Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

(same side) 100 + 55 100 + 55 110 + 55 120 + 55 20 + 55 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 2, 4, 6, 8 15 100 110 120 1 pc. 100 1 or 2 pcs. (different sides/same side) 15 120 120 130 140 D-F5W, D-J59W D-F5BA D-F5F D-F5NT (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 130 + 55 "n" pcs.

LX

to cross section C-C. 27.5 T-slo B Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5SB-50B LXSH5SB-75B LXSH5SB-100B LXSH5SB-125B LXSH5SB-150B Refer to page 301 for mounting.

Table of Contents

8 Rc 1 8 Rc 1 8 M4 M5 M6 M8 M5 M6 M8 M5 M6 M8 M4 M5 M6 M8 Rc 1 8 Model ZPT02 to ZPT08 (3.5) except 2, 4 2.5 (3) except 2, 4 3.5 () except 2, 4 (3.5) 2.5 (3) 3.5 () ( )( )( ) 10 (7) 10 (6.5) 12 (6) (13) 10 (6.5) 12 (6) (12) 12 (6) (13) ZPT10 10 (6.5) 12 (6) (13) ZPT13 11 (7) 15 (7) 15 (13) ZPT16 ZPT20 (8.5) 15 (8) 16 (17) (16) (8.5) 15 (8) 26 (17) (16) (8.5) 15 (8) 26 (17) (

Modular Design with Uniform Body Style

V1 V2 AC20-V-D 1/8, 1/4 1/8 1/8 169.6 87.6 48.5 41.6 60 21 2 30 43.2 24 33 5.5 11.5 3.5 29 38 AC30-V-D 1/4, 3/8 1/8 1/4 224.6 115.4 55 30 55.1 80 26.5 3.5 41 57.2 35 7 14 6 42.5 42.5 AC40-V-D 1/4, 3/8, 1/2 1/8 3/8 295.6 147.1 69.7 38.4 72.6 110 35.5 50 75.2 40 55 9 18 7 50 65 AC40-06-V-D 3/4 1/8 1/2 315.6 149.1 71.7 38.4 77.6 110 35.5 50 80.2 40 55 9 18 7 50 65 AC50-V-D 3/4, 1 1/8 1/

Electric Actuator/Slider Type

8 q @1 u A A i o @0 !6 @0 !1 !5 A-A t y @3 C B e !0 @2 C B r w D-D C-C B-B !2 !4 !7 D Body Table D !3 Component Parts No. Description Material Note 15 Cover plate Aluminum alloy Coating No.

2 Phase Stepper Motor/Without Motor Brake Series LXS

B Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5SB-50B LXSH5SB-75B LXSH5SB-100B LXSH5SB-125B LXSH5SB-150B Refer to page 301 for mounting.

Air Cylinder

12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 15 90 100 110 120 1 2 (Different surfaces and same surface) 1 25 110 120 130 140 D-F5NT 25 + 55 (n 2) (n 4) 120 + 55 (n 4) 130 + 55 (n 4) 140 + 55 (n 4) 110 + 55 2 2 2 2 2 n (Same surface) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) Different surfaces 15 D-B5

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 28.5 32 Z ZZ G (NN 1) x H 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 depth 3.5 +0.030 0 5 B A NN x M5 x 0.8 thread depth 10 4H9 depth 3.5 +0.030 0 HA GA Section AA Section BB (mm) HA 40 40 40 25 36 72 76 Model F 35 35 35 50 35 55 65 N 4 4 4 4 6 6 6 G 15 15 15 17 15 25 35 H 40 40 40 25 36 36 38 NN 2 2 2 3 3 4 5 GA 15 15 15 42 51 61 111 I 10 10

LJ1H

The dimensions inside ( ) are for the model with brake. 130 2-8H10 depth 10 4-M8 x 1.25 thread depth 15 70 20 LJ1 LG1 LC1 LX LC6D/LC6C Switches Work piece mounting reference plane 195 (225) 187 100 135 Rc 1/4 Vacuum suction port Rc 1/4 Vacuum suction port 52 52.5 29 33 Stroke + 129 (table movement range) Stroke + 120 (table movement range) 185 (215) 172 7.5 92 2-T-slot 1 64.5 85 90 64.5 35

Proposals for Energy Saving

B C D E F G H I J A Model Brown PFA703H PFA706H PFA712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 1 1/2, NPT 1 1/2, G 1 1/2 46 M6 x 1 9 ON OFF 75 220 55 114 89 75 Rc 2, NPT 2, G 2 56 M6 x 1 9 50msec PFA7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mA DC 5 20 Analog output [mA] Analog output [V] 1 4 Min. measured flow value Min. measured

CL

CLS CLQ Bore (mm) Z Y ZZ M8 x 1.25 PH P PG PL S PW X 21 N NA LZ MM NN K LH LC LD LS LX LT 55 1/8 1/8 1/8 1/4 M20 x 1.5 196 8 20 38 127 20 22 19.5 3.2 40 167 6.8 24 15 4 25 5 20 MLGP M26 x 1.5 M10 x 1.25 210 8 25 20 41 137 24 27 24 55 3.2 40 177 6.8 30 15 4 28 5.5 25 M26 x 1.5 M10 x 1.25 212 8 25 20 41 139 24 27 24 55 3.2 40 179 6.8 34.5 15 4 28 5.5 32 RLQ M32 x 2 M14 x 1.5 250 10 27 23 41

