Table of Contents

, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 4.5 4.5 M3 mounting hole M2.5 mounting hole Residual pressure release manual override DIN rail clamp screw 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

) C8 (8 One-touch fitting) M5 x 0.8 Rc(PT) 1/4 Port size C4 (4 One-touch fitting) C8 (8 One-touch fitting) Ports A, B C6 (6 One-touch fitting) C10 (10 One-touch fitting) PA/B 9.2 (0.51) A/BR 10.3 (0.57) PA/B 5.2 (0.29) A/BR 3.8 (0.21) PA/B 8.1 (0.45) A/BR 8.5 (0.47) PA/B 9.2 (0.51) A/BR 9.5 (0.53) PA/B 18 (1.0) A/BP 18 (1.0) PA/B 17.6 (0.98) A/BP 14.4 (0.8) PA/B 18 (1.0) A/BP 17.1 (0.95)

Compact Manifold Regulator Series ARM5

(Full Span) Display accuracy 230 Calibration angle Limit indicator With limit indicator 17.5 L side end block R side end block 6 28 OPEN 56 SMC 56 1.5 SMC 28 20 7 7 20 R E V 18 O 26 26 18 C 22 32.5 32.5 14.5 Port Plug Bushing VVQ0 58A Part no.

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

3 Port Solenoid Valve

Terminal no. 16 16 43 43 Length indication label Length indication label 10 11 19 10 9 2 1 2 1 20 SMC SMC 33.4 33.4 030 015 41 41 25 Approx. 10 Approx. 10 17 8 18 8 7 6 14 26 15 9 2 x M2.6 x 0.45 For N, 2 x No. 4-40 UNC For N, 2 x No. 4-40 UNC 2 x M2.6 x 0.45 Socket section Socket section D-sub Connector Cable Assembly D-sub Connector Cable Assembly Cable length L Assembly part no.

ARM10/11

(for L and R sides) AXT100-DR-9 123 AXT100-DR-11 148 AXT100-DR-13 173 AXT100-DR-16 210.5 AXT100-DR-18 235.5 AXT100-DR-20 260.5 AXT100-DR-22 285.5 53 AXT100-DR-25 323 33.5 AXT100-DR-27 348 18 14 OUT IN IN OUT IN AXT100-DR-29 373 ARM11AA1-12-A Handle position: Top/Common supply block with pressure switch L2 L2-10.5 L1=(28 x n)+56 18 20 28 28 5.3 56 5.5 84 0.1 0.3 0.2 0.4 0.5 0.6 SMC MPa SMC

ARM10/11

(for L and R sides) AXT100-DR-9 123 AXT100-DR-11 148 AXT100-DR-13 173 AXT100-DR-16 210.5 AXT100-DR-18 235.5 AXT100-DR-20 260.5 AXT100-DR-22 285.5 53 AXT100-DR-25 323 33.5 AXT100-DR-27 348 18 14 OUT IN IN OUT IN AXT100-DR-29 373 ARM11AA1-12-A Handle position: Top/Common supply block with pressure switch L2 L2-10.5 L1=(28 x n)+56 18 20 28 28 5.3 56 5.5 84 0.1 0.3 0.2 0.4 0.5 0.6 SMC MPa SMC

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 41 and 42 Type Manifold Specifications for 41 and 42 Type SS5Y5-41 SS5Y5-42 SS5Y7-42 Port size Flow characteristics Model 52-SY740 52-SY540 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model Applicable valve 4,2 (A,B) (P ,EA,EB) b Cv c[dm3/(sbar)] c[dm3/(sbar)] Single base / B mounting Manifold style b Cv SS5Y5-41 1 (SUP) / 3/5 (EXH) Common SUP / Common EXH 1/4

VK300

(S) 42 Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note 1) Mounting direction is fixed, do not mount on opposite side.

VK300

(-Q) (S) 42 (-Q) VV3K3-20 (-Q) 21 (-Q) VV5K3-20 (-Q) 21 (-Q) Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note1) Mounting direction is fixed, do not mount on opposite side.

