AC

02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%

5 Port Solenoid Valve Series SV

Response time 5 (EA) 1 (P) 3 (EB) Response time ms at 0.5MPa (72.5psi) Type of actuation 3 position pressure center SV1000 SV2000 SV3000 SV4000 (A) 4 (B) 2 2 position single 11 or less 25 or less 28 or less 40 or less 2 position double 10 or less 17 or less 26 or less 40 or less 3 position 18 or less 29 or less 32 or less 82 or less 5 (EA) 1 (P) 3 (EB) 4 position dual 3 port valve 15 or

CQS

3.5 3.5 22.5 10 7.5 2.5 10 7.5 24.5 25 7 7 3.5 (1) 5.5 5.5 24.5 11 9.5 0.5 11 9.5 26.5 ( ): Denotes the values of D-A93.

High Vacuum Angle Valve

40-2 65 171 66 39 11 55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

Floating Joint

6.6 9 9 11 11 18 22 7 8 11 13.5 16 20 22 24 13 17 22 27 32 41 46 55 19 20.5 27 34.5 43.5 52 73.5 86 1.25 1.25 1.5 1.5 1.5 1.5 1.5 1.5 32.5 36 49 61.5 76.5 94 131 152 8 9 13 15 18 24 38 42 0.5 0.5 0.75 1 1.25 2 2.5 3 1100 2500 4400 11000 18000 28000 36000 55000 0.08 0.12 0.28 0.63 1.15 2.07 5.2 9 Semi-standard Pneumatic: Up to 1 MPa Hydraulic: Up to 3.5 MPa JAF20-8-100 JAF25-10-150 JAF32-

MGG

size (mm) W V U T O P S Z X Bore size (mm) Bore size (mm) Y R HR HN Q Y R Q 20 25 32 40 50 40 48 82 12 M6 x 1 depth 9 Rc 1/8 26 157 30 20 25 32 40 50 20 25 32 40 50 11 25.3 12 (14) 21 37 47.5 107 (115) 104 46 57 100 13 Rc 1/8 M6 x 1 depth 13 31 175 37 11 28.3 12 (14) 21 40 104 48 107 (115) 52 65 114 16 Rc 1/8 M6 x 1 depth 13 38 201 37 11 31.3 12 (14) 21 43 106 49 110 (118) 62 84 138 Rc 1

JA/JAH/JB/JS

40 52 45 55 65 82 100 1100 2500 4400 11000 18000 28000 36000 55000 21 24 31 41 50 59.5 79 96 0.08 0.12 0.28 0.63 1.15 2.07 5.2 9 6 6 9 12 16 19 24 29 6.6 6.6 9 9 11 11 18 22 7 8 11 13.5 16 20 22 24 13 17 22 27 32 41 46 55 CV MVGQ CC RB Option Pneumatic: Up to 1 MPa Hydraulic: Up to 3.5 MPa 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 JAF20-8-100 JAF25-10-150 JAF32-10-100 JAF40

JA/JAH/JB/JS

16 19 22 25 32 80 90 19 25 30 38 47 58 79 89 30 42 52 56 70 80 96 116 11.5 14 17.5 23 28 35 45 55 0.09 0.18 0.36 0.61 1.09 2.03 6.4 10 6.6 9 11 11 14 16 18 22 24.5 28.5 35.5 44.5 53 65 67.5 78 7 8 11 13.5 16 20 22 24 13 17 22 27 32 41 46 55 Option Pneumatic: Up to 1 MPa Hydraulic: Up to 3.5 MPa 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 JAL20-8-100 JAL25-10-150 JAL32-10-100

MXS Series Air Slide Table

5 deep +0.030 0 HA GA NN-M6 X 1 thread 12 deep 6 A B 1.5 30 11 11 5.1 9.5 A B 29 11.5 29 11.5 H (NN-1) X H G Cross section AA Cross section BB (mm) Note) Refer to "Dimensions" of MXS20 on P. 62 for one with shock absorber as symmetric.

