0.55

AS4002F-12 Speed controller AS3002F-06 AS4002F-10 AN40-04 Silencer Base Mounted [when using SGP (Steel Piping)] Base mounted Series CS1 Tubing x Length SGP10A x 1 m VF3140-03 Speed controller AS420-03 Silencer AN30-03 Tubing x Length SGP15A x 1 m VF5144-04 Speed controller AS420-04 Silencer AN40-04 Front matter 2 Pilot Operated 5 Port Solenoid Valve Series VF1000/3000/5000 Single Unit Note

Industrial Filters

Applicable model 84 84 03 FGD-CV002-04 06 03 FGD-CV003-04 06 03 FGD-CV004-04 06 03 FGD-CV001-04 06 32 32 FGDT/F FGDT/F FGDC/E FGDC/E Note 1) Same as standard product except for cover assembly Note 2) 03, 04, and 06 indicate the relevant port sizes (Rc3/8, 1/2, 3/4).

AC Servo Motor Driver (Pulse input type/Positioning type ）

Approx. 21 69.3 42 12 Approx. 38.5 LECWith MR-BAT6V1SET 6 Mass: 1.4 [kg] Mounting screw Terminal Screw size: M5 Tightening torque: 3.24 [N m] CNP1 L1 L2 Approx. 6 Approx. 6 L3 Approx. 60 NP3 P4 CNP2 P+ Approx. 168 156 0.5 C D L11 L21 CNP3 3-M5 screw U V W PE Screw size: M4 Tightening torque: 1.2 [N m] Approx. 6 Approx. 12 42 0.3 Mounting hole process drawing 9 4 9.

CG5-S

8 -04 R 1/2 -04 R 1/2 Straight Union KGH KGLU12-02 R 1/4 12 -03 R 3/8 -04 R 1/2 Applicable tubing O.D.

CG5-S

8 -04 R 1/2 -04 R 1/2 Straight Union KGH KGLU12-02 R 1/4 12 -03 R 3/8 -04 R 1/2 Applicable tubing O.D.

3 Port Air Operated Valve

VFA VFRA Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF VPA4 SYJA VZA Port size Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 VTA 02 03 04 VPA300 VPA500 VPA700 2 stations VGA 20 20 stations VPA VPA VPA3 VV3PA 3 3 42 04 02 Type 42/Individual exhaust Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF Port size Stations 02 Symbol Port

Smooth Cylinder/Low Speed Cylinder

Auto Switch Mounting Height (mm) D-A7H D-A80H D-F7/D-J79 D-F7W D-J79W D-F79F D-F7NT Auto switch model D-P3DW D-A9V D-M9V D-M9WV D-M9AV D-A7 D-A80 D-A73C D-A80C D-F7V D-F7WV D-J79C D-A79W D-P4DW U 34.5 38 44 47.5 57.5 67.5 U 31.5 35 41 47.5 57.5 67.5 U 44 50 56.5 66.5 76.5 U 27 30.5 36.5 40 50 60 U 29 32.5 38.5 42 52 62 U 32.5 36 42 48.5 58.5 68.5 U 38.5 42 48 54.5 64.5 74.5 U 35 38.5 44.5

HRX-OM-Q026

When the ambient Continuous monitoring temperature is out of the range between the temperatures set for AS.04 and AS.06, AL.03 or AL.04 may be generated at the same time when the product is turned ON.

Fluoropolymer Piping Equipment

16.5 1.8 LQ1H4G-Ml 1/2" 1/4" 42 24 21 48 28 6 6 LQ1H5A-Ml 3/4" 1/2" 55 29 26 62.5 39 10 10 1/2" 44 10 23 LQ1H42-Ml 10 7.4 LQ1H43-Ml 12 9.4 LQ1H44-Ml 10 7.4 LQ1H45-Ml 8 39.5 20 17 47.5 23 5.5 LQ1H46-Ml 6 3.6 LQ1H4F-Ml 3 34 15 14 42 16.5 1.8 LQ1H49-Ml 12 1/4" 42 24 21 48 28 6 6 LQ1H51-Ml 19 1/2" 55 29 26 62.5 39 10 10 44 LQ1H5B-Ml 1/2" 9 LQ1H5C-Ml 3/4" 23 15 LQ1H5D-Ml 1/2" 9 LQ1H5E-Ml 3/8"

