Table of Contents

x 0.35 x 19 M3 x 0.35 x 23 M3 x 0.35 x 24 M3 x 0.35 x 28 M3 x 0.35 x 68 M3 x 0.35 x 72 M3 x 0.35 x 73 M3 x 0.35 x 77 y u Components Ejector unit + Vacuum switch/Filter unit i o For nozzle size 10, 13, 15 M3 x 0.35 x 84 4 [For ZSE4 spec.]

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(Nl/min = 2061.2) Series CS1 SGP3/8 x 1m AS420-03 (Nl/min = 4034) AN400-04 (Nl/min = 4907.5) Base mounted type SY7140 -03 (Nl/min = 1177.8) Series MB/CA1 Series CS1 SGP3/8 x 1m AS420-03 (Nl/min = 4034) AN300-03 (Nl/min = 3602.1) SY9140 -04 (Nl/min = 2748.2) Steel tube size x Length Speed controller Silencer Steel tube size x Length Speed controller Silencer Steel tube size x Length Speed

SY

(Cv = 2.1) Series CS1 SGP3/8 x 1m AS420-03 (Cv = 4.11) AN400-04 (Cv = 5) Base mounted type SY7140 -03 (Cv = 1.2) Series MB/CA1 Series CS1 SGP3/8 x 1m AS420-03 (Cv = 4.11) AN300-03 (Cv = 3.67) SY9140 -04 (Cv = 2.8) Steel tube size x Length Speed controller Silencer Steel tube size x Length Speed controller Silencer Steel tube size x Length Speed controller Silencer SGP1/2 x 1m AS420-04 (Cv

Compressed Air Cleaning Filter Series

Air flow rate (m3/min (ANR)) AFF8C AFF75B AFF150A Max. flow line Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Max. flow line Max. flow line Air flow rate (l/min (ANR)) Air flow rate (m3/min (ANR)) Air flow rate (m3/min (ANR)) AFF11C AFF220A Max. flow line Pressure drop (MPa) Pressure drop (MPa) Max. flow line Air flow rate (l/min (ANR)) Air flow rate (m3/min (ANR)) 13 Main

SX

SX7120-02 SV AS200-02 AN110-01 SZ Conditions [When using SGP (Steel pipe)] Base mounted Series MB Series CS1 SGP10A x 1 m AS420-03 AN300-03 SY SX7140-03 Tube x Length Speed controller Silencer SYJ SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1-6-3 4 Courtesy

Table of Contents

VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360-03 VX2260-04 VX2360-04 2 3 4.5 2 0.59 1.2 2.4 0.59 1.2 1.5 0.6 0.2 1.5 0.6 1.5 3.0

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

: 0.6 Nm M3: 0.6 Nm Note) Mounting direction is not flexible.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

AS121F-M3-02 AS121F-M3-01 26.8 24.3 5.2 6 M3 x 0.5 1/8" 7.2 19.7 26.6 24.1 24 21.5 4 8.4 10.5 5.5 11 2.4 5.5 24.3 21.8 11.4 2 7.5 6 8.8 M3 x 0.5 16.1 10 12.7 AS121F-M5-02 AS121F-M3-03 27.3 24.8 M5 x 0.8 7 11.5 3 5/32" 9.3 AS121F-M3-23 AS121F-M5-01 3.2 8.4 10.5 M5 x 0.8 1/8" 17.3 5.5 7.2 16.1 26.6 24.1 24 21.5 4 19.7 12.7 M3 x 0.5 22.1 8.4 AS121F-M3-04 AS121F-U10/32-01 4 9.3 10 1/8" 10-32UNF

Air Fittings & Tubing

-03 15 35 48 22 41.5 29.5 10 21 24 KQ2E10-02 12.5 34.5 53 21 M20 X 1 22 KQ2E10-03 15 36.5 67 24 58.3 46.1 12 22 27 KQ2E12-03 14 37 92 23 M22 X 1 KQ2E12-04 18 41 59 30 96 113 (96) 16 25 32 KQ2E16-03 14 40 127 29 M28 X 1.5 KQ2E16-04 18 44 132 Note1) ( ): Values for soft nylon.

