Combination Cylinder

PG 22 27 27 29 PH 19.5 24 24 24 PL 20 24 24 24 PW 38 41 41 41 S 127 137 139 167 Z 37 41 41 45 Bore ZZ 168 182 184 217 P 20 25 32 40 1/8 1/8 1/8 1/8 M8 M20 X 1.5 33.5 M10 X 1.25 M26 X 1.5 37.5 M10 X 1.25 34.5 M26 X 1.5 M32 X 2 42.5 46.5 M14 X 1.5 21.5 3.1-22 Fine Lock Cylinder/Double Acting Single Rod Series CLM2 Single Clevis (C) CLM2C Bore size Stroke CL MLG CNA CNG MNB CNS CLS (mm) Bore

AC Servo Motor Driver

(CN1-19) SP1(CN1-41) LOP(CN1-45) ST2(CN1-18) ST1(CN1-17) EMG(CN1-42) Input Lit: ON Extinguished: OFF Output SA(CN1-22) TLC(CN1-25) ZSP(CN1-23) SA(CN1-24) RD(CN1-49) ALM(CN1-48) OP(CN1-33) (c) Torque control mode SP2(CN1-16) LOP(CN1-45) RS1(CN1-18) RS2(CN1-17) SON(CN1-15) RES(CN1-19) SP1(CN1-41) EMG(CN1-42) Lit: ON Extinguished: OFF Input Output VLC(CN1-25) ZSP(CN1-23) RD(CN1-49) ALM(CN1-48

NCQ2/CQ2

7 80 41 18 64 17 8 50 6.6 20 11 depth 8 Note 1) 50.5 66.5 75,100 10 to 50 17.6 1/2-20UNF NPT 1/4 42 58 0 0.062 63 52 68 35 15 M10 x 1.5 77 47.5 103 7 Rc 1/4 15.5 93 19 18 17 8 60 9 20 14 depth 10.5 Note 1) 52 68 75,100 For details about the rod end nut and accessory brackets, refer to page 178.

Air Fittings & Tubing

Kl 9.8 19.5 20 16.5 21 11 KQ2ZF04-M5 8 21 24 47 32 49 54 M5 X 0.8 8 10.4 16 10.4 4 13.4 1 8 1 8 1 4 1 8 1 4 1 4 3 8 3 8 1 2 15.5 29.5 25.5 KQ2ZF04-01S 14 Ml 15.5 22 17 22 22 29.5 25.5 35 27 35 35 39 39 42 KQ2ZF06-01S 13.4 22 14 6 12.8 17 12.8 41 KQ2ZF06-02S 20.6 25.5 19 31 41 41 17 KQ2ZF08-01S 17.6 25.5 Hl 8 15.2 15.2 18.5 19 19 22 22 24 KQ2ZF08-02S 20.6 27 KQ2ZF10-02S 20.6 29 Dl

Table of Contents

1/2, 3/4 LVC6 22 19, 25 3/4, 1 Model Orifice diameter Metric Tubing O.D.

LEC-OM071xx

VREF MON2 18 ACCR (acceleration): 19 Set the acceleration with an unsigned value.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(External pilot port) M5 x 0.8 (Station 1) (Station n) 1 4 For (Light/surge voltage suppressor) + + + + 73 [80] 57.6 73 [80] 57.6 A A A A 41 9.4 28.9 41 28.9 9.4 B B B B (Pitch) 7 24 P = 19 (A, B port) 1/4 (Pitch) 7 24 P = 19 Applicable tubing O.D.: 10, 3/8" (A, B port) One-touch fitting L plug connector (L) M plug connector (M) DIN terminal (D, Y) M8 connector (WO) Applicable cable O.D.

ISO Standard Hydraulic Cylinder

22 110 19 27 19 34 10 18 9 41 73 3/8 32 50 25 to 800 75 75 52.3 14 69 12 M20 x 1.5 M12 x 1.25 9 105 28 52 28 130 24 26 25 42 16 18 11 41 74 1/2 33 63 25 to 800 90 90 64.3 14 84 12 M27 x 2 M12 x 1.25 13 117 36 65 36 145 30 23 32 50 16 17 13 39 80 1/2 33 80 25 to 800 115 115 82.7 18 96 16 M33 x 2 M16 x 1.5 9 149 45 83 45 180 41 26 41 60 20 20 17 46 93 3/4 40 100 25 to 1000 130 130 96.9 18

Compact Cylinder

brackets, refer to page 19.

5 Port Solenoid Valve

This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM. Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring Connector Top entry Connector entry direction can be changed with a single push.

