Table of Contents

, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 4.5 4.5 M3 mounting hole M2.5 mounting hole Residual pressure release manual override DIN rail clamp screw 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

3 Port Solenoid Valve

double solenoid. 1 to 12 stations 1 to 12 stations Valve stations D-sub connector 15 pins D-sub connector 26 pins Refer to page 19.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-12 16 4 32 6 18 6 35 8 20.5 8 39 10 Series SY3000 SY5000 SY7000 Part No. 22 10 43 12 SY3000-52-2A 24 12 45.5 14 SY5000-52-2A SY3000/5000 DIN rail dimensions and weight SY7000-52-2A VZ1000-11-1Blocking disk indication stickers Refer to L dimensions Enter a number from the DIN rail dimension table below in the .

Compact Vacuum Unit

Latching Vacuum pump system ZB00 ZB03 ZB04 ZB05 ZB06 0.3 mm 1 to 12 stations Ejector 0.4 mm 0.5 mm 0.6 mm Manifold Features 2 Compact Vacuum Unit Series ZB RoHS How to Order Single Unit 5 L 0 2 K1 ZB 00 P1 C4 Vacuum Pump System 5 L 1 1 K1 ZB 04 P1 C4 Ejector Nominal Nozzle Size Body Type Rated Voltage 5 6 Applicable supply valve and standard supply pressure 24 VDC 12 VDC Port specification

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

U side 1 2 3 4 5 6 7 8 n 2-C10 R(EXH) port DIN rail clamping screw EXH EXH SMC SMC SMC SMC SMC SMC SMC 2-C10 P(SUP) port R R X B B B B B B B B X P 49 P 31.6 9.5 24.5 16 A A A A A A A A (12) (7.5) 23 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads 41 P = 16 Broken lines and dimensions inside ( ) indicate type [-D] (with

Compact Manifold Regulator Series ARM5

P U C S O H L 7 26 (Max. 28) 12 7 IN OUT 12 Panel cutout dimensions 28 ARM10F1-06GPC 08GPC 4 x R1 or less 28 to 28.5 IN OUT 38 58 34 23 20 Plate thickness: Max. 2.1 30 15 6 OPEN 34 14 0.6 0.4 0.2 0.8 1 0 MPa 62 SMC P K U C S O H L 7 26 (Max. 28) 7 IN OUT 12 522 Regulator/Single Unit Type Options Pressure Gauge One-touch Fittings for Regulator VVQ1000-50A C4 Part no.

PFxx-OMJ0005CN

) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1

ZQ-OM01401

1 ZQA-Q25LO--VQ100 (ZQ ) Assy(DC24V ) VQZ1000V-85-1A 97mm 41 - No.ZQ-OM01401-B 13. (1),(2) (3),(4) (4),(5) (6) (14) (7) (8) (9) (6),(10) (11) (12) (13) (3),(4), (5),(6),(14) (15) (7) (8) (16) 42 - No.ZQ-OM01401-B No. (1) (2) (3) ON 10 (%) (4) (5) Assy (6) (7) (8) 0.72[V] (9) Ass'y (10) 43 - No.ZQ-OM01401-B No. (11) (12) (13) (14) Ass'y (15) ON/OFF (16) (ZQ-ZSV-A

Digital Pressure Switch

Incorrect operation of the internal data of the Pressure switch (Er0, Er4, Er6, Er7, Er8, Er9) System error (Er0, Er4, Er6, Er7, Er8 or Er9) is displayed. (2) Check that the power supply voltage is within the range 12 to 24 VDC 10%. (2) Supply a correct voltage of 12 to 24 VDC 10%.

PSxx-OMM0006CN

No.PS-OMM0006CN-E // ZSE40A(F) ISE40A 2 9 12 13 16 16 18 20 23 23 25 25 25 F0 27 F1 OUT1 28 F2 OUT2 31 F3 33 F4 34 F5 / 36 F6 38 F11 39 F80 40 F81 41 42 F90 42 F97 44 F98 46 F99 48 49 52 52 53 60 60 63 -1No.PS-OMM0006CN-E (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

EtherNet/IP TM Compatible Fieldbus System

Refer to page 12 for wiring. Sensor wiring Connect the sensors to the sensor connectors. Pin layout of the sensor connector M12 connector (5 pin, socket) No. Description Even number 0 to 14 Odd number 1 to 15 1 Power supply (24 VDC) 2 (Input) 3 Power supply (0 V) 4.

