4 2 END NPN DC30V50mA PNP DC30V50mA AC100V1550Hz/60Hz DC24V100.4A 050 2585 10~55Hz0.75mm XYZ 2 1s 1500V600V 10G

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

Description Model Without With Air cushion Parts name Amount Air cushion 7 Slider 2pcs CVRA150 P694020-49 P694020-50 9 Tube gasket 2pcs Piston seal 2pcs 10 CVRA163 P694030-49 P694030-50 14 Spring pin 4pcs O-ring 2pcs 25 CVRA180 P694040-49 P694040-50 26 O-ring 4pcs CVRA1100 P694050-49 P694050-50 33 O-ring 2pcs Cushion seal 36 2pcs (Grease pack) (10g) 35 - Disassembly procedure and assembly

CVRA1-E

Parts name Amount Slider 2 pcs CVRA150 P294020-49A Tube gasket 2 pcs CVRA163 P294030-49A Piston seal 2 pcs Spring pin 4 pcs CVRA180 P294040-49 23 O-ring 2 pcs 24 O-ring 4 pcs CVRA1100 P294050-49A 25 O-ring (Grease pack) 2 pcs (10g) Refer to page 20 for detailed Product structure. -32- Disassembly Procedure (1) Loosen the hexagon socket head cap screws to remove O-ring 25 with the Solenoid

DOC1023125

Applied portion Ball screw Rail guide GR-S-010(10G) GR-S-020(20G) Dust seal band (When "Without" is selected for the grease application, grease is applied only on the back side. 27 - .

LEKF-OMZ0035

GR-S-010 (10g) GR-S-020 (20g) -11- LEKFS Motor : Parallel (AC servo motor) Component Parts Description No. Description Material Note No.