Blocking Disk (for SV3000 Series), Number of Inputs/Outputs: -, Connector: -, Mounting Method: -, Port pipe connection port diameter: -, Rated Voltage: -, Specification: -, Thread standard: -, Dimension: -, Applicable valve: -, Pressure reduction port: -, Option: -

Type: Block and Plate for Connection, Type: Blanking Plate Assembly (SV3000), Number of Inputs/Outputs: -, Connector: -, Mounting Method: -, Port pipe connection port diameter: -, Rated Voltage: -, Specification: -, Thread standard: -, Dimension: -, Applicable valve: -, Pressure reduction port: -, Option: -

Spacer Assembly (SV3000), Number of Inputs/Outputs: -, Connector: -, Mounting Method: -, Port pipe connection port diameter: 1/4, Rated Voltage: -, Specification: Individual SUP. + Single EXH. Spacer (2-Stages Stacked), Thread standard: Rc, Dimension: -, Applicable valve: -, Pressure reduction port: -, Option: -

Model: 3000 (SV3000)

SY

SX5000-50-1AC4 C6 C8 SX3000-50-1A-C4 C6 1 Manifold block assembly P, R ports SY3000 8 One-touch fitting P, R ports SY5000 10 One-touch fitting 2 SUP/EXH block assembly SX5000-51-1A SX3000-51-1A 3 End block assembly R For D side SX5000-52-1A SX3000-52-1A 4 End block assembly L SX3000-53-1A SX5000-53-1A For U side 5 Connector box VZ3000-106-1A 24VDC only 6 Rail stopper Made by Kasuga Electronic

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

assembly DXT031-38-1A Applicable individual EXH spacer assembly DXT155-17-1A Stations VV5F3 05 40 2 02 R port 02 2 stations P port 20 20 stations A, B port 3-4-25 26 Series VF3000 B Mount (Integrated type) Applicable solenoid valve Bottom ported/Individual EXH type Type 50 VV5F3 05 50 4 02 VF350Applicable blanking plate assembly DXT031-38-1A EXH (R) port (Valve body) Stations 02 2 stations

Table of Contents

denotes the bottom ported type. 3-6-12 13 Explosion Proof Solenoid Valve Series 50-VFE/50-VPE Specifications: 50-VFE3000/5000 Explosion proof solenoid valve 5 port/50-VFE3000, 5000 3 port/50-VPE500, 700 VK 50-VFE3000 50-VFE5000 Series VZ Fluid Air Quality of explosion proof spec.

2

, 400, 415 VAC (50 Hz) 380 to 420 VAC (60 Hz) 420, 440, 480 VAC (50 Hz) 420 to 520 VAC (60 Hz) 220 VAC (50 Hz) 220 to 240 VAC (60 Hz) 380, 400, 415 VAC (50 Hz) 380 to 400, 400 to 415, 415 to 440 VAC (60 Hz) 440, 460 VAC (50 Hz) 440 to 460, 460 to 500 VAC (60 Hz) Outlet voltage Symbol 500 1 500 VA 100 VAC (50 Hz) 100, 110 VAC (60 Hz) 1000 2 1 kVA Singlephase 2000 2 kVA 3 4 9 200 VAC (50 Hz

Compact 5-Port Solenoid Valve

JSY1000 JSY11M-15P-1A JSY3000 SY30M-15-1A JSY5000 SY50M-15-1A Number of cores (Lead wire) Lead wire length [m] * The part number is for 1 piece.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11

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Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(Valve) SYJ5000-21-1A 1 pc. (Blank plate ass'y) PSS5YJ5-43-03-C4 1 pc. (Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc.

VFS

/60 Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option Body Option Pilot type 0 1 Standard Direct manual override R Internal pilot External pilot Nil Option How to Order Pilot Valve Assembly Option SF4 F 1 22 Coil rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC

Vacuum System Peripherals:

block assembly (for RS): SX3000-51-5A 2 pcs 1 location EXH block disk: SX3000-77-1A SUP/EXH block assembly (Standard): SX3000-51-1A The following columns shall be filled in by SMC.

VFR

100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option 3-5-94 95 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Series VFR6000 Cylinder Speed Chart Use as a guide for selection.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Note Description No. 02 C8 C10 SY760-1 Valve Includes 3pcs. of bushing assembly (SY7000-70-1A) U side Ports P, R: With 12 One-touch fitting Includes 3pcs. of bushing assembly (SY7000-70-1A) SY7000-75-1A 2 Supply/Exhaust block assembly Common for U & D sides (bushing assembly: SY7000-70-1A not included) SY7000-56-1A 3 End block assembly SY7000-70-1A 4 Bushing assembly Refer to page 7.

SZ3000

Supply/exhaust block assembly (6): SZ3000-50-1A-C6 External pilot block assembly (6): SZ3000-54-1A-C6 External pilot block assembly (4): SZ3000-54-1A-C4 [Note] SUP blocking disk: SZ3000-114-4A EXH blocking disk: SZ3000-114-4A (2pcs.

LEC-OM07605CN

1A.1 (1) LECSS2T (2) (2) [Pr.

High Vacuum Angle Valve

w Standard XL XL Special Standard XLQ Special Standard Common XM XY Special XLD50-2-9-1A AS568-016V AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A Standard S valve seal assembly r XLD(V) DXLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A XLD160-2-9-1A AS568-020 AS568-009 XLD100-2-9-1A Special Note 1) In cases where the seal material is other than the standard (FKM

Aluminum High Vacuum Angle Valve

AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.),