Secondary Batteries

and up) SUS304 (6 and 8) Aluminum (12 and up) SUS304 (6 and 8) Aluminum (12 and up) Material Piston Anodized (12 and up) Chromate (12 and up) Electroless Ni-plated (6 and 8) Chromate (12 and up) Treatment SUS304 SUS303, SUS304 Iron SUS304 SUS303 Iron Brass Electroless Ni-plated Brass Electroless Ni-plated Iron Material Air slide table MXQ Piston spacer Treatment Material Packing support

VK300

(S) 42 Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note 1) Mounting direction is fixed, do not mount on opposite side.

VK300

(-Q) (S) 42 (-Q) VV3K3-20 (-Q) 21 (-Q) VV5K3-20 (-Q) 21 (-Q) Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note1) Mounting direction is fixed, do not mount on opposite side.

Compact Vacuum Unit Ejector/ Vacuum Pump System

(N.C.) port Port size Rc1/8 Supply from one side 10 NPT1/8 12 12 Supply from both sides 12 G1/8 Supply from one side 10 8 10 M50.8 Supply from both sides 12 10 12 Note) The number of stations shown above is to satisfy the specifications of the ejector performance at the standard supply pressure.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 41 and 42 Type Manifold Specifications for 41 and 42 Type SS5Y5-41 SS5Y5-42 SS5Y7-42 Port size Flow characteristics Model 52-SY740 52-SY540 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model Applicable valve 4,2 (A,B) (P ,EA,EB) b Cv c[dm3/(sbar)] c[dm3/(sbar)] Single base / B mounting Manifold style b Cv SS5Y5-41 1 (SUP) / 3/5 (EXH) Common SUP / Common EXH 1/4

ARM10/11

VE 3 56 SMC AXT100-DR-8 110.5 28 AXT100-DR-10 135.5 SMC SMC VY1 K K P P C C U U O O S S L L H H AXT100-DR-12 160.5 8 AXT100-DR-14 185.5 12 12 G 11.5 AXT100-DR-16 210.5 AXT100-DR-19 248 PPA AXT100-DR-21 273 AXT100-DR-23 298 AL 81 AXT100-DR-25 323 AXT100-DR-28 360.5 33.5 14 16 OUT IN OUT IN ARM11BC2-08 Handle position: Bottom L2 L2-10.5 L1=(28 x n)+36 52.5 18 28 39 28 12 12 5.3 3 5.5 SMC SMC

ARM10/11

VE 3 56 SMC AXT100-DR-8 110.5 28 AXT100-DR-10 135.5 SMC SMC VY1 K K P P C C U U O O S S L L H H AXT100-DR-12 160.5 8 AXT100-DR-14 185.5 12 12 G 11.5 AXT100-DR-16 210.5 AXT100-DR-19 248 PPA AXT100-DR-21 273 AXT100-DR-23 298 AL 81 AXT100-DR-25 323 AXT100-DR-28 360.5 33.5 14 16 OUT IN OUT IN ARM11BC2-08 Handle position: Bottom L2 L2-10.5 L1=(28 x n)+36 52.5 18 28 39 28 12 12 5.3 3 5.5 SMC SMC

Digital Flow Switch (Integrated display type)

PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 PFM7-01/02--X693 PFM7S-01/02--X693 -73No.PF-OMJ0006-J PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 PFM7-01/02--X694 PFM7S-01/02--X694 -74No.PF-OMJ0006-J For a mixture of Argon (Ar) and carbon dioxide (CO2) The mixture ratio can be selected from Ar : CO2 = 92 : 8, 90 : 10, 80 : 20, 70 : 30 or 60 : 40.