Proposals for Energy Saving

4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

PSxx-OMM0006CN

No.PS-OMM0006CN-E // ZSE40A(F) ISE40A 2 9 12 13 16 16 18 20 23 23 25 25 25 F0 27 F1 OUT1 28 F2 OUT2 31 F3 33 F4 34 F5 / 36 F6 38 F11 39 F80 40 F81 41 42 F90 42 F97 44 F98 46 F99 48 49 52 52 53 60 60 63 -1No.PS-OMM0006CN-E (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

AC Servo Motor Driver

(CN1-19) SP1(CN1-41) LOP(CN1-45) ST2(CN1-18) ST1(CN1-17) EMG(CN1-42) Input Lit: ON Extinguished: OFF Output SA(CN1-22) TLC(CN1-25) ZSP(CN1-23) SA(CN1-24) RD(CN1-49) ALM(CN1-48) OP(CN1-33) (c) Torque control mode SP2(CN1-16) LOP(CN1-45) RS1(CN1-18) RS2(CN1-17) SON(CN1-15) RES(CN1-19) SP1(CN1-41) EMG(CN1-42) Lit: ON Extinguished: OFF Input Output VLC(CN1-25) ZSP(CN1-23) RD(CN1-49) ALM(CN1-48

EtherNet/IP TM Compatible Fieldbus System

OUT1 17 OUT1 16 OUT115 OUT114 OUT113 OUT112 Slave Diagnostic setting 8 #D4 #D3 #D2 #D1 #C4 #C3 #C2 #C1 #B4 #B3 #B2 #B1 #A4 #A3 #A2 #A1 connection diagnosis 32 point 9 COM_D COM_C COM_B COM_A switch diagnosis -: Unused 23 No.EX-OMS0014-A Diagnostic data Diagnostic information Input data Offset Meaning MSB LSB MSB LSB (INT) 15 8 7 0 8 #D4 #D3 #D2 #D1 #C4 #C3 #C2 #C1 #B4 #B3 #B2 #B1 #A4 #A3

Digital Pressure Switch

-I With bracket Bracket A 01/N01 type W1/WF1 type -66No.PS-OMM0007-I Bracket B W1/WF1 type -67No.PS-OMM0007-I Bracket D 01/N01 type W1/WF1 type -68No.PS-OMM0007-I Panel mount adapter 01/N01 type W1/WF1/M5/C4/C6 type -69No.PS-OMM0007-I Panel mount adapter + Front protective cover 01/N01 type W1/WF1/M5/C4/C6 type -70No.PS-OMM0007-I Panel cut-out dimensions -71No.PS-OMM0007-I 01/N01 type (products

Secondary Batteries

Bore size (mm) Symbol Stroke 10 16 20 10 mm 16 mm 20 mm 8 12 18 Dust cover type Fluororubber (FKM) F Action D Double acting Applicable Auto Switch/Refer to pages 62 to 65 for further information on the auto switch.

VK3000

L2 3-2-8 5 Port Direct Operated Poppet Solenoid Valve Rubber Seal Series VK3000 Base mounted (Side ported) Type 41 Manifold Grommet: G DIN terminal: D VV5K3-41Station -M5 VK VZ VF VFR VP4 VZS VFS ~ = ~ = VS4 VQ7 EVS VFN Solenoid is at the same side as A port: VV5K3-S41Station Built-in One-touch fitting: VV5K3-41Station -C4 ~ = Refer to the above drawing for other dimensions.

VK3000

5 Port Solenoid Valve Direct Operated Poppet Type VK3000 Series Rubber Seal [Option] Specifications C: 0.54 dm3/(sbar) (Passage {4/2 5/3 (A/B R1/R2)}) Compact: Width 18 x Length 68 (mm) Low power consumption 4 W DC (Standard type) 2 W DC (Low wattage type) Suitable for copper-free applications All the parts in contact with fluid are non-copper materials Type of actuation Direct operated

45

U D B C4 C6 C8 (Rail mounting hole pitch 12.5) 1-6-133

45

M3 Terminal screw 3 4 5 6 7 8 stations 2 stations 148 137.5 123 12.5 Stations n L1 L2 L3 L4 A: Orange B: Green 173 162.5 139 17 185.5 175 155 15 198 187.5 171 13.5 210.5 200 187 11.5 235.5 225 203 16 248 237.5 219 14.5 (Rail mounting hole pitch 12.5) 1-6-101 SX5000: 18 Pins Terminal Block/Plug-in C4 C6 C8 SS5X5-45T1UStations D(18 pins) 2n-One-touch fittings Note) The L1 to L4 dimensions of