Intrinsically Safe Valve

4 5 02 03 L (Lead wire length) 170.6 Insulator: Red (+) Insulator: Black () 0.3 mm2 4.1 41.7 91.8 Terminal type (TT) 53-SY7 40(R)-TT3 4 5 02 03 Max. 10 L (Lead wire length) 204.2 Lead wire marking No. 1 (+), No. 2 () 0.75 mm2 5.9 39 108.6 28 Series 53-SY5000/7000/9000 Dimensions: 53-SY9000 2-position single L-type plug connector (L) 53-SY9140-L29 30 17.5 03 04 109.3 16.8 86.5 51.2 2 x 5.4

Stainless Steel 316 Fittings

KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 8 14 8 14 10 16 18 24 36 34 41 67 33 40 66 33 40 66 30 38 63 51 67 19.4 23.8 19.4 23.8 20.9

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-03 VXE2320-03 VXE2230-03 VXE2330-03 VXE2240-03 VXE2340-03 VXE2250-03 VXE2350-03 VXE2260-03 VXE2360-03 VXE2260-04 VXE2360-04 Non-leak/ Medium vacuum 106 Pam3/sec or less Note) 1/8 (6A) Air 300 NBR, FKM 1 cm3/min or less Note) Value for V and M options (Non-leak/Medium vacuum) 470 620 300 470 620 470 620 560 700 560 700 470 620 470 620 470 620 560 700 560 700 560 700 3 0.45 0.33 3.0 4.5 2.3

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

5 Port Solenoid Valve Series VQZ1000/2000/3000

T0604 x 1 m AS3001F-06 AN110-01 T0604 x 1 m AS3001F-06 VQZ1151-01 VQZ1121-C6 T0806 x 1 m AS3001F-08 VQZ2151-02 VQZ2121-C6 AN200-02 T1075 x 1 m AS4001F-10 AN300-03 T0604 x 1 m AS3001F-06 T1209 x 1 m AS4001F-12 VQZ3121-C6 VQZ3151-03 909 Series VQZ Model Selection Sonic conductance C [dm3/(sbar)] Type of actuation Voltage Electrical entry Light/surge voltage suppressor Manual override VQZ1000

Compact and Lightweight

H2 L3 L2 L1 All Ports: Screw-in Model H1 H2 H3 L1 L2 L3 L4 Connection thread 1 Connection thread 2 Connection thread 3 ZH05DA-01-01-01 12 12 12 67 42.5 27 26 Rc1/8 Rc1/8 Rc1/8 ZH07DA-01-01-01 70.2 ZH10DA-01-01-01 76.4 ZH13DA-01-02-02 17 17 90.8 51 29.5 36.3 Rc1/4 Rc1/4 ZH15DA-02-03-03 17 19 19 108.2 63.3 34.3 37.1 Rc1/4 Rc3/8 Rc3/8 ZH18DA-03-03-03 19 131.1 73.6 41.1 39.1 Rc3/8 ZH20DA-03-04

AS-FG/ASD-FG

R(PT) 1/8 20, 25, 32 AS221FG-01 AS231FG-02 R(PT) 1/4 20, 25, 32, 40 AS221FG-02 AS331FG-02 R(PT) 1/4 40, 50, 63 AS321FG-02 AS331FG-03 R(PT) 3/8 40, 50, 63 AS321FG-03 AS431FG-04 R(PT) 1/2 63, 80, 100 AS421FG-04 AS131FG-U10/32 10-32UNF 6, 10, 16, 20 AS121FG-U10/32 AS231FG-N01 NPT1/8 20, 25, 32 AS221FG-N01 Elbow type AS231FG-N02 NPT1/4 20, 25, 32, 40 AS221FG-N02 AS331FG-N02 NPT1/4 40, 50,

KJ

-01 KDM20S-03 KDM20S-07 KDM20P-01 20 KDM20P-03 KDM20P-07 KDM20S-09 KDM20P-09 Clamp bolt Panel mounting Loosen (4) screws for bracket on the socket side using a Phillips screwdriver (JIS nominal No. 2) until the bracket touches the stop ring.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

KPGU04-M5 KPGU04-01 KPGU04-02 KPGU06-M5 KPGU06-01 KPGU06-02 KPGU08-01 KPGU08-02 KPGU10-02 KPGU10-03 KPGU12-03 KPGU12-04 41.7 44.2 48.2 44.9 47.4 51.4 55.5 60.6 63.8 61.3 67 71.4 38 38 42 41.5 41.5 45.5 49.5 54.5 58 55 60.5 63.5 10 11 20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection

SYJ300/500/700

Type 40/Type 41 How to Order SS3YJ7 40 05 01 Applicable solenoid valve SYJ714SYJ714MSYJ724SYJ724MApplicable blanking plate assembly SYJ700-10-2A R port 1/4 R port 1/8 P, R port thread type Manifold type Stations 40 41 Type 40 Type 41 Nil Rc G NPT NPTF 2 stations : 20 stations 02 : 20 A A F N T A A 01 1/8 A port size P port 1/8 P port 1/4 A port 1/8 A port 1/8 Note) If there are more than

A

3/8 41.6 30 14 12 RCD-03 36 16 22 42 5/16-24UNF 32 0~0.002 18 -0.5 ~ -03 3/8 30 14 12 RCS-03 16 22 42 5/16-24UNF 32 0~0.002 18 -0.5 ~ -03 3/8 41.6 30 14 12 RCD-04 36 16 22 42 3/8-24UNF 40 0~0.002 18 -0.5 ~ -03 3/8 30 14 12 RCS-04 11 22 42 3/8-24UNF 40 0~0.003 22 -0.5 ~ -03 1/2 50.6 40 20 16 RCD-05 44 20 28 56 1/2-20UNF 50, 63 0~0.003 22 -0.5 ~ -03 1/2 40 20 16 RCS-05 18 28 56 1/2-20UNF 50

VQZ1000/2000/3000

AN110-01 AN200-02 AN200-02 AN110-01 For a silencer to be mounted in a single valve unit, refer to page 2-7-5.

