VQ7-6/7-8

L3 dimensions inside ( ) are for MP . 3-10-19 20 Series VQ7-6 Manifold Option Parts Interface regulator ARB250-00Residual pressure release valve spacer AZ503-82 P A B A B Interface regulator 254 P A B ARB250-00127 SMC SMC 193.5 (165.5) 205.5 (177.5) 195.5 (167.5) 183.5 (155.5) Manual override E R Residual pressure release valve spacer (AZ503-82 ) A B 65 (37) 105 (77) 14 PA 12 PB B 1 95 (67

VQ7-6/7-8

AXT502 1A Replacement Parts (For manifold block) Cylinder port location Description Material Qty. Part no.

3 Port Solenoid Valve Series SYJ300/500/700

(Example) SS3YJ3-20-03 . 1 set (manifold base) SYJ312-5LZ-M3 . 2 sets (valve) SYJ300-10-1A . 1 set (blanking plate assembly) SS3YJ3-42R-03-C4 . 1 set (manifold base) SYJ314R-5G . 2 sets (valve) SYJ300-10-2A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

Modular Design with Uniform Body Style

Copper, fluorine and silicone-free + Low particle generation 67-1 A AF-D Series Specific Product Precautions Be sure to read this before handling the products. Refer to the back cover for safety instructions.

0.4

Note) Electric current should be 1A or less (including the mounted valves).

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Q , R ;S ZPR40 64 67 64 67 65 68 64 67 J . 4 4 20.6 15.6 1 0.4 ZPRSO 66 69 67 70 66 69 1 "6 6 21.6 I 16.6 12.8 17 Series ZPR/Without Buffer Connection One-Touch Tube Fitting Pad Type Flat, Flat with rib, Deep Vacuum Entry Horizontal Type Mounting Male Thread Flat type Flat type Q Width across lIats (!)! (M6 :S, M8 :t2) Width BCIOSS lIa ts . ,(M6:s..

5 Port Solenoid Valve Series VQZ1000/2000/3000

SI unit 67 [74] M-type plug connector (M) The dashed lines indicate the DIN rail mounting [-D].

VFS

2, Metal joint q, w, Gasket e, t, O-ring t, y 03 04 VVF4000-1A-1Plug-in type Manifold block assembly !0 03 04 Non plug-in type VVF4000-1A-2VVF4000-2A-1 VVF4000-2A-2 Plug-in type End plate (U side) assembly !1 Non plug-in type VVF4000-3A-1 Plug-in type End plate (D side) assembly !

smcmaintenancepartslist

121538-1A-S1 [IS400-1 (Float switch only)] 121538-1A-S2 [IS400-2 (Float switch only)] 1000 cm3 tank Metal bowl with level gauge Note) Bowl O-ring (or seal) is included for the AL20 to AL60.

2/3 Port Valve

P P Model Orifice size (mm) Model Connecting port size Rc(PT) VXA3114 , 1 8 1 4 , 1 8 1 4 , 1 8 1 4 , 1 4 3 8 , 1 4 3 8 , 1 4 3 8 1.5 2.2 VXA3124 VXA3134 VXA3224 VXA3234 3 2.2 3 MaterialO Body Seal Brass, Stainless steel NBR, FPM, EPR 4 VXA3244 4.1-67 VXA31/32 Common (C.O.)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

SOL.A () (+) 1A Station 1 SOL.B () (+) 1B Step 1. Removing the terminal block cover Loosen mounting screws (4 pcs.) on the terminal block cover and remove the cover. SOL.A () (+) 2A Station 2 SOL.B () (+) 2B SOL.A () (+) 3A Station 3 Step 2. Wiring Loosen screws on the terminal block, connect wiring and complete it by tightening screws.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

SOL.A () (+) 1A Station 1 SOL.B () (+) 1B Step 1. Removing the terminal block cover Loosen mounting screws (4 pcs.) on the terminal block cover and remove the cover. SOL.A () (+) 2A Station 2 SOL.B () (+) 2B SOL.A () (+) 3A Station 3 Step 2. Wiring Loosen screws on the terminal block, connect wiring and complete it by tightening screws.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Alarm No.: 1A Name: Servo motor combination error Alarm content The combination of driver and servo motor is incorrect. Display Detail name Cause Check method Check result Action Target 1A.1 Servo motor combination error (1) The driver and the servo Check the model name of the servo motor and corresponding driver. The combination is incorrect. Use them in the correct combination.

ZR

Output Specifications 25 (L) 1 output NPN open collector 30 V, 80 mA or less Analog output (1 to 5 V) ZSE4 ZSE4B 26 (L) 67 (L) 1 output PNP open collector 80 mA or less 26 (L) Analog output (1 to 5 V) ZSE4E 27 (L) 2 outputs NPN open collector 30 V, 80 mA or less 67 (L) 2 outputs PNP open collector 80 mA or less 13-3-16 16 Series ZR Large Size Vacuum Module: Ejector System ZX ZR ZM ZH ZU Courtesy

3 Port Air Operated Valve Series SYJA300 1

VP300-27-1A VP500-27-1A VP700-27-1A Series VPA342 VPA542 VPA742 Bracket (With screw) Only VPA344, VPA544 and VPA744 Specifications Fluid Type of actuation Air N.C. or N.O. (Can be switched.) Note) Standard Vacuum Operating pressure range (MPa) 0.2 to 0.8 N.C.

PA300/500/700

VP300-27-1A VP500-27-1A VP700-27-1A Series VPA342 VPA542 VPA742 Bracket (With screw) Only VPA344, VPA544 and VPA744 Specifications Fluid Type of actuation Air N.C. or N.O. (Can be switched.) Note) Standard Vacuum Operating pressure range (MPa) 0.2 to 0.8 N.C.

3 Port Solenoid Valve

/set Tension bolt (With hexagon nut) r Note) If a bracket is intended to be mounted, select q Connector block assembly, w SUP/EXH end block assembly 1A or 3A, and e End block assembly 1A with mounting nut (Metric size: M3). Connector Block Assembly Part No.

Valve Single Unit

Stations3 2 1 (For single solenoid) Connector assembly Common specifications SX3000-23-1A P Positive common N Negative common SS5X3-20P-061 set (Type 20P , 6-station manifold no.) SY3000-26-10A1 set (Blanking plate assembly part no.) SX3120-5MOZ-C6 3 sets (Single solenoid part no.) SX3220-5MOZ-C6 2 sets (Double solenoid part no.) SX3000-23-1A 3 sets (Connector assembly no.)

0.55

Unless otherwise indicated, dimensions are the same as Grommet (G). 35 Series VF1000/3000/5000 Pilot Operated 5 Port Solenoid Valve Body Ported/Manifold Dimensions: Series VF3000 (mm) Type 30/VV5F3-30-;;1-;: When the individual EXH spacer (VF3000-75-1A) is mounted.

Table of Contents

Series SV2000 for Circular Connector. Series SV3000 for Circular Connector. Series SV4000 for Circular Connector. D-sub Connector. Series SV D-sub Connector. How to Order . Manifold Electrical Wiring. Dimensions . Series SV1000 for D-sub Connector. Series SV2000 for D-sub Connector. Series SV1000 for D-sub Connector. Series SV2000 for D-sub Connector. Series SV3000 for D-sub Connector.