ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Table of Contents

13 11 13 13 25 30 30 32 40 40 36 46 46 12 15 15 7 9 9 6.5 8.5 8.5 57 (65) 66 (74) 71 (79) 19.5 22.5 25 40 43 46 46 50 53 73.5 82 87 The figures in parentheses are the normally open type. 24 25 Series VX Safety Instructions The following safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Table of Contents

-2-2 2 Vacuum Module: Ejector System/Vacuum Pump System Series ZX Modular Components Introduction Vacuum Pump System System Ejector System 13-2-4 to 13-2-39 13-2-40 to 13-2-65 Component equipment Characteristics Ejector unit Series ZX1 Nozzle diameter (mm) 0.5 0.7 1.0 Max. suction flow (/min(ANR)) 5 10 22 ZX Air consumption (/min(ANR)) 13 23 46 ZR 84 kPa Maximum vacuum pressure ZM Built-in

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Bore size (mm) LT LH L1 LG L LD L L1 B 36 46 43.5 53.5 53 63 LS 10 20 13.5 23.5 19 29 A B LS A 63 8 33.5 63 72.2 46 20 63 3.2 46 5 18 11 43.5 80 10 43.5 80 85 53.5 23.5 74.5 4.5 59 7 20 13 53.5 100 12 100 98 63 29 86 6 71 7 22 13 53.5 Flange bracket material: Carbon steel Foot bracket material: Carbon steel Bore size (mm

5

119 12 12 1/8 12.5 12.5 M5 x 0.8 32 79 11 11 121 12 12 1/8 10.5 10.5 1/8 40 87 12 12 139 13 13 1/8 13 10 1/8 Up to 1500 50 102 13 13 162 14 14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104

V100

VK VZ Note) For VQZ100, refer to page 4-14-13.

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

ZP

-11-57 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.

ISO Cylinder

10 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 12 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 16 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 20 KJ8D 12 9 8 24 16 36 16 13 M8 x 1.25 14 25 KJ10D 14 10.5 10 28 19 43 20 15 M10 x 1.25 13 Floating Joint: JA In the case of dimension without C M M U U D F B G B E E H C P A [mm] Bore size Part no.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

250 262.5 275 287.5 300 300 63.3 58.1 48.4 L3 91.5 81 102 112.5 123 133.5 144 154.5 70.5 181.5 192 202.5 213 223.5 234 42.6 34.5 7.5 L4 14 13 12 15 16 17 12 13 14 13 14 15 16 17 11.5 Two SUP/EXH blocks are provided for models with 11 stations or more.

Table of Contents

12-13-18 D-Y7NW/Y7PW/Y7BW D-Y7NWV/Y7PWV/Y7BWV 12-13-19 Direct Grommet D-F9NW/F9PW/F9BW D-F9NWV/F9PWV/F9BWV 12-13-20 D-F59W/F5PW/J59W Tie-rod Grommet D-F79F 12-13-21 Grommet Rail D-F59F Rail D-F7BAL/F7BAVL 12-13-22 Tie-rod D-F5BAL Grommet D-Y7BAL 12-13-24 Direct D-F9BAL 12-13-23 D-F7NTL Rail Grommet Tie-rod D-F5NTL Note) As for the applicable auto switches on Rotary Actuators, refer

Air Cylinder

PD Mounting 20 12 12 13 24.2 6 25 12 10 (12) 13 26.7 6 32 12 10 (12) 13 30.2 6 40 12 10 (12) 16 34.6 8 50 13 13 20 40.6 10 63 13 13 20 47.1 10 HH Applicable Tubing O.D./I.D. Note) ( ): Long stroke Bore size (mm) 20 25 32 40 50 63 Applicable tubing O.D. (mm) 6/4 6/4 6/4 8/6 10/7.5 10/7.5 Applicable tubing material Can be used for either nylon, soft nylon or polyurethane tubing.

