Table of Contents

x 0.35 x 19 M3 x 0.35 x 23 M3 x 0.35 x 24 M3 x 0.35 x 28 M3 x 0.35 x 68 M3 x 0.35 x 72 M3 x 0.35 x 73 M3 x 0.35 x 77 y u Components Ejector unit + Vacuum switch/Filter unit i o For nozzle size 10, 13, 15 M3 x 0.35 x 84 4 [For ZSE4 spec.]

Air Fittings & Tubing

76.5 77 78 8 6 KM14-06-08-01S-3 31 39 6 KM14-06-08-02S-3 15.2 12.8 KM14-06-08-03S-3 1 4 3 8 1 2 10 6 KM14-06-10-02S-3 43 44 66 7.5 KM14-06-10-03S-3 18.5 12.8 KM14-06-10-04S-3 87.5 88.5 92 81.5 82 84 19 22 21 19 12.8 45.4 17 12.8 21 1 4 3 8 1 2 94 95 98.5 88 89 90.5 10 8 KM14-08-10-02S-3 47 19 70 7.5 KM14-08-10-03S-3 18.5 15.2 KM14-08-10-04S-3 22 22.5 19 15.2 52.6 18.5 12.8 21 KM15 Precautions

ZP

10 15 T A3 A5 B3 B5 M3 x 0.5 (Male thread) M5 x 0.8 (Male thread) M3 x 0.5 (Female thread) M5 x 0.8 (Female thread) Pad O.D.

5-Port Solenoid Valve

Tightening torque for mounting screw (M3): 0.8 Nm Tightening torque for mounting screw (M3): 0.8 Nm SY30M-86(N) Name plate is the number of stations (1 to 24). Mounting screw (M3) Name plate bracket Name plate bracket Mounting screw (M3) SY30M-85-1A Name plate bracket assembly (Supplied individually) SY50M-85-1A (For SY5000 only) Align this line along the end of the 2-position valve.

Vacuum Unit

PE EXH Common Port open to atmosphere *1 PS 4 5/32" PD *2 M3 M3 : Not applicable 1 Air is also exhausted from the pilot valve when the valve type is R. Piping for PE port is available as an option (M3). (Refer to pages 15 and 16.) MExhaust Noise 2 A model with PD port is available as an option. (Refer to pages 9, 10, and 15.)

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Model Tightening torque Thread size 10-SY3000 M2 0.8Nm 0.16Nm 10-SY5000 10-SY7000 10-SY9000 M3 M4 M3 1.4Nm 0.8Nm 491

ZP3

M3 x 0.5 8.5 Model Vacuum inlet direction q Pad dia.

V100

SY11 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0 0.22 100 kPA to 0.6 Large flow 0 to 0.7 N.C. SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 0.14 100 kPA to 0 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 100 kPA to 0 0.22 Large flow 0 to 0.7 N.O.

Table of Contents

AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4. Use caution to the direction of the external slider and the piston slider. Since the external slider and piston slider are directional for size 10, refer to the figures below when performing disassembly or maintenance.

5 Port Solenoid Valve

4.1 2 x M5 x 0.8 3(R2) port 7.3 36.2 Station 1 2 3 4 5 6 7 8 n D side U side Grommet 300 (Lead wire length) 48 36.2 72.8 (Double solenoid dual 3-port) 50.3 (Single solenoid) Plug Lead Manifold Bar Base 16.5 11 2n x V4, V3, V2, M3 (4(A), 2(B) port) V4: 4 x 2.5 V3: 3.2 x 2.0 V2: 2 x 1.2 M3: M3 thread 3.5 14.4 Indicator light With plug connector / light Plug Lead Single Unit Formula L1 = 7.5n

SX

A: Orange B: Green No. 1 terminal Power supply terminal (M3 thread) (The voltage indication marking is for 24 VDC.)

Vacuum Pad

10 15 T A3 A5 B3 B5 M3 x 0.5 (Male thread) M5 x 0.8 (Male thread) M3 x 0.5 (Female thread) M5 x 0.8 (Female thread) Pad O.D.

Vacuum Pad

10 15 T A3 A5 B3 B5 M3 x 0.5 (Male thread) M5 x 0.8 (Male thread) M3 x 0.5 (Female thread) M5 x 0.8 (Female thread) Pad O.D.

Vacuum Pad

10 15 T A3 A5 B3 B5 M3 x 0.5 (Male thread) M5 x 0.8 (Male thread) M3 x 0.5 (Female thread) M5 x 0.8 (Female thread) Pad O.D.

Vacuum Pad

10 15 T A3 A5 B3 B5 M3 x 0.5 (Male thread) M5 x 0.8 (Male thread) M3 x 0.5 (Female thread) M5 x 0.8 (Female thread) Pad O.D.

F

7 7.8 17 22.5 24 14.5 0.8 5 3.2 M3x0.5 KJH23-M3 7 18 15.5 14.5 0.9 1.6 3.2 M5x0.8 KJW23-M5 7 7.8 17 25 26 14.5 2.6/2.2 6.3 3.2 M5x0.8 KJH23-M5 7 18.5 15.5 14.5 3/2.5 2.1 3.2 R(PT)1/8 KJW23-01S 10 7.8 17 25 25 14.5 2.6/2.2 10.4 3.2 R(PT)1/8 KJH23-01S 10 16.5 12.5 14.5 3/2.5 5 4 M3x0.5 KJW04-M3 7 8.9 17.5 23 25 14.5 0.8 5 4 M3x0.5 KJH04-M3 8 18 15.5 14.5 0.9 1.9 4 M5x0.8 KJW04-M5 7 8.9 17.5

Compact Hydraulic Cylinder

(Tightening torque of M3 screw: 0.5 to 0.7 Nm) 8.

Magnetically Coupled Rodless Cylinder

: Yawing M1: Pitching y x M2: Rolling Static moment Ceiling mounting Horizontal mounting Wall mounting M1 M2 M2 M1 M2 M3 y X x Y y z X x Y X x Z m1 x g m2 x g m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m M3 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 m1 x g x Y m2 x g x Y m3 x g x Z y z M2 z Y m3 x g x X m4 x g x Y M3 m4

Table of Contents

VFS VS4 Series VFR2000 VQ7 Pilot valve assembly Tightening Torque for Mounting Bolt EVS Thread M3 (2 pcs.) M3 (3 pcs.) M3 (3 pcs.) M4 (4 pcs.)

Flow Control Equipment

Universal mounting Model Size (nominal X height) Piece Metric Inch TMH-23J TMH-04J TMH-06J TMH-06 TMH-01J TMH-03J TMH-05 TMH-07 TMH-09 TMH-11 TMH-13 M3 X 15 M3 X 20 1 M4 X 25 TMH-08 TMH-10 TMH-12 M4 X 35 The holder can be used to secure an individual part.