Modular F.R.L. Unit

) Y610(03) 04 (03) 04 Y610Note 5) Note 6) VHS201 02 02 03 02 03 VHS3000VHS3000VHS402 03 04 E600Note 6) E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 Note 6) E60006 10 E60006 10 06 10 E100-M5 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01 02 03 Note 6) Pressure switch with piping adapter 02 03 04 IS1000E-40 Note 6) Y24-01 02 Y34-01 02 Y34-01 02 Y44-02 03 Y54-03 04

CA2

For more information, refer to page 6-8-16. 6-8-41 42 Series CBA2 Specifications Maintains the cylinders original position even if the air supply is interrupted.

LVQ

42 84 48 96 75 136.8 32 60 88 10 7 20 50.8 38.5 45 LVQ60 available only as V. 521 Series LVQ Dimensions With flow rate adjustment, High back pressure spec. with flow rate adjustment N.C. valve Dimensions (mm) (Max.

Table of Contents

ON OFF Time 16-3-42 11 Series PSE Specific Product Precautions 1 Be sure to read before handling. Pressure Sensor Handling Handling Warning Make sure that the air tubing is firmly inserted to avoid possible disconnection. (Tensile strength is approx. 25 N when being inserted 8 mm.)

AS

Model Meter-out type Rod and applicable tubing O.D. 4 6 ) ) 8 ) 10 ) Meter-in type AS1000P-04-04 AS2000P-04-04 AS2000P-06-06 AS2500P-06-06 AS3000P-08-08 AS3000P-10-10 AS1010P-04-04 AS2010P-04-04 AS2010P-06-06 AS2510P-06-06 AS3010P-08-08 AS3010P-10-10 ) ) The lock nut provides identification.

Air Cylinder Series CA2

MB MB1 CA2 CS1 Auto switch model Bore size (mm) 40 50 63 80 100 CS2 D-A9/A9V D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL BA7-040 BA7-040 BA7-063 BA7-080 BA7-080 D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F59F/F5NTL BT-04 BT-04 BT-06 BT-08 BT-08 D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 The figure shows how to mount D-A9(

ZP

M10 x 1.5 B 42 ZF (mm) B 42 50 ZPT50H-A14 52 Model A 40 ZPT40H-A14 ZP 50 ZPT50H-B8 52 M8 x 1.25 50 ZPT50H-B10 52 M10 x 1.5 ZCU AMJ 63 80 ZPT H-B (Female thread) 63 80 ZPT 6380H-A16 (Male thread) Misc.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

42 D-H7NF D-H7C Bore size (mm) CP95 Hs 24.5 27 30.5 35 40.5 47.5 A 27.5 27.5 28.5 33 40.5 40.5 Hs 24.5 27 30.5 35 40.5 47.5 B 27.5 27.5 28.5 31.5 39.5 39.5 B 27.5 27.5 28.5 31.5 39.5 39.5 B 26 26 27 30 38 38 A 29 29 30 34.5 42 42 Hs 27.5 30 33.5 38 43.5 50.5 20 25 32 40 50 63 NCM NCA DOperating Range -X Bore size (mm) Auto switch model 20 D-C7/C80/C73C/C80C D-B5/B64 50 63 25 32 40 208 10

Speed Controller with One-touch Fitting

-04 1/2 Note 3) Note 1) Without sealant type can be selected as a standard option.

CG1

42 48 56 64 74 16 20 22 30 36 46 28 28 28 30 36 46 47.6 53 67.7 78.7 98.6 119.2 Consists of pins, flat washer and hexagon socket head cap bolt.

5

23 26 228 251 100 22+0.084 0 300.1 0.3 42 23 26 228 251 188 Smooth Cylinder MBY Series Standard/With Mounting Bracket * Refer to Basic (B) for other dimensions.