Electric Actuators

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

(mm) With rod boot Bore size (mm) Stroke range (mm) l J B BB C F GA GB M NA NB P R S T CD LH LT LX LW X1 Y1 SS Z e f Q 32 M10 x 1.25 58 62 38 16 32 15 11 37 31 3/8 39 141 11 11 40 8 40 30 32 13 203 205 52 21.5 15 25 to 1400 1/3.5 stroke 40 M10 x 1.25 65 69 45 12 32 15 11 36 30 3/8 42 141 11 11 43 8 46 33 32 13 203 205 52 12 15 25 to 1400 50 M10 x 1.25 76 85 52 15 40 19 11 43 35 1/2 46 155

15

30 3.7 11 42 M2.5 x 10 M3 x 8 8 NY 2 x M3 x 0.5 5.5 45 30 5 11 38 M2.5 x 10 M3 x 8 8 NX 2 x M4 x 0.7 7 46 30 3.7 8 42 M2.5 x 10 M3 x 8 8 NM2 3.4 31 28 8.5 7 3.5 42 M2.5 x 10 M3 x 8 6 25 NZ 2 x M5 x 0.8 8.5 70 50 4.6 13 60 M3 x 12 M4 x 12 14 NY 2 x M4 x 0.7 8 70 50 4.6 13 60 M3 x 12 M4 x 12 11 NW 2 x M5 x 0.8 8.5 70 50 4.6 13 60 M4 x 12 M4 x 12 9 NU 2 x M5 x 0.8 8.5 70

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

13 24.2 114 13 13 13 16 20 20 0.25 stroke (22.5) (13) 10(12) 26.7 119 M10 x 1.25 (25) (13) 10(12) 30.2 121 M12 x 1.25 (25) (13) 10(12) 34.6 139 M14 x 1.5 11.5 13 40.6 162 13 47.1 162 The minimum stroke with rod boot is 20 mm.

CJ2

Bore size (mm) 6 10 16 Z T S NB NA NN MM H GB GA FZ FY FX FT FC FB F D C B A 77 3 49 7 16 M6 x 1.0 M3 x 0.5 28 14.5 32 14 24 1.6 4.5 13 8 3 14 12 15 74 46 9.5 12.5 M8 x 1.0 M4 x 0.7 28 5 8 32 14 24 1.6 4.5 13 8 4 14 12 15 75 47 9.5 12.5 M10 x 1.0 M5 x 0.8 28 5 8 42 20 33 2.3 5.5 19 8 5 20 18.3 15 With Air Cushion/Dimensions other than the table below are the same as the table above.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

50 N 4 4 6 6 6 6 G 7 14 8 8 31 H 25 28 31 29 30 NN 2 2 3 3 4 4 GA 13 14 29 39 37 61 HA 19 28 27 31 58 60 I 11 10 12 14 13 12 J 17 28 40 52 78 105 K 23.5 33.5 43.5 53.5 63.5 88.5 KA 82.5 112.5 NA 4 4 4 4 8 8 M 46 56 70 84 109 135 Z 45.5 55.5 69.5 83.5 108.5 134.5 ZZ 71 81 95 109 134 160 13-/22-MXQ8-10 13-/22-MXQ8-20 13-/22-MXQ8-30 13-/22-MXQ8-40 13-/22-MXQ8-50 13-/22-MXQ8-75 Note) Note)

KJ

: Values for soft nylon. 15-2-28 20 One-touch Fittings Series KQ2 Adaptor: KQ2N H (width across flats) Applicable fitting size d Connection thread R M d Weight (g) L A Model Applicable fitting size KQ2N04-M5 KQ2N04-01S KQ2N06-M5 KQ2N06-01S 7 34 32 M5 x 0.8 2 6 2 5 13 29 4 2.5 1 8 14 30 M5 x 0.8 10 33 35 37.5 39 41 46 2.5 13 14 30 31 7 6 1 8 10 4.5 1 4 KQ2N06-02S 14.5 14.5 31.5 33 14 14 14

MXQ

15 14 Average speed Va (mm/s) Collision speed V (mm/s) 13 13 13 13 18 31 31 31 31 36 23 41 42 41 42 41 19 19 19 19 27 47 47 47 47 57 36 66 84 75 84 75 75 Note) Use the average speed when calculating static moment.