Table of Contents

-12-16-16 ZH20DL-12-16-16 12 12 16 16 15.8 35.5 50 17 10 15.8 35.5 50 10 17.2 38.5 54.3 12 17.2 38.5 54.3 12 12 12 16 16 17 21.7 21.7 One-touch and screw-in connection Applicable tubing diameter N Applicable tubing diameter E S type: White color L type: Black color (Mounting hole) B C D E F G H Model A ZH18DS-12-03-12 ZH18DL-12-03-12 ZH20DS-12-04-16 ZH20DL-12-04-16 12 12 12 12 110 52.45 42

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 41 and 42 Type Manifold Specifications for 41 and 42 Type SS5Y5-41 SS5Y5-42 SS5Y7-42 Port size Flow characteristics Model 52-SY740 52-SY540 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model Applicable valve 4,2 (A,B) (P ,EA,EB) b Cv c[dm3/(sbar)] c[dm3/(sbar)] Single base / B mounting Manifold style b Cv SS5Y5-41 1 (SUP) / 3/5 (EXH) Common SUP / Common EXH 1/4

VQ7-6/7-8

18 (20) 44 (58) 44 (58) Indicator light 5-Rc3/8, 1/2, 3/4 (P, A, B, R1, R2) Rc1/8 Port Y (PE) SMC 108.5 (121.5) 23 (30) (ports A, B) 12 Y 50 (63) 3 5 38 (53) 38 (53) 32 (42) 1 23 (30) 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc3/8, 1/2, 3/4 Port P Rc1/8 Port X (PE) 2-Rc3/8, 1/2, 3/4 Ports A, B 30 (42) 30 (42) 10 (11) Dimensions inside ( ) are for Rc3/4 2 position/Single : VQ7-8-FG-DSC Single (reverse

Table of Contents

-S 0 0.043 0.004 0.012 34.5 30 20 1.5 17 10 0.5 11.5 11 M5 x 0.8 4.5 M4 x 0.7 26 4 36 44 59 25 42 6 14 CDRBU2W30-S 0 0.043 0.005 0.014 47.5 31 22 2 17.5 12 1 12 13 M5 x 0.8 5.5 M5 x 0.8 29 4.5 42 52 69 25 50 8 16 11-3-12 47 Series CRBU2 Rotary Actuator: Free Mount Type Vane Style Double vane type Illustrations below show the intermediate rotation position when A or B port is pressurized.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

-S 0.004 0.012 0 0.043 34.5 30 20 1.5 17 10 0.5 11.5 11 M5 x 0.8 4.5 M4 x 0.7 26 4 36 44 59 25 42 6 14 CDRBU2W30-S 0.005 0.014 0 0.043 47.5 31 22 2 17.5 12 1 12 13 M5 x 0.8 5.5 M5 x 0.8 29 4.5 42 52 69 25 50 8 16 11-3-12 47 Series CRBU2 Rotary Actuator: Free Mount Type Vane Style Double vane type Illustrations below show the intermediate rotation position when A or B port is pressurized.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

-S 0 0.043 0.004 0.012 34.5 30 20 1.5 17 10 0.5 11.5 11 M5 x 0.8 4.5 M4 x 0.7 26 4 36 44 59 25 42 6 14 CDRBU2W30-S 0 0.043 0.005 0.014 47.5 31 22 2 17.5 12 1 12 13 M5 x 0.8 5.5 M5 x 0.8 29 4.5 42 52 69 25 50 8 16 11-3-12 47 Series CRBU2 Rotary Actuator: Free Mount Type Vane Style Double vane type Illustrations below show the intermediate rotation position when A or B port is pressurized.

CRB2/CRBU2/CRB1

42 6 14 CRBU2WU30-S 0 0.043 0.005 0.014 4.5 69 52 42 4.5 29 M5 x 0.8 5.5 M5 x 0.8 13 12 1 12 17.5 2 22 29 47.5 50 8 16 Double vane type CRBU2WU10-D CRBU2WU15, 20, 30-D Illustrations below show size 20 actuators.