Air Cylinder Series MB

) 2 (n2) 2 (n2) 2 20 + 55 n = 2,4,6,8... 25 + 55 n = 2,4,6,8... 25 + 55 n = 2,4,6,8... n (same side) D-A59W 1 15 25 25 D-F5 D-J5 D-F5 W D-J59W D-F5BAL D-F59F 2 (different side or same side) 15 25 25 (n2) 2 (n2) 2 (n2) 2 15 + 55 n = 2,4,6,8... 25 + 55 n = 2,4,6,8... 25 + 55 n = 2,4,6,8... n (same side) 1 10 25 25 25 30 2 (different side or same side) 15 (n2) 2 (n2) 2 (n2) 2 D-F5NTL D-F5LF

5 Port Solenoid Valve Series SY3000/5000/7000/9000

147 137 164.5 154.5 182 172 199.5 189.5 217 207 234.5 224.5 5 6 7 8 9 10 11 12 4 94.5 84.5 15 Stations n L1 L2 218 Base Mounted Series SY3000/5000/7000 42P Type C4, N3 C6, N7 SY3000: SS5Y3-42PStations -01, [ ]: AC 1 8 For (Pitch) (Pitch) One-touch fitting (A, B port) 15 P=12.5 7 15 P=12.5 7 Applicable tubing O.D.: 4, 5/32" : 6, 1/4" 1/8 7.4 7.4 (A, B port) B B 22.2 B B 22.2 A A A A SJ SY

MXQ

15 B side parallelism to A side Refer to Table (1).

Air cylinder

(Same side) 10 1 switch 15 2 switches (Different side, Same side) 20 15+55(n2)/2 n=2, 4, 6, 8 Other qty.

Air Cylinder

Different surfaces Same surface Different surfaces Same surface CJ1 D-M9l 5 15 Note 1) 40 Note 1) 20 + 35 (n 2) 2 (n = 2, 4, 6)Note 3) 55 + 35 (n 2) (n = 2, 3, 4, 5) CJP D-M9lW 10 15 Note 1) 40 Note 1) 20 + 35 (n 2) 2 (n = 2, 4, 6)Note 3) 55 + 35 (n 2) (n = 2, 3, 4, 5) CJ2 D-M9lA 10 15 Note 1) 40 Note 1) 25 + 35 (n 2) 2 (n = 2, 4, 6)Note 3) 60 + 35 (n 2) (n = 2, 3, 4, 5) JCM D-A9l 5

CNA

8 1/8 44 10 15 16 32 10 85 15 52 16 12 12 10 8 Up to 500 0.1 0.3 35 32 70 27 108 1/4 1/8 52 12 18 20 40 10 95 17 56.5 20 13 15 12 11 Up to 600 200.1 0.3 35 32 86 27 115 1/4 1/4 64 16 25 20 40 10 102 17 67 20 18 12 15 11 Up to 600 0.1 0.3 40 37 102 32 139 1/4 1/4 78 20 31.5 25 52 14 123 21 83 20 23 18 17 13 Up to 750 Data 0.1 0.3 40 37 116 41 160 1/4 1/4 92 25 35.5 30 52 14 144 21 98 22 25

CNA

8 1/8 44 16 32 10 9 12 60 80 42 100 85 15 52 16 12 12 10 8 Up to 500 35 32 70 27 81 108 1/4 1/8 52 20 40 10 9 12 70 90 50 110 95 17 56.5 20 13 15 12 11 Up to 600 35 32 86 27 101 115 1/4 1/4 64 20 40 10 11.5 15 86 105 59 130 102 17 67 20 18 12 15 11 Up to 600 40 37 102 32 119 139 1/4 1/4 78 25 52 14 13.5 18 102 130 76 160 123 21 83 20 23 18 17 13 Up to 750 40 37 116 41 133 160 1/4 1/4 92 30

MXS Series Air Slide Table

+0.030 0 N 4-M4 X 0.7 thread 6 deep 16 -1 x F 2 2-M5 X 0.8 thread 8 deep 4H9 3.5 deep +0.030 0 8 M 0.5 28.5 32 Z ZZ (NN-1) x H G H 18.5 8.5 8.5 18.5 A B 4.2 8.5 9 9 20 1 5 4H9 3.5 deep +0.030 0 NN-M5 X 0.8 thread 10 deep 4H9 3.5 deep +0.030 0 A B HA GA Cross section AA Cross section BB (mm) Model F 35 35 35 50 35 55 65 GA 15 15 15 42 51 61 111 KA NA 2 2 2 2 2 4 4 Z 70 70 70 82 102 148 202

CG1

8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)1/2 69 (77) 11 11 11 12 13 13 M5 106 (114) 16 16 16 16 18 18 22 22 15 (16) 8 10 12 16 20 20 25 30 14 11 11 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 12 12 12 13 14 14 20 20 Up to 200 201to350 23 30 16.5 20 26 32 38 50 60 M5 Depth 7.5 5.5 M6 X 0.75 19.5 10 (12) 40 69 (77) 111 (119) 15 (16) Up to 300 301to400 25 25 M5 Depth 8 35.5 44 55 69 80