o + 4l/-\lF 4t/-t-\lF .-tff ",Jri -T1 'Ti 2 Position 2 Position Single Solenoid Doubl Solenoic ,\ rrn+r\-Tl^ ,.ltzriinll* 4rlJaa+rnr-6 @l/Jril+lru rt l 't1 Base Mounted Type(s Port) i i P a 3 Position 3 Position Closed center Exhaust cnter ^,rrncinw "erqlir'x* 1 l 3 Position Pressure Certer i Porl _-!
+ 4l/-\lF 4t/-t-\lF .-tff ",Jri -T1 'Ti 2 Position 2 Position Single Solenoid Doubl Solenoic ,\ rrn+r\-Tl^ ,.ltzriinll* 4rlJaa+rnr-6 @l/Jril+lru rt l 't1 Base Mounted Type(s Port) i i P a 3 Position 3 Position Closed center Exhaust cnter ^,rrncinw "erqlir'x* 1 l 3 Position Pressure Certer i Porl _-!
Rated flow range of sensor Set flow rate range of sensor Sensor 4L/min 20L/min 40L/min 1.8L/min 0.4L/min Flow rate range 10L/min 0.4L/min 4L/min PF2D504 0.25L/min 4.5L/min 1.8L/min 20L/min PF2D520 1.3L/min 21L/min 4L/min 40L/min PF2D540 2.5L/min 45L/min Flow Rate Characteristics (Pressure Characteristics) PF2D504 PF2D520 PF2D540 0.040 0.035 0.030 0.035 0.030 0.025 Pressure loss [MPa] Pressure
+ 4l/-\lF 4t/-t-\lF .-tff ",Jri -T1 'Ti 2 Position 2 Position Single Solenoid Doubl Solenoic ,\ rrn+r\-Tl^ ,.ltzriinll* 4rlJaa+rnr-6 @l/Jril+lru rt l 't1 Base Mounted Type(s Port) i i P a 3 Position 3 Position Closed center Exhaust cnter ^,rrncinw "erqlir'x* 1 l 3 Position Pressure Certer i Porl _-!
Digital Flow Switch for Deionized Water and Chemicals Digital Flow Switch for Deionized Water and Chemicals Body and sensor Body and sensor New PFA New PFA Tube Tube Super PFA Super PFA Three types of flow range 0.4 to 4l/min (PF2D504) 1.8 to 20l/min (PF2D520) 4.0 to 40l/min (PF2D540) Swept flow characteristics Tapered side seal minimizes dead volume to reduce accumulation of liquid pool
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: LO (L Plug w/o Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: C6 (ø6 One-touch Fitting)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: C6 (ø6 One-touch Fitting)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: None, Manual Override: D (Push-turn Locking Slotted Style), Port Size: C6 (ø6 One-touch Fitting)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: H (Grommet Lead Wire 0.6m), Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: C6 (ø6 One-touch Fitting)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: None, Manual Override: D (Push-turn Locking Slotted Style), Port Size: C6 (ø6 One-touch Fitting)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: C6 (ø6 One-touch Fitting)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: C6 (ø6 One-touch Fitting)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: H (Grommet Lead Wire 0.6m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: C6 (ø6 One-touch Fitting)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: C6 (ø6 One-touch Fitting)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: C6 (ø6 One-touch Fitting)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Surge Suppressor: U (Light & Surge Suppressor Non-polar), Manual Override: Non-locking Push Style, Port Size: C6 (ø6 One-touch Fitting)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Lead Wire: LN (L Plug Connector w/o Lead Wire), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: C6 (ø6 One-touch Fitting)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: C6 (ø6 One-touch Fitting)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: LN (L Plug Connector w/o Lead Wire), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: C6 (ø6 One-touch Fitting)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: C6 (ø6 One-touch Fitting)