Air Slide Table

Through hole L Model Bolt Max. tightening torque [Nm] L [mm] MXQ6 M3 x 0.5 1.1 5.3 MXQ8 M3 x 0.5 1.1 8.3 MXQ12 M4 x 0.7 2.7 11.5 MXQ16 M5 x 0.8 5.4 14.4 MXQ20 M5 x 0.8 5.4 19.3 MXQ25 M6 x 1 9.2 23.5 MXQ6A M3 x 0.5 1.1 8.3 MXQ8A M3 x 0.5 1.1 8.3 MXQ12A M4 x 0.7 2.7 8.5 MXQ16A M5 x 0.8 5.4 12.4 MXQ20A M5 x 0.8 5.4 16.3 MXQ25A M6 x 1 9.2 20.5 MXQ6B M3 x 0.5 1.1 5.3 MXQ8B M4 x 0.7 2.7 4.5 MXQ12B

CQ2

Bolt M3 X 40 l 2 pcs.

Table of Contents

x 0.35 x 19 M3 x 0.35 x 23 M3 x 0.35 x 24 M3 x 0.35 x 28 M3 x 0.35 x 68 M3 x 0.35 x 72 M3 x 0.35 x 73 M3 x 0.35 x 77 y u Components Ejector unit + Vacuum switch/Filter unit i o For nozzle size 10, 13, 15 M3 x 0.35 x 84 4 [For ZSE4 spec.]

Fluoropolymer Piping Equipment

6 6 LQ1R51-M 19 1/2" 30.5 29 10 10 LQ1R5B-M1/2" 9 LQ1R5C-M3/4" 3/4" 30 39 16 15 LQ1R5D-M1/2" 9 LQ1R5G-M3/4" 1/4" 27.5 33.5 6 6 LQ1R5H-M3/4" 3/8" 29 35 10 10 LQ1R6A-M 1" 3/4" 36 38 6 24 9 18 21 43 28 10 7 29 14 28 26 54 39 10 10 LQ1R52-M 12 9.4 LQ1R53-M 19 3/4" 30 39 16 15 LQ1R54-M 12 9.4 LQ1R58-M 19 1/4" 27.5 33.5 6 6 LQ1R59-M 19 3/8" 29 35 10 10 LQ1R61-M 25 3/4" 36 38 16 16 LQ1R6B-M3/4"

ZP

ZP2A-TF1 ZP40H ZP50H ZP40HB ZP50HB ZP2A-XF1 ZP40H ZP50H ZP40HB ZP50HB M14 x 1 M14 x 1 Width across flat 19 (Hexagon) Width across flat 19 (Hexagon) Rc1/8 Width across flat 19 (Hexagon) Width across flat 19 (Hexagon) 5 5 21 5 5 21 59.5 3 x M3 x 0.5 47.5 3 x M3 x 0.5 32 21.5 21.5 7 7 30 30 7.3 14.5 14.5 7.3 30 18 2 2 M5 x 0.8 18 30 With three M3 bolts With three M3 bolts Applicable pad part

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Example) Bolt M3 x 35l 2 pcs.

MY1

= 38.7 (Nm) M3 = m3 x g x X = 6.525 x 9.8 x 138.5 x 103 = 8.86 (Nm) MTS m3 M3 Load factor 3 = M3/M3max = 8.86/38.7 = 0.23 MY 5.

Air Fittings & Tubing

18.0 14 8 1 4 3 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 18.5 17 41.5 29.5 21 10 19 14 12 58.3 46.1 22 19 18 15 19 24 81 (81) 113 (96) 24 25.7 24 16 25 2.1-13 Reference dimensions after R(PT) thread installation.

SX

A: Orange B: Green No. 1 terminal Power supply terminal (M3 thread) (The voltage indication marking is for 24 VDC.)

Free Mount Cylinder

22 13 16 16 19 23 27 13 15 20 26 32 40 10 11 14 16 20 24 22 24 32 40 50 62 17 18 25 30 38 48 3 4 6 8 10 12 5 6 8 10 7 7 7 9 10 11 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 15 16.5 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 3.2 3.2 4.5 5.5 5.5 6.6 4 9 9 13.5 2 4.5 4.5 4.5 16.5 Note) 19 21.5 23 Without auto switch

MY1

max. m1 max. m3 max. 2.

SY

SY3000 SY3000-23-4 (M2 x 21) M3 x 26 (Flat nickel plated) M4 x 31 (Flat nickel plated) SY3000-11-24 SY5000 SY5000-11-10 SY7000 SY7000-11-9 Note 2) For SY9000, the SUP port is only available on the end plate side. SY9000-18-2 (M3 x 42) SY9000 SY9000-11-1 Plug (white) Insert into unused cylinder ports and SUP/EXH ports. The minimum order quantity is 10 pieces. Order in multiples of 10.

ISO Cylinder

Description Size Quantity BBA2 1 Auto switch mounting screw M3 x 0.5 x 6 L 1 BMU1-025 M3 x 0.5 x 8 L 1 BQ-1 M3 x 0.5 x 10 L 1 BQ-2 2 Auto switch mounting nut (Hexagon nut) M3 x 0.5 1 BQ-1 3 Auto switch mounting nut (Convex shape) M3 x 0.5 1 BQ-2 D-A7, A8 D-F7, J7 * A spacer for BQ-2 (black resin) is not included. * When using D-A9l(V)/M9l(V)/M9lW(V)/M9lA(V) auto switches with BQ2-012, use

Electric Actuators

LC6D-507AD-Q (Refer to page 306 for details.) 0.05mm Holding plate: MB1 (1 pc.), Phillips countersunk head screw: M3 x 6l (1 pc.) Phillips binding head screw: M3 x 4l (2 pcs.), Toothed lock washer M3 (2 pcs.) Binding band: T18S (1 pc.)

SYJ300/500/700

VZ VS VFN 4-4-11 12 Series SYJ300 Manifold for Internal Pilot Type Type 20 Applicable solenoid valve SYJ312--M3 SYJ312M--M3 SYJ322--M3 SYJ322M--M3 How to Order A port M3 x 0.5 SS3YJ3 20 05 Stations Bracket Applicable blanking plate assembly SYJ300-10-1A 02 2 stations Nil Without bracket P R R port : : F With bracket M5 x 0.8 20 20 stations P port Note) For more than 10 stations, supply air

ZP

Dimensions: With Adapter ZP2-TF H 40 50 Width across flat 19 (Hexagon) M14 x 1 Rc1/8 Width across flat 19 (Hexagon) 5 5 21 47.5 (59) 14.5 21.5 30 3 18.8 30 11.5 3 x M3 x 10 2 18 A B Dimensions B 42 52 ZP2-TF40H ZP2-TF50H A 40 50 Model ZP2-TF H 63 80 ZP2-TF H 100 125 Width across flat 22 (Hexagon) M16 x 1.5 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) Rc1/8

Table of Contents

1/2, 3/4 LVC6 22 19, 25 3/4, 1 Model Orifice diameter Metric Tubing O.D.

Table of Contents

Note Power supply/Output connection cable Description ZS-28-A D Mounting screw (M3 x 8L) (Accessory) Bracket ZS-28-B With M3 x 5L (2 pcs.) Sensor connector ZS-28-C 1 pc. Panel mount adapter Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) ZS-27-D With M3 x 8L (2 pcs.)

MXQ

19 19 19 27 47 47 47 47 57 36 66 84 75 84 75 75 Note) Use the average speed when calculating static moment.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

: 0.6 Nm M3: 0.6 Nm Note) Mounting direction is not flexible.