One-touch Fittings

Symbol Size Tubing connection 001 Same dia. tubing M3 M3 x 0.5 M5 M5 x 0.8 M6 M6 x 1.0 01 R1/8, Rc1/8 02 R1/4, Rc1/4 03 R3/8, Rc3/8 E Bulkhead union Bulkhead connector LE Bulkhead male elbow N Adapter Thread connection 1 Only for Bulkhead union and Bulkhead male elbow. Applicable tubing O.D.

smcmaintenancepartslist

Float type Note 5) AD27 Y200 AKM2000-01 (02) IS1000M-20 Y210-01 (02) AD17 Y100 AD48 AD47 AD38 AD37 Y300 AKM3000-(01) 02 IS1000M-30 Y310-(01) 02 auto drain Spacer Y400 AKM4000-(02) 03 IS1000M-40 Y410-(02) 03 02 VHS40-03 04 02 E400-03 04 06 02 IS1000E-4003 04 06 Y44-02 03 Y600 Y500 Check valve Note 6) Note 7) Pressure switch Note 7) IS1000M-60 IS1000M-50 Y510-(02) 03 Y610-03 (04) Y610-(03

Flow Control Equipment

M3 Port size With One-touch fittings M3 X 0.5 M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 Thread U10/32 01 02 03 04 R(PT) Unified thread (10-32UNF) Meter thread (M3, M5) _ N NPT AS Needle Valve/Flow Characteristics ASN AS2301F-01, AS2311F-01 AS2201F-01, AS2211F-01 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AQ Supply pressure: 0.5MPa Supply pressure

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

M3 Port size With One-touch fitting AS M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 Thread type U10/32 01 02 03 04 ASP R Unified thread (10-32 UNF) Metric thread (M3, M5) Nil ASN N NPT AQ ASV Needle Valve/Flow Characteristics AK AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 ASS Inlet pressure: 0.5

Table of Contents

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

AMH150-03 AMH250-03 AMH250-03 AMH350-04 AMH350-04 AMH450-06 AMH450-06 AMH550-06 AMH550-10 AMH650-14 AMH850-20 AMH850-20 IDG10-03 IDG20-03 IDG30-03 IDG50-03 IDG75-04 IDG100-04 AME150-03 AMF150-03 AME150-03 AMF150-03 AME250-03 AMF250-03 AME250-03 AMF250-03 AME350-04 AMF350-04 AME350-04 AMF350-04 AME450-06 AMF450-06 AME450-06 AMF450-06 AME550-10 AMF550-10 AME550-10 AMF550-10 AME650-14 AMF650

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

Speed Controller: Standard Type Series AS In-line Type

Type AS1200-M3 Direct cylinder elbow type 2 Bore size JIS Symbol Direct cylinder flat elbow type 4 Symbol Bore size Applicable series Control type AS1200-M3 AS1400-M3 M3 M3 x 0.5 Meter-out Meter-in 0 1 AS120-M5 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 P.15-11-3 Thread type Cylinder side R Tube side Rc Symbol Metric thread (M3

Series SV

(M3 x 40) VZ1000-11-4SV3000-69A : Manifold stations Manifold Specification Sheets Refer to DIN rail dimension tables on page 85.

Compact Cylinder

Type A mounting bracket YA-03 Joint YU-03 RS T2 V M W Joint Joint/Mounting Bracket (Type A/B)/Part No.

Table of Contents

Note Power supply/Output connection cable Description ZS-28-A D Mounting screw (M3 x 8L) (Accessory) Bracket ZS-28-B With M3 x 5L (2 pcs.) Sensor connector ZS-28-C 1 pc. Panel mount adapter Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) ZS-27-D With M3 x 8L (2 pcs.)