Modular F.R.L. Unit

40 18 9 88 35 3 226 9 4.6 74 187 38 110 235 93 96 70 50 3.3 20 11 11 6.4 115 84 44.5 303 264 43 110 282 98 96 70 50 3.3 318 20 11 11 6.4 117.5 84 44.5 279 45 110 292 98 101 70 50 3.3 318 20 11 117.5 44.5 11 6.4 84 280 46 110 297 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

AC

10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%F.S. 0.5%F.S. 16 0.9 25 1.4

Modular F.R.L. Unit

93 96 70 50 20 11 115 44.5 11 6.4 84 3.3 303 264 43 105 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 105 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46 105 297 Note 1) For AC20 only, the position of the pressure gauge is above the piping center.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

C4: One-touch fitting for 4 M5: M5 thread 2(B) 2(B) 27.5 20 15 4(A) 4(A) 5 46 12.5 P = 11 L plug connector (L) Dimensions n: Stations n L 11 138 130 19 226 218 2 39 31 3 50 42 4 61 53 10 127 119 9 116 108 5 72 64 8 105 97 6 83 75 7 94 86 18 215 207 17 204 196 16 193 185 15 182 174 14 171 163 13 160 152 12 149 141 20 237 229 L1 L2 2-8-11 1 For details about certified products conforming to

Table of Contents

x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 58 51 50 PV 6.5 10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle port 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 10-SY3000 SY3000-38-2A(-Q) M5 x 0.8 10-SY3000 SY3000-39-2A(-Q) 11 11 Label for SUP/EXH block disk Label for EXH block disk Label for SUP block disk 10-SY5000 SY5000-38-16A(-Q) 1 8 10-SY5000 SY5000-39-16A(-Q) 1 8 15 15 Note) The EXH port may be either on the lead wire side or on the end plate side. (An assembly is shipped under the condition shown in the figure.)

MU

BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET M5 X 0.8 Depth 11 AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT M5 X 0.8 Depth 7.5 M6 X 1 Depth 12 M6 X 1 Depth 11 M8 X 1.25 Depth 13 M8 X 1.25 Depth 11 M10 X 1.5 Depth 15 M10 X 1.5 Depth 14.5 M12 X 1.75 Depth 15 M12 X 1.75 Depth 18 Rod end female thread (mm) (mm) P M5 X 0.8 Rc(PT) Rc(PT) Rc(PT) Rc(PT) NY 26

•

Bl>llOws type ZPY10g 10 12 12 22 38 49 72 83 3 1,7 Mode~ M4 M5 M6 MB M5 M6 M8 M5 M6 Me /'.14 M5 M6 M8 ZPY13C U 13 1 5 121 ' 22 , ZPY02 1 \,1,11 \ ' 11 11 'E:o:.d' i&M' ZPIlB (lib,.,) II,.r,4,1 ~ 49 72 183 3, 1.8 ZPY16g 16 18 12.5 22.5 38.5 49.5 72.5 83,5 3.5 1.2 Deep type mm ZPY10 y Model F I>A, fe, c D E G c H ZPY13 I 25 25 25 !

MXS Series Air Slide Table

port 2-M5 X 0.8 11 3 J 10 Max.13.5 (With stroke adjuster at retraction end) I 5.5 12 6 Basic type 12 9.5 10 10 5.5 5.5 NA-M5 X 0.8 thread 5.5 deep 21 K KA 21 Stroke adjuster at retraction end 37.5 (With stroke adjuster at extension end) 6 12 3.5 (With stroke adjuster at retraction end) Stroke adjuster at extension end N-M5 X 0.8 thread 6 deep (Helisert) 6 4-M5 X 0.8 thread 7 deep 1 18 (With

Prevents Micro-Bubbles

x 0.8 R N Q Model LVC2 LVC3 LVC4 LVC5 LVC6 30 30 54.5 44 11 79 28.5 13 4 20 37 3.5 23.5 M3 x 0.5 PB 36 47 79 56 16.5 106 43 17.5 7.5 34 46 5.5 39 46 60 96 68 22 131 55 18 8 42 57 5.5 48 Rc 1/8 NPT 1/8 Rc 1/8 NPT 1/8 58 75 129 84 26 154 68 27.5 8 56 71 6.5 62 58 75 138 84 32 165 77 27.5 8 56 71 6.5 71 17-5-11 9 Series LVC Dimensions With flow rate adjustment With by-pass (Max.

CQS

M5 X 40 l M5 X 45 l M5 X 50 l M5 X 55 l M5 X 60 l M5 X 65 l M5 X 70 l M5 X 75 l M5 X 80 l M5 X 85 l 40 45 50 55 60 65 70 75 80 85 M3 X 30 l M3 X 35 l M5 X 40 l M3 X 45 l M5 X 50 l M3 X 55 l 30 35 40 45 50 55 6.5 8.5 Note 1) The appropriate plain washer must be used for through-hole mounting.

