MXS

26 39 19 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 Refer to "Dimensions" of MXS 16 on p.3.11-19 for one with shock absorber as symmetric.

CL

5 57.5 73.5 15.5 3.5 38 6 13 8 28 8 4 41 4 Up to 300 10 25 26 8 90 19.5 22 64.5 17 32 6 69 83.5 4 45 9 13 8 33.5 9 7 45 7 Up to 300 12 32 26 19.5 8 90 22 64.5 17 32 6 69 83.5 4 45 9 13 8 37.5 9 7 45 7 Up to 300 14 40 21 32 11 100.5 24 70 22 41 8 76 90.5 4 52 11 16 10 46.5 8 8 50 7 Up to 300 NN Boss-cut ZZ K Bore size (mm) N NA PH PL MM P PG S ZZ PW Bore (mm) 1/8 1/8 1/8 1/4 20 M20 x 1.5

ISO Standard Hydraulic Cylinder

124 89 12 M27 x 2 80 90 161 18 36 50 13 30 39 17 44 32 1/2 136 36 65 68 80 M16 x 1.5 25 to 800 82.7 17 26 149 114.5 16 M33 x 2 93 115 186 18 45 60 41 46 20 57 3/4 159 9 41 45 68 76 100 25 to 1000 96.9 M16 x 1.5 19 32 172 128 16 M42 x 2 101 130 216 72 50 20 63 168 26 56 47 3/4 56 10 52 79 91 Bore size (mm) X2 Y Y1 Y2 ZA Z V X1 ZZ 32 5.5 73 153.5 60 20 13 10 128 26 40 6.5 98 185 22 62 20 10

Table of Contents

For dimensions of the 25 stroke, refer to page 8-26-14.

CJ5-S

side GB F NN MM GA Piping port 2-M5 x 0.8 Cover surface Piping port M5 x 0.8 0 0.3 CEP1 BA CB D CE1 LH LB LY CE2 With head cover port in axial location (R) 0 0.3 LT BB NB A ML2B NA X Y LX LZ S + Stroke Z + Stroke H C J G5-S CV 2-LC Mounting hole MVGQ CC Bore size (mm) A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4

CJ5-S

A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18.3 18.3 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis style (D): CJ5DS Piping port 2-M5 x 0.8 Clevis pin ( ) CDH9 + 0.030 0 Dd9 0.030 0.060 NB GA GB MM CA CB D NA A U BA S + Stroke

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

NTH-125 26 69 80.8 70 M48 x 1.5 t +0.15 0 m 40 NTH-040 10 21 25.4 22 M16 x 1.5 C 50 NTH-050 12 26 31.2 27 M20 x 1.5 H 0 0.15 Df8 63 NTH-060 14 31 37 32 M24 x 1.5 C series rod 80 NTH-080 17 40 47.3 41 M30 x 1.5 L C 100 NTH-100 20 54 63.5 55 M39 x 1.5 Material: Rolled steel Bore size (mm) Part no.

51

(mm) Rod Flange Symbol F GB B A AL B1 C D FT FX FD ZZ E GA H H2 H1 I J MM KA NA P S Bore size (mm) 20 25 32 40 50 63 80 100 12 15 15 20.5 26 26 32.5 32.5 14.5 17.5 17.5 23.5 29 29 35.5 35.5 8 10 12 14 18 18 22 26 12 14 18 25 30 32 40 50 5 6 6 8 11 11 13 16 79 85 87 93 121 121 151 152 40 44 53 61 76 92 104 128 13 17 17 19 27 27 32 41 14 16.5 20 26 32 38 50 60 2 2 2 2 2 2 3 3 28 32 38 46 58

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

x 1.5 20 22 22 M16 x 1.5 30 3/8 19 10 95 53 115 73 63 28 8 80 80 60 22.4 55 30 11 17 17 M10 x 1.5 22 20 25 M18 x 1.5 30 3/8 21 12 102 60 122 80 80 32 8 100 100 75 28 65 32 13 22 20 M12 x 1.75 26 26 29 M22 x 1.5 35 1/2 26 12 130 75 155 90 100 38 6.5 118 118 90 35.5 80 35 13 27 19 M12 x 1.75 27 26 34 M27 x 2 35 1/2 34 16 145 90 172 100 125 38 6.5 140 140 112 35.5 80 35 15 27 19 M14 x 2 27

CJ2

Bore NTJ-015A 10 16 8.1 9.2 7 8 3.2 4 M4 X 0.7 NTJ-010A M5 X 0.8 (mm) Bore 10 16 A LD NA B NB C LH D LX L X LB Y GA S GB Z H MM 3.5, 6.5Depth of counter bore: 4 M4 X 0.7 15 20.5 12 9.5 14 8 4 12 23 28 16 8 16 54 5 74 20 4.5, 8Depth of counter bore: 5 M5 X 0.8 15 20.5 18 9.5 20 10 5 16 26 28 20 8 16 55 5 75 20 Rear pivot CJ2RA10 SCJ210, #10 CJ2RA16 SCJ216, #10 The data shows auto switch

Table of Contents

Abnormal drive current 26 The driver unit power supply is shut off due to a regeneration problem, etc. Abnormal driver parameter 28 A driver parameter abnormality in the controller system has occurred. Unsuccessful home position return 30 Trying to execute a program/step without completing the setup (home position return).

