Fluoropolymer Piping Equipment

3/8" 1/2" x 3/8" 1/2" x 3/8" 1/2" x 3/8" 1/2" x 3/8" 1/4" x 5/32" 1/2" x 3/8" 1/2" x 3/8" 1/8" x 0.086" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 3/8" x 1/4" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 1/2" x 3/8" 1/4" x 5/32" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1/2" x 3/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/

TABLE OF CONTENTS

O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

Table of Contents

20 1 11.5 7 7 8 8 Manual override (Push and turn the locking type override.)

Electric Actuator/Slider Type

1 !0 #3 @3 @6 @7 @9 @4 #8 o t @0 @2 !6 !5 w r e #7!3!4 !7 #1 !8 #0 @5 @1 @8 !9 #6 #5 #2 Motor details Component Parts No. Description Material Note No.

2/3 Port Valve

55 59 60 62 38.5 47 54 47 48 50 92 95 97 38.5 47 55 59 62 64 , , , VX31 VX32 VX33 1 4 1 8 27.5 27.5 3 8 1 4 3 8 1 4 4.1-51 VXV31/32/33 Vacuum Use/VXV3mmm Specifications QVacuum flow passage has large orifice.

Proposals for Energy Saving

7 !9!8 @4 #3#0 #4$0#9@5#2w @6 @3ue !6!5 !1 !2 !0 #7@1#5@2 @8@7#6@0#8 End lock !3 !4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

Air Cylinder

M8 x 1.25 24 1/8 62 20 8 21 131 25 22 19.5 47 17 32 10 13 8 45 6 8 33.5 5.5 8 4 6.8 28 102 3.2 40 55 M10 x 1.25 30 1/8 62 20 8 25 135 32 22 19.5 47 17 32 12 13 8 45 6 8 37.5 5.5 10 4 6.8 28 104 3.2 40 55 M10 x 1.25 34.5 1/8 64 20 8 25 137 40 24 21 54 22 41 14 16 11 50 8 10 46.5 7 12 4 7 30 134 3.2 55 75 M14 x 1.5 42.5 1/4 88 23 10 27 171 With Rod Boot (mm) B3 e h l Z Symbol Stroke 1 to 50

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

1u @7 @6 q!7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.

CL

F D GA 80 H 8 BQ GK GQ GL GR 5 BZ BP GC GB GD 3.5 B1 AL B B2 BN BC 13 1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 Up to 400 55 8 8 41 4 6 38 4 26 40 73.5 15.5 63.5 8 13 20 8 6 Up to 450 64.5 8 9 45 7 9 45 7 32 4 47 83.5 19.5 74.5 10 22 17 90 13 CNS 25 8 6 Up to 450 64.5 8 9 45 7 9 45 7 32 4 47 83.5 19.5 74.5 12 22 17 90 13 32 10 8 Up to 500 70 11 8 50 7 11 52 8 41 4 54 90.5 21 80 14 24 22 100.5 16 40

5 Port Solenoid Valve Series SY3000/5000/7000/9000

A A A A A R R B B B B B P P Applicable tubing O.D.: 8, 5/16" P , R port One-touch fitting A, B port One-touch fitting Applicable tubing O.D.: 4, 5/32" 6, 1/4" (L4) U side D side L3 (N7: 7) (C6: 3.2) 27 Terminal screw M3 DIN rail DIN rail holding screw (3) 8 COM 1 2 3 4 5 6 7 8 COM 1 2 3 4 5 6 7 8 15.7 34 87.7 B B B PORT SOL.a PORT SOL.a SOL.b SOL.b A A A 5.5 3 4 5 6 7 8 stations 2 stations

Table of Contents

Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

CNA

For details, refer to page 9-15-40. 9-7-26 27 Series CNAW Cylinder with Lock Double Acting, Double Rod Construction #8 t #5 @7 e !6 !0 u @5 i !5 !1 o q $8 y $1 r #5 $6 #2 #7 #3 #4 B A CL CL1 MLGC #1 @3 !4 %0 !3 #9 @8 #6 $0 w #0 $5 $7 $3 $9 %1 $4 @1 @4 !8 @0 !7 !

CNA

For details, refer to page 9-15-40. 9-7-26 27 Series CNAW Cylinder with Lock Double Acting, Double Rod Construction $6 #2 #7 #3 #4 #8 t #5 @7 e !6 !0 u @5 i !5 !1 o q $8 y $1 r #5 B A CL CL1 MLGC @3 !4 %0 !3 #9 @8 #6 $0 w #0 $5 $7 $3 $9 %1 $4 @1 @4 !8 @0 !7 !

ISO Standard Hydraulic Cylinder

3 @1 @3 @2 e o !8 @7 #0 !7 @6 r u #1 t @4 @5 #2 @0 y i !9 !0 q !1 w !

Air Slide Table Series MXQ

'(&& '(** '(,* '()2 $ '(1 & * ) 1 $% MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 '('&2 '('*+ '('.. '(&& '(&1 '(*) MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 '(+ MTS '(. '() '(, Caution : % *'' 8( '(* Table (3) Correction Value of Moment Center Position Distance: An (mm) " 3 *#(# .' &'' *'' ,'' .'' +'' A1, A3 # * ) . 1 *' &)(. &1(. *& *+ *-(. ,.(. $ B 8# &.' 7 7 7 7 .1(. 1) &*. 7 7 7 )*(. .. 1) &'

MXQ

1 !2 !3 !4 !5 !6 !7 !8 !

Air Cylinder

1 !5 u !9 t !4 w !7 @0 e r y @1 q i !6 !3 !0 !2 Component Parts Replacement Parts/Seal Kit No. Description Material Note Bore size (mm) Kit no.

Free Mount Cylinder

Note Contents 20 1 CU20A-PS Hard anodized Aluminum alloy Cylinder tube 1 25 2 CU25A-PS Hard anodized Rod cover/Bearing Aluminum bearing alloy 13, 14, and 15 1 32 3 CU32A-PS Clear chromated Head cover Aluminum alloy 1 4 Chromated Piston Aluminum alloy 1 5 Piston rod Stainless steel 1 6 Phosphate coated Snap ring Carbon tool steel 1 7 Nickel plated Rod end nut Carbon steel 1 8 Cushion needle

0.55

. 600 (6) 105.5 (Lead wire length) (Indicator light) (10) + 44.5 (45) (55) 31.5 35 21.5 17.5 7 2 x 4.2 20.5 20.3 (16) 2 x 5.5 (For mounting) Grommet (G) (H) (For mounting) (26) 1/8, 1/4 DC without light/surge voltage suppressor (18.4) (18.4) [1(P) port] 1/8 (Distance between ports) [5(EA), 3(EB) port] 1.3 1P 3EB 8 15.8 5EA G: Approx. 300 H: Approx. 600 2.2 36 12.5 106.7 (PE port) 30.5 (Lead

Air Slide Table Series MXS

7 q !1 !0 !6 !2 !3 !