0.4

x M12 VQ7 DIN rail clamp screw R R 0 76.5 BUS 3 3 X 1 X 1 60 49.5 B B B B B B B B 12 12 2 P P PWR 30 3 25 1 10 (12) 1 A A A A A A A A 13.5 25 M3 (7.5) C10: 10 One-touch fitting C10 [1(P) SUP port] 45 P = 16 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting C10 [1(P) SUP port] (C12 in case of branch type) C10: 10 One-touch fitting (C12: 12

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ7000 valves, Supply and exhaust ports common, Valves individually wired, Maximum 20 stations available as standard (types 21, 40, 41, 42); maximum 15 stations available as standard (type 20), 11 port sizes available, MANIFOLD, BASE MT, VALVE, SS5YJ7 MANIFOLD SYJ7000 5/PORT, DJ, SS5YJ7 BODY PORT

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ7000 valves, Supply and exhaust ports common, Valves individually wired, Maximum 20 stations available as standard (types 21, 40, 41, 42); maximum 15 stations available as standard (type 20), 11 port sizes available, MANIFOLD, BASE MT, VALVE, SS5YJ7 MANIFOLD SYJ7000 5/PORT, DJ, SS5YJ7 BODY PORT

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ7000 valves, Supply and exhaust ports common, Valves individually wired, Maximum 20 stations available as standard (types 21, 40, 41, 42); maximum 15 stations available as standard (type 20), 11 port sizes available, MFLD ASSY, 2-STA, VALVE, SS5YJ7 MANIFOLD SYJ7000 5/PORT, DJ, SS5YJ7 BODY PORT

base mounted or body ported styles.Bar stock type manifold for SYJ7000 valves, Supply and exhaust ports common, Valves individually wired, Maximum 20 stations available as standard (types 21, 40, 41, 42); maximum 15 stations available as standard (type 20), 11 port sizes available, MFLD ASSY, 2-STA, VALVE, SS5YJ7 MANIFOLD SYJ7000 5/PORT, DJ, SS5YJ7 BODY PORT 1/8 PT, 0.46284 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ7000 valves, Supply and exhaust ports common, Valves individually wired, Maximum 20 stations available as standard (types 21, 40, 41, 42); maximum 15 stations available as standard (type 20), 11 port sizes available, MFLD ASSY, 2-STA, VALVE, SS5YJ7 MANIFOLD SYJ7000 5/PORT, DJ, SS5YJ7 BODY PORT

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ7000 valves, Supply and exhaust ports common, Valves individually wired, Maximum 20 stations available as standard (types 21, 40, 41, 42); maximum 15 stations available as standard (type 20), 11 port sizes available, MFLD ASSY, 3-STA, VALVE, SS5YJ7 MANIFOLD SYJ7000 5/PORT, DJ, SS5YJ7 BODY PORT

base mounted or body ported styles.Bar stock type manifold for SYJ7000 valves, Supply and exhaust ports common, Valves individually wired, Maximum 20 stations available as standard (types 21, 40, 41, 42); maximum 15 stations available as standard (type 20), 11 port sizes available, MFLD ASSY, 3-STA, VALVE, SS5YJ7 MANIFOLD SYJ7000 5/PORT, DJ, SS5YJ7 BODY PORT 1/8 PT, .37478 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ7000 valves, Supply and exhaust ports common, Valves individually wired, Maximum 20 stations available as standard (types 21, 40, 41, 42); maximum 15 stations available as standard (type 20), 11 port sizes available, MFLD ASSY, 4-STA, VALVE, SS5YJ7 MANIFOLD SYJ7000 5/PORT, DJ, SS5YJ7 BODY PORT

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ7000 valves, Supply and exhaust ports common, Valves individually wired, Maximum 20 stations available as standard (types 21, 40, 41, 42); maximum 15 stations available as standard (type 20), 11 port sizes available, MFLD ASSY, 6-STA, VALVE, SS5YJ7 MANIFOLD SYJ7000 5/PORT, DJ, SS5YJ7 BODY PORT

base mounted or body ported styles.Bar stock type manifold for SYJ7000 valves, Supply and exhaust ports common, Valves individually wired, Maximum 20 stations available as standard (types 21, 40, 41, 42); maximum 15 stations available as standard (type 20), 11 port sizes available, MFLD ASSY, 6-STA, VALVE, SS5YJ7 MANIFOLD SYJ7000 5/PORT, DJ, SS5YJ7 BODY PORT 1/8 PT, 1.09863 lb

base mounted or body ported styles.Bar stock type manifold for SYJ7000 valves, Supply and exhaust ports common, Valves individually wired, Maximum 20 stations available as standard (types 21, 40, 41, 42); maximum 15 stations available as standard (type 20), 11 port sizes available, MFLD ASSY, 8-STA, VALVE, SS5YJ7 MANIFOLD SYJ7000 5/PORT, DJ, SS5YJ7 BODY PORT 1/8 PT, 0.49277 lb

base mounted or body ported styles.Bar stock type manifold for SYJ7000 valves, Supply and exhaust ports common, Valves individually wired, Maximum 20 stations available as standard (types 21, 40, 41, 42); maximum 15 stations available as standard (type 20), 11 port sizes available, MFLD ASSY, 8-STA, VALVE, SS5YJ7 MANIFOLD SYJ7000 5/PORT, DJ, SS5YJ7 BODY PORT 1/8 PT, 0.49277 lb