Electric Actuator/Slider Type

Note 2) Check the clearance and play of the guide separately. 26 Electric Actuator/Slider Type Belt Drive Series LEFB LEFS25, 32, 40 AC Servo Motor RoHS How to Order 300 S V7 S B 3 M2 LEFB 32 q w e r y t u i o !

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G 16 16 16 16 21 26 39 19 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 NA 2 2 2 2 2 4 4 4 GA 16 16 16 16 51 61 109 159 KA 125 173 223 13-/22-MXS16L-10 13-/22-MXS16L-20 13-/22-MXS16L-30 13-/22-MXS16L-40 13-/22-MXS16L-50 13-/22-MXS16L-75 13-/22-MXS16L-100 13-/22-MXS16L-125

SMC

55 68 NN 2 2 2 2 3 4 5 7 NA 2 2 2 2 2 4 4 4 H 40 40 40 50 30 35 35 35 KA 125 173 223 G 16 16 16 16 21 26 39 19 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 GA 16 16 16 16 51 61 109 159 13-/22-MXS16-10 13-/22-MXS16-20 13-/22-MXS16-30 13-/22-MXS16-40 13-/22-MXS16-50 13-/22-MXS16-75 13-/22-MXS16-100 13-/22-MXS16-125 143 MXS Air slide table 1322Dimensions / MXS16 1322Axial piping (16) MXS16-

CG5-S

100 14 10 29 20 71 16 110 M12 x 1.75 10 26 8 M26 x 1.5 131 212 100 to 750 Flange brackets and plug bolts are installed before shipment from factory.

Round Type Hydraulic Cylinder

I 3 (mm) Effective thread length (mm) IA (tolerance) Bore size (mm) Stroke range (mm) A B1 B2 D F GA GB H H1 H2 I K MM P S NN N NA NB NC ZZ 0.020 0.053 0.020 0.053 0.025 0.064 0.025 0.064 20 Up to 800 15.5 18 13 26 10 16 12 8 41 5 8 30 23 f8 5 M8 x 1.25 1/8 81 M22 x 1.5 13 26 19 15 138 25 Up to 800 19.5 M10 x 1.25 22 17 32 12 16 12 8 46 6 8 32 25 f8 5.5 1/8 81 M24 x 1.5 13 28 19 15 143 32

Round Type Low Pressure Hydraulic Cylinder Series CH
M

I 3 (mm) Effective thread length (mm) IA (tolerance) Bore size (mm) Stroke range (mm) A B1 B2 D F GA GB H H1 H2 I K MM P S NN N NA NB NC ZZ -0.020 -0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 18 13 26 10 16 12 8 41 5 8 30 5 M8 x 1.25 1/8 81 M22 x 1.5 13 26 19 15 138 23 f8 15.5 to 800 25 22 17 32 12 16 12 8 46 6 8 32 5.5 M10 x 1.25 1/8 81 M24 x 1.5 13 28 19 15 143 25 f8 19.5 to 800

REC

13 10 41 150 to 700 20 FX 25 4 60 75 17 10 22 19.5 40 32 13 10 45 150 to 700 26 REC 32 4 60 75 17 12 22 19.5 40 32 13 11 45 150 to1000 26 20, 25, 32 40 36 5 66 82 22 14 24 21 52 41 16 12.5 50 200 to1000 32 RHC NA S Z ZZ NN P H1 H2 I K MM N Bore size Stroke range 1 8 30 20 M20 X 1.5 146 37 200 150 to700 M8 X 1.25 5 8 33.5 5 20 MTS 1 8 34.5 M26 X 1.5 25 146 41 204 150 to700 M10 X 1.25 6 8

High Power Cylinder Series RHC

Applicable bore size C D d H Applicable bore size C D d H 5 12.5 15 26 30 M8 x 1.25 8 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 16.5 19.6 32 36.9 M10 x 1.25 8 M24 x 1.5 32 17 25/32 25 SOR-25 NT-03 8 21.0 25.4 38 43.9 M14 x 1.5 9 M30 x 1.5 38 22 40 32 SOR-32 NT-04 11 26 31 41 47.3 M18 x 1.5 11 M33 x 2.0 41 27 50 40 SOR-40 NT-05 11 26 31 M18 x 1.5 27 63 NT-05 13 31 37 M22 x 1.5 32 80 NT-08 16 39

SMC Pneumatic Clean Series

WH E-0.05 E-0.05 I 0 0 KA AL G port 8-J F K C-0.1 A NA F H S + Stroke ZZ + Stroke (mm) A AL Bore size Standard stroke range B1 C D E F GA GB H H1 I J K KA MM NA P RA S WA WB WH 20 20 20 W ZZ 40 30 27 Up to 300 50 35 32 Up to 300 63 35 32 Up to 300 19 27 27 6 7 7 44 55 69 139 162 162 26 32 38 14 18 18 1/8 1/4 1/4 16 20 20 8 9 9 25 30 32 87 102 102 2 2 2 25 30 30 22<19> 26<24> 26<24> 15 17