Air Slide Table

16 35 62 50 670 201 16 16 33 20 43 72 60 1,100 314 21 21 49 25 52 88 70 1,900 491 41 41 82 Double-ported type (MXQA) 6 20 34 32 230 29 10 10 18 8 23 42 40 330 51 10 10 19 12 30 52 50 580 113 16 16 33 16 37 70 60 920 201 21 21 49 20 46 80 70 1,600 314 41 41 82 Low thrust with high rigidity type (MXQB) For applications which require more guide rigidity than thrust Single sideported type (MXQC

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

13.5 16 10.5 17.5 12 21.5 16 20.5 15 14.5 9 40 16 16.5 16.5 17 13.5 14 15 15.5 19 19.5 18 18.5 12 12.5 50 18.5 19.5 19 20 16 17 17.5 18.5 21.5 22.5 20.5 21.5 14.5 15.5 63 21.5 24 22 24.5 19 21.5 20.5 23 24.5 27 23.5 26 17.5 20 80 24.5 30.5 25 31 22 28 23.5 29.5 27.5 33.5 26.5 32.5 20.5 26.5 100 Auto Switch Mounting Height D-A7H/A80H D-F7, D-J79, D-F7W D-J79W, D-F7BAL D-F79F, D-F7NTL D-F7V

5

41 44 41 41.5 41 41 41 41 41 50 41 52 43 49 83.5 93.5 46.5 43 47 43 85.5 91 93.5 91 80 49.5 49 52.5 49 50 49 49.5 49 49.5 49 58 49 58.5 51.5 57.5 92 102 53.5 51 53.5 51 94 107 102 107 100 56.5 56 61 56 58.5 56 56.5 55.5 57.5 55.5 66 56 66 58.5 68 102.5 112.5 61.5 57.5 61 57.5 104 121 112 121 Operating Range (mm) Auto switch model Bore size 40 50 63 80 100 Auto switch model Bore size 40 50

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

17 18 115 35 18 108 60 55 15 15 25 to 1400 63 M12 x 1.5 90 165 63 10 27 19 14 43 35 1/2 52 148 18 50 19 20 132 41 19 106 71 65 15 20 25 to 1500 1/4 stroke 80 M16 x 1.5 110 190 80 11 22 22 16 44 44 3/4 65 166 18 60 24 24 155 45 20 124 74 80 17 20 25 to 1800 The maximum stroke is 1500mm for series CH2G only. 100 M18 x 1.5 135 230 102 11 22 22 18 44 44 3/4 75 172 22 71 27 28 190 53 22 122

ZP

Dimensions: With Adapter Width across flat 19 (Hexagon) Rc1/8 ZP2-TF HB 40 50 M14 x 1 Width across flat 19 (Hexagon) 5 5 21 F (G) 47.5 14.5 21.5 30 Y X 3 x M3 x 10 E B A D 18 2 30 Dimensions B 41 52 ZP2-TF40HB ZP2-TF50HB Model D 28 36 A 40 50 E 43 54 F 20.5 24 G 68 71.5 X 27.8 31.3 Y 13 16.5 ZP2-TF HB 63 80 ZP2-TF HB 100 125 M16 x 1.5 Width across flat 22 (Hexagon) Width across flat 22 (Hexagon

CQ2

15 80 86 Rc(PT)1/4 20 35 7 64 41 50 18 8 6.6 11 Depth 8 0 0.062 63 54 46 14 Depth 10.5 15 47.5 10.5 M10 X 1.5 19 15 93 103 Rc(PT)1/4 20 35 7 77 60 18 8 9 Refer to p.2.3-18 for details of rod end nut and optional brackets.

KQ2

41 19 41 41 19 20 42 69 30 47 74 69 76 147 72 78 149 Applicable tubing 9.6 10 17.5 1 8 42.5 36.6 43 37.1 43.5 39.6 46 47.4 42.6 49 50.4 55.5 56.9 63.6 57.5 58.9 65.6 16 3 10.4 10 18 5 32 16.5 3.5 11.4 10 19.5 3 16 1 4 17 4.6 13.2 10 20.5 5 16 18.5 6 15.2 12 23.5 17.46 3 8 21 7 17.9 17 25.5 Connection thread (with sealant) 22.23 9 17.46 1 2 9.6 22 21.7 17 28 22.23 Reference dimensions after

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

or less 26 or less 2 position single 18 or less 18 or less 22 or less 2 position double 32 or less 32 or less 38 or less 3 position 35 or less 41 or less 2 position single 35 or less 35 or less 41 or less 2 position double 62 or less 62 or less 64 or less 3 position 35 or less 19 or less 1.2-29 Base Mounted Type Models/Series SY3000 Effective area mm (Nl/min) Weight g Note1) Note 2) Valve

ZP

Dimensions: With Adapter Width across flat 19 (Hexagon) Rc1/8 ZP2-TF HB 40 50 M14 x 1 Width across flat 19 (Hexagon) 5 5 21 F (G) 47.5 14.5 21.5 30 Y X 3 x M3 x 10 E B A D 18 2 30 Dimensions B 41 52 ZP2-TF40HB ZP2-TF50HB Model D 28 36 A 40 50 E 43 54 F 20.5 24 G 68 71.5 X 27.8 31.3 Y 13 16.5 ZP2-TF HB 63 80 ZP2-TF HB 100 125 M16 x 1.5 Width across flat 22 (Hexagon) Width across flat 22 (Hexagon

ZX

Adsorption confirmation switch (ZSP1) ZX1-P Filter unit (F) ZX1-F 2-R1.8 3.6 (Mounting hole) (Mounting hole) 41 51 41 51 Adjustment needle 1 1017.8 Bracket A (Standard accessory) 2-R1.8 (Mounting hole) 1 10 3.6 (Mounting hole) 19 13.8 19 8.8 4.8 Ejector + Silencer Ejector + Silencer Filter Adsorption confirmation switch (ZSP1) Filter M5 (or M6) Vacuum pad connection port (Mounting hole) 62