ZP

01 01 47 69 13 58 80 21.5 75.5 97.5 35.5 01 01 01 01 01 01 50.5 72.5 16.5 63.5 85.5 27.5 84 106 44 01 01 01 54 Series ZP How to Order With buffer ZPT A18 B01 40 H N J 25 Pad diameter Mounting thread size Pad type ( ) Symbol Pad diameter 40 50 63 80 100 125 Symbol Thread size M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) Vacuum inlet direction Vertical 40 50 63 80 100 125 Symbol Type Heavy-duty

ZP

01 01 47 69 13 58 80 21.5 75.5 97.5 35.5 01 01 01 01 01 01 50.5 72.5 16.5 63.5 85.5 27.5 84 106 44 01 01 01 54 Series ZP How to Order With buffer ZPT A18 B01 40 H N J 25 Pad diameter Mounting thread size Pad type ( ) Symbol Pad diameter 40 50 63 80 100 125 Symbol Thread size M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) Vacuum inlet direction Vertical 40 50 63 80 100 125 Symbol Type Heavy-duty

ZP

01 01 47 69 13 58 80 21.5 75.5 97.5 35.5 01 01 01 01 01 01 50.5 72.5 16.5 63.5 85.5 27.5 84 106 44 01 01 01 54 Series ZP How to Order With buffer ZPT A18 B01 40 H N J 25 Pad diameter Mounting thread size Pad type ( ) Symbol Pad diameter 40 50 63 80 100 125 Symbol Thread size M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) Vacuum inlet direction Vertical 40 50 63 80 100 125 Symbol Type Heavy-duty

Vacuum Pad

01 01 47 69 13 58 80 21.5 75.5 97.5 35.5 01 01 01 01 01 01 50.5 72.5 16.5 63.5 85.5 27.5 84 106 44 01 01 01 54 Series ZP How to Order With buffer ZPT A18 B01 40 H N J 25 Pad diameter Mounting thread size Pad type ( ) Symbol Pad diameter 40 50 63 80 100 125 Symbol Thread size M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) Vacuum inlet direction Vertical 40 50 63 80 100 125 Symbol Type Heavy-duty

Vacuum Pad

01 01 47 69 13 58 80 21.5 75.5 97.5 35.5 01 01 01 01 01 01 50.5 72.5 16.5 63.5 85.5 27.5 84 106 44 01 01 01 54 Series ZP How to Order With buffer ZPT A18 B01 40 H N J 25 Pad diameter Mounting thread size Pad type ( ) Symbol Pad diameter 40 50 63 80 100 125 Symbol Thread size M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) Vacuum inlet direction Vertical 40 50 63 80 100 125 Symbol Type Heavy-duty

Vacuum Pad

01 01 47 69 13 58 80 21.5 75.5 97.5 35.5 01 01 01 01 01 01 50.5 72.5 16.5 63.5 85.5 27.5 84 106 44 01 01 01 54 Series ZP How to Order With buffer ZPT A18 B01 40 H N J 25 Pad diameter Mounting thread size Pad type ( ) Symbol Pad diameter 40 50 63 80 100 125 Symbol Thread size M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) Vacuum inlet direction Vertical 40 50 63 80 100 125 Symbol Type Heavy-duty

Vacuum Pad

01 01 47 69 13 58 80 21.5 75.5 97.5 35.5 01 01 01 01 01 01 50.5 72.5 16.5 63.5 85.5 27.5 84 106 44 01 01 01 54 Series ZP How to Order With buffer ZPT A18 B01 40 H N J 25 Pad diameter Mounting thread size Pad type ( ) Symbol Pad diameter 40 50 63 80 100 125 Symbol Thread size M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) Vacuum inlet direction Vertical 40 50 63 80 100 125 Symbol Type Heavy-duty

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

ASG22F-M5-04 ASG22F-M5-06 ASG32F-01-04S ASG32F-01-06S ASG32F-01-08S ASG42F-02-06S ASG42F-02-08S ASG42F-02-10S ASG52F-03-08S ASG52F-03-10S ASG52F-03-12S ASG62F-04-12S 4 10.6 23 28.8 11.6 25.2 18.2 M5 x 0.8 8 15.8 37.2 33.7 33.7 30.2 6 13 23.6 30.6 14 34.4 18.8 4 10.6 24.8 32 14.3 39.4 18.2 1/8 12 18.6 44 39 40 35 6 13 25.4 32.6 14.3 42.4 18.8 8 15 27.5 35.5 16 52.4 20.9 6 13 27.3 36.2 17.9