ZP

A5 M5 x 0.8 1 A6 M6 x 1 111 A8 M8 x 1 11 Male thread B4 M4 x 0.7 B5 M5 x 0.8 B6 M6 x 1 B8 M8 x 1.25 1 : ZPT/Vertical comes with a vacuum inlet (female thread).

Modular Design with Uniform Body Style

*11 *11 *11 *11 *1 Set the inlet pressure to at least 0.05 MPa higher than the set pressure. *2 Options B, G, H, and M are not assembled and supplied loose at the time of shipment. *3 The assembly consists of a bracket and set nuts (applicable to the AR20(K)-D to AR40(K)-D).

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: S, W, Y d1 = Q1 = M L2 + (3 x P) L1 = L2 = (mm) Size 30 50 63 80 100 Q2 = M Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc1/8 Rc 1/4 2.5 4 5 4 5 6.8 (mm) (mm) d1 Size 30 50 63 80 100 100 Q2 M3, M4 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 6.8 8.5 10.3 8 6.8 8.5 10.3 8 11 2.5 4 to 7 4.5 to 18 6.8 to 11 6.8 to 13

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: S, W, Y d1 = Q1 = M L2 + (3 x P) L1 = L2 = (mm) Size 30 50 63 80 100 Q2 = M Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc1/8 Rc 1/4 2.5 4 5 4 5 6.8 (mm) (mm) d1 Size 30 50 63 80 100 100 Q2 M3, M4 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 6.8 8.5 10.3 8 6.8 8.5 10.3 8 11 2.5 4 to 7 4.5 to 18 6.8 to 11 6.8 to 13

CJ2

B H B H d C C d 10 8 21 M4 X 0.7 16.2 Y-J010B SNJ-006B 16 11 21 M5 X 0.8 16.6 Y-J016B M6 X 1.0 4 8 9.2 6 NTJ-006A 2.4 M3 X 0.5 6.4 5.5 6 SNJ-010B M8 X 1.0 4 11 12.7 10 NTJ-010A 3.2 M4 X 0.7 8.1 7 10 Part No.

KR

(mm) <M5> Note) L P D Nylon Urethane 2-applicable tubing KGU04-01 KGU04-M5 4 11 20 12 11 21 34 M5 x 0.8 10.4 36 38 40 39.5 42 46 42.5 45.5 49 51 52.5 55.5 56.5 2.2 2.2 11 16 1 8 4 10.4 4.2 4.2 1 4 KGU04-02 14 KGU06-M5 KGU06-01 KGU06-02 KGU06-03 KGU08-01 2.2 2.2 39 41.5 43 44.5 48.5 49.5 50 55 55.5 57 58.5 59 60.5 M5 x 0.8 13 1 8 1 4 3 8 1 8 17 12.8 12.8 6 13.4 10.6 14 17 25.6 17.7 15 23 35

Vacuum Pad

x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 M5 x 0.8 M5 x 0.8 M5 x 0.8 22 22 22 4 4 4 11 11 11 6 6 6 0.5 1.8 1.2 1.8 0.8 0.8 1.8 8 6 4 6.5 8.5 4.5 8 8 8 8 8 8 Vacuum Inlet Dimensions ZP3-Y04UM;-B5-U4 ZP3-Y06UM;-B5-U4 ZP3-Y08UM;-B5-U4 ZP3-Y04UM;-B5-U2 ZP3-Y06UM;-B5-U2 ZP3-Y08UM;-B5-U2 Width across flat 7 Barb fitting One-touch fitting 0.9 1.8 Width across flat 7 (10.5) (12.5) M-5AU-2 [Weight: 1.5 g] 2

CLQ

to 50 80 116.5 53.5 11 11 99 116 134 43 20 53.5 77 53.5 116.5 75, 100 53 125 10 to 50 100 135 63 11 11 117 136 154 50 22 53.5 94 L1 Rod end nut 63 135 75, 100 Rear flange type: CLQG/CDLQG FV M Rear flange type (mm) 4-FD Without auto switch With auto switch Bore size (mm) FZ FX A + Stroke L FT B + Stroke G Stroke range FD FT FV FX FZ G L L1 M A A B B 36 91 10 to 50 63 101 46 9 9 80 92 108

Compact Cylinder with Lock Series CLQ

to 50 80 116.5 53.5 11 11 99 116 134 43 20 53.5 77 53.5 116.5 75, 100 53 125 10 to 50 100 135 63 11 11 117 136 154 50 22 53.5 94 L1 Rod end nut 63 135 75, 100 Rear flange type: CLQG/CDLQG FV M Rear flange type (mm) 4-FD Without auto switch With auto switch Bore size (mm) FZ FX A + Stroke L FT B + Stroke G Stroke range FD FT FV FX FZ G L L1 M A A B B 36 91 10 to 50 63 101 46 9 9 80 92 108