MXS

) N-M6 X 1 thread 13 deep(Helisert) 7 22 Stroke adjuster at retraction end 7 6-M6 X 1 thread 10 deep 2.5 (With stroke adjuster at extension end) 4.5 (With stroke adjuster at retraction end) 38 38 92 56 70 24.5 FF F 6H9 6 deep +0.030 0 31 6H9 6 deep +0.030 0 N -1 X F 2 30 2-M8 X 1.25 thread 15 deep 15 M 0.5 55 62 Z ZZ (NN-1) X H G H 34 16 34 16 A B 11 12 6.6 12 6H9 6 deep +0.030 0 38 2 7 A

Table of Contents

12 AC 3 3 3 4 5 J 20 21 24 28 32 AA 58 64 77.5 89 116 AB 55 61 74.5 85 111 H 10.4 13.5 17.7 19.5 23.5 5 7 8 10 11 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 R 44 53 62 76 95 NB TB 8 8 10 10 12 Q 11 12 14 17 20 O 4.5 4.5 5 5.5 6 SC 8 9.5 9.5 17 23 UA M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M 2 2 2 3 4 NA 16 18 20 26 30 NC 10 10 12 14 16 SA 4.5 5.5 5.5 6.6 6.6 SB 8 9.5 9.5 11 11 TA M4 x

MNB

500 to 600 to 600 to 750 to 750 1/8 1/8 1/4 1/4 1/4 1/4 12 12 15 12 18 20 10 14 18 18 22 26 19.5 27 32 32 37 37 22 30 35 35 40 40 54 63 75 90 102 116 17 22 27 27 32 41 6 8 11 11 13 16 46 52 65 75 95 114 97 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 83 91 104.5 119.5 150 170 45.5 52.5 58.5 68 81 96 13 16.5 19 23 33 37.5 8.5 10 12.5 17.5 22 25 13 14 15.5

MY1

0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 YW 32 40 46 55 67 T 7 8 10 10 14 Model MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B16 SMY1B16, #1 (#1 + #7) "P" indicates cylinder supply ports.

CM2

20 18 8 40 4 25 40 62 15.5 13 26 5 8 28 5 6.8 102 3.2 M8 x 1.25 15 24 M20 x 1.5 1/8 131 25 45 25 8 8 13 55 20 22 10 47 4 28 40 62 19.5 17 32 6 8 33.5 5.5 6.8 102 3.2 M10 x 1.25 15 30 M26 x 1.5 135 1/8 -X 32 45 25 8 8 13 55 20 22 12 47 4 28 40 64 19.5 17 32 6 8 37.5 5.5 6.8 104 3.2 M10 x 1.25 15 34.5 M26 x 1.5 137 1/8 40 50 27 11 10 16 75 23 24 14 54 4 30 55 88 21 22 41 8 10 46.5 7 7 134

TABLE OF CONTENTS

/4 NPT 9 6 3 3/8 NPT 1 10 1/2 NPT 33 12 11 1 NPT 23 13 1 1/2 NPT 24 14 3/4 NPT 29 19 2 NPT 26 16 2 1/2 NPT 27 17 3 NPT 28 18 B Mounting Bracket In an AC appl. give full details 2 Series 20 3 Series 30 4 Series 40 5 Series 50 7 Series 70 8 Series 80 1 2WNO 2 2WNC 3 3WNC 4 3WNO 5 3WDC 6 3WMP 18 Direct Lift 2WNO 27 Direct Lift 2WNC 28 Pilot Lift 2WNC G 1/32 H 3/64 J 1/16 K 3/32 L 7/64 N 1/8

CJ2

D-A7 D-A80 D-A73C D-A80C 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 D-C7 D-C80

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Auto Switch Specifications/Refer to page 11-11-1 for further information on auto switch single body.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Auto Switch Specifications/Refer to page 11-11-1 for further information on auto switch single body.

SMC Pneumatic Clean Series

22 18 14 12 10 8 21.5 15 15 15 171 137 135 131 50 45 45 41 27 25 25 21 20 20 20 10 8 8 8 30 28 28 25 104 102 102 3.2 3.2 3.2 55 40 40 40 75 55 55 55 21 19.5 19.5 15.5 M10 x 1.25 M8 x 1.25 M26 x 1.5 M20 x 1.5 4 4 4 7 6.8 6.8 1/4 1/8 1/8 16 13 13 11 8 8 M26 x 1.5 M10 x 1.25 23 10 8 3.2 134 M32 x 2 M14 x 1.5 With air cushion Relief port M5 x 0.8 H A K F AL Width across flats B1 H1 H2 GC GA

CHKD/CHKG

11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth 15.2 117 3/8 30 15 100 122 96 26 56 50 M39 x 4 45 21 106 17 26 depth 17.5 142 3/8 36 15 Note 1) Body dimensions are