3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300 Refer to p.2.10-37 for DIN rail model number C Connector Stations Port size{2(A)Port} 2 stations 02 VQZ200 VQZ300 Port size Symbol 20 stations 20 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 10 Rc(PT)1/8 Rc(PT)1/4 Mixture port C4 C6 C8 C10 01 02 CM(1) Note 1) Specify port mixture/with port plug by means of manifold specification sheet.
Note) Part number for sub-base For 2 port: VCC12-S02 02F [Rc1/4] [G1/4] 02 02F [Rc1/4] [G1/4] Note 2) For 3 port: VCC13-SVCC12(D)-02(F) VCC13-02(F) Manifold 06 VV CC1 M 06 C4 Standard Type (Passage number) Pilot port fitting size 4 One-touch fitting (Antistatic) 6 One-touch fitting (Antistatic) C4 C6 2 3 M 2 port valve, Cleaning valve 3 port valve 2/3 port valves mixed mounting 2 port valve
Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP (For VQZ100) This is used when changing piping location.
25.6 24.5 23.4 22.5 21.6 20.8 20.1 19.4 18.8 18.2 Invalid 2250 1125 750 562 450 375 321 281 250 225 204 187 173 160 150 140 132 125 118 112 107 102 97 93 90 86 83 80 77 75 72 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55 56 57 58 59 5A 5B 5C 5D 5E 5F 00 01 02 03 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F 30 31 32 33 34 35 36 37 38 39 3A 3B 3C 3D 3E 3F 0 1 2 3 4 5
Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,
U U side (2 to 10 stations) D D side (2 to 10 stations) B Both sides (2 to 20 stations) 16 16 stations 02 2 stations Specified layout Note 2) (Available up to 32 solenoids) 20 20 stations A, B port size (Metric) A, B port size (Inch) Symbol A, B port P, E port Applicable series C3 3.2 One-touch fitting 8 One-touch fitting SV1000 C4 4 One-touch fitting C6 6 One-touch fitting C4 4 One-touch
Symbol Stations Note 02 2 stations P, E port entry Double wiring Note 1) U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) 16 02 16 stations 2 stations Note 2) Specified layout: Indicate the wiring specifications on the manifold specification sheet.
Note) Part number for sub-base For 2 port: VCC12-S02 02F [Rc1/4] [G1/4] 02 02F [Rc1/4] [G1/4] Note 2) For 3 port: VCC13-SVCC12(D)-02(F) VCC13-02(F) Manifold 06 VV CC1 M 06 C4 Standard Type (Passage number) Pilot port fitting size 4 One-touch fitting (Antistatic) 6 One-touch fitting (Antistatic) C4 C6 2 3 M 2 port valve, Cleaning valve 3 port valve 2/3 port valves mixed mounting 2 port valve
59 Standard supply pressureNote 1) 0.5 61 57 53 50 43 41 79 76 4 0.1 17 15 12 23 0.2 28 25 21 39 0.3 42 33 37 29 31 25 54 44 47 40 50 38 42 40 68 61 Standard supply pressureNote 1) 0.5 65 60 57 53 48 46 81 80 6 0.1 19 18 15 24 0.2 31 29 26 39 0.3 46 35 43 33 38 30 55 47 53 44 58 51 52 48 69 64 Standard supply pressureNote 1) 0.5 72 65 66 62 59 56 83 81 Note 1) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa
8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01
(This product will continue operation.) (12) [ ] lamp Lights up when AL.01 Tank level drop failure or AL.02 Tank level dropalarm is generated.
V110-D5CU-C4 3 sets (Double solenoid part no.) V110-D5CZJ-C4 1 set (Double solenoid, with switch part no.) V110-D5MZ-C4 1 set (Double solenoid, individual wiring/ lead wire length 300 mm part no.) 1 2 The asterisk denotes the symbol for assembly. Prefix to the part no. of the solenoid valve, etc. The valve arrangement is numbered as the 1st station from D side.
:ti Statlons 02-2 stations System type. AEjectors B External Vacuum 'For plug (X) posirioning onty.
High vacuum pressure type 26 (660) r-:--l:i:_: , i 55 3la 95 L,. , . 1 s : : High suction flow type 1 6 (400) High tlowBody poded Type -ta 3la 43 ZHl8DL 1 . 8 3la "/e 55 rl 95 Specif ications Ejector Symbol __-IR + I Max.
-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions
C4 TM MR Configurator2 2. 7.7 5 19 5 5.3 (No.PC) * * ** 5.3.1 No.
Valve station 02 2 stations Valve option 20 20 stations (Max.)
, C6 VQ VKF VQZ (Pitch) VZ (A port) Manual override (Non-locking) VS 300 4-Rc 1/8 (Lead wire length) (P , R port) VFN (Lead wire length) 2-4.5 (Pitch) (Mounting hole) Manual override (Non-locking) 300 (Pitch) n-Rc 1/8 (Pitch) n-One-touch fitting C4: Applicable tubing T0425 C6: Applicable tubing T0604 (A port) (A port) Refer to the above drawing for DIN terminal dimensions.
[Option] Note) CE-compliant: For DIN terminal only VV3K3-S42-05-01 VV3K3-20-04 Common SUP/Common EXH Type 20: Body ported (A port top ported) How to Order Applicable solenoid valve VK332--M5(-Q) VK332--01(-Q) Applicable blanking plate assembly VK300-42-1A Bracket VK300-43-1A VV3K3 05 20 A port: Rc 1/8, M5 x 0.8 Valve stations Option P, R port thread type 01 1 station Nil None Nil F With
ZB-OM00201-B (10) One-touch tube fitting (10 in one set) Body type Port size 02 2 One-touch tube fitting Straight Metric size Elbow 04 4 One-touch tube fitting 01 1/8 One-touch tube fitting Inch size 03 5/32 One-touch tube fitting * For the combination of the elbow type body and the One-touch tube fitting 4, add the suffix -N to the part number.