Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

CG1

Refer to p.0-44 to 0-46 for Safety Instructions and common precautions.

AC Servo Motor Driver (Pulse input type/Positioning type ）

When the positioning operation is executed in accordance with the point table or program set by setup software (MR Configurator2TM), the diagnosis display changes to "d-06" during single-step feed. For other control mode, the display does not change to "d-06". Refer to section 3.1.9 for details. The status will be displayed with the "MODE" button.

ZP

Male thread Female thread 40 40 6 tube 06 50 50 8 tube 08 M5 x 0.8 A5 Pad type (Refer to Table (1) for applications.)

Table of Contents

03 04 06 q Description No.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

30 36 46 28 28 28 30 36 46 Head side trunnion style: CG1TQ Bracket mounting range 2-TD8 (Pin O.D.)

JIS Standard Hydraulic Cylinder

31 M5 x 0.8 16 F J E +0.084 0 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 dH10 CHK B-series +0.1 0 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 +0.1 0 40 31.5 145 115 45 60 M39 x 1.5 61 M6 x 1.0 30 CHN H 0.1 0.4 D +0.1 0 50 40 185 145 57 79 M48 x 1.5 76 40 M8 x 1.25 +0.07 0 25 16 76 60 25 32 M16 x 1.5 26 16 M5 x 0.8 CHM C +0.084 0 31.5 20 90 70 30 40 M20 x 1.5 31 20 M5 x 0.8 K B +0.1 0

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators (A, B port) 3/8, 1/4 21 13.5 (Light/surge voltage suppressor) (For mounting) 2 x 4.3 43.1 21.5 21 61 Manual override A B PE 38 46 + B A + X EA EB P 21.5 G: Approx. 300 H: Approx. 600 77 121.4 [125.8] 21 (External pilot port) M5 x 0.8 M5 x 0.8 (Lead wire length) (Pilot EXH port) 58.5 [65.5] Air Preparation Equipment

5-Port Solenoid Valve

Applicable Fittings: KQ2H, KQ2S Series Series Model Piping port Port size Fittings Applicable tubing O.D. 2 3.2 4 6 8 10 12 SY3l30-ll-M5 4A, 2B M5 KQ2H KQ2S 1P, 5EA, 3EB 1/8 KQ2H KQ2S X, PE M5 KQ2H KQ2S SY3000 SS5Y3-50/51/52 (R) Manifold base 1/8 KQ2H KQ2S 4A, 2B M5 KQ2H KQ2S Series Model Piping port Port size Fittings Applicable tubing O.D. 2 3.2 4 6 8 10 12 SY5l30-ll-01 4A, 2B 1/8 KQ2H

0.4

SUP/EXH block SSQ1000-PR-3-C8(-S) SUP block plate SSQ1000-B-P Blanking plug KQ2P-23/04/06/08 Dual flow fitting SSQ1000-52AC8 N9 P.44 P.45 P.46 P.42 P R D side U side Silencer (For EXH port) Individual SUP spacer SSQ1000-P-3EXH block plate SSQ1000-B-R Port plug VVQZ100-CP C6 L6 P.42 P.44 P.45 P.46 P R D side U side Individual EXH spacer SSQ1000-R-3Back pressure check valve (-B) SSQ1000-BP

SY

(S = 0.25) AN120-M5 (Cv = 0.27) AS3001F-06 (S = 0.36) AN110-01 (Cv = 1.94) 6 x 1m 6 x 1m 8 x 1m AS3001F-08 (Cv = 0.56) 8 x 1m AS3001F-08 (Cv = 0.56) AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36) AN101-01 (Cv = 1.11) AN110-01 (Cv = 1.94) 10 x 1m AS4001F-10 (Cv = 0.89) 10 x 1m AS3001F-08 (Cv = 0.56) 12 x 1m AS4001F-10 (Cv = 1.17) 6 x 1m 6 x 1m AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36)

SX

-C6 Applicable series Symbol Port size M5 x 0.8 12 12 stations SX3000 SX5000 M5 Note) For SS5X3: 4 to 12 stations. 01 1 8 SS5X3-41P-06-C6 1 set (Type 41P , 6-station manifold base part no.)

Speed Controller with One-touch Fitting

ASD Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS AS-FE 2 F A 1 AS 1 M5 06 0 E Body size 1 KE AS-FG F A 1 AS 2 01 06 2 0 S Body size 2/3/4 AS-FP AS-FM Body size Made to Order Refer to page 562 for details.

Table of Contents

x 0.8, NPTF 1/8, M5 x 0.8 Port size R 1/8, M5 x 0.8 NPTF 1/8, M5 x 0.8 ZX ejector mounted type: M5 x 0.8 Enclosure IP40 Note 1) Instant pressure supply of 0.5 MPa has no influence on the switch.

VQZ1000/2000/3000

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Body ported Series CJ2 Series CM2 Series MB/CA1 Tube x Length T0604 x 1 m VQZ1121-C6 Speed controller AS2051F-06 Silencer AN120-M5 Tube x Length T0604 x 1 m VQZ2121-C6 Speed controller AS3001F-06 Silencer INA-25-46 Tube x Length T1075 x 1 m VQZ3121-C6 Speed controller AS4001F-10 Silencer AN101-01 2-7-2 3 Series VQZ Model

5

(mm) Bore size A B C D F GA GB H MM NA NB NDh8 NN S Z 10 15 12 14 4 8 8 5 28 M4 x 0.7 12.5 9.5 8 0 0.022 M8 x 1.0 46 74 16 15 18.3 20 5 8 8 5 28 M5 x 0.8 12.5 9.5 10 0 0.022 M10 x 1.0 47 75 Single foot (L) CJ2YL Bore size Stroke Head cover port location Z Mounting nut Rod end nut Piping port 2 x M5 x 0.8 GB NN F GA Cover surface MM C D 0 0.3 LY LB B LH 0 0.3 B LX LT Piping port M5 x 0.8

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS 2 0 F A 1 1 M5 06 G Body size 1 AS 2 0 S F A 1 2 01 06 G Body size 2/3/4 Body size Made to Order Refer to page 678 for details. 2 1/8, 1/4 3 3/8 4 1/2 Push-lock type Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Note) Face seal method is used for the G thread type.

smcmaintenancepartslist

) 04 T-interface Note 6) Note 7) Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Note 1) in part numbers for a round

Table of Contents

-03 AMD150-03 1.5 0.2 HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF2D-1 AM150-03 AMD150-03 2.2 0.3 HAA7-06 HAW7-06 AT6C-04 AFF2B-03 IDF3DAM150-03 AMD250-03 3.7 0.5 HAA7-06 HAW7-06 AT6C-04 AFF4B-03 IDF4DAM250-03 AMD250-03 5.5 0.7 HAA7-06 HAW7-06 AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350

SQ1000/2000

(-S) P. 45 P. 46 P. 47 P. 49 C8 L8 Terminal number SOL.