5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SQ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 SQ2000 Applicable tubing O.D. (mm) VQ4 SQ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 Built-in silencer direct exhaust (-S) SSQ1000-SE SSQ2000-SE 3.2 4 6 8 Part numbers above are for a set of ten elements.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Interchargeable Cylinder Ports High Speed Response Time SY3000 double, 0.5MPa 24VDC, without surge voltage suppressor Interchangeable port sizes [ports A, B] Series C4, C6, M5 C4, C6, C8, Rc(PT) 1/8 C8, C10, Rc(PT) 1/4 SY3000 The innovated design of the pilot valve enables the SY to achieve a response time of 10ms while only consuming a half watt of power.

Compact Vacuum Unit

Latching Vacuum pump system ZB00 ZB03 ZB04 ZB05 ZB06 0.3 mm 1 to 12 stations Ejector 0.4 mm 0.5 mm 0.6 mm Manifold Features 2 Compact Vacuum Unit Series ZB RoHS How to Order Single Unit 5 L 0 2 K1 ZB 00 P1 C4 Vacuum Pump System 5 L 1 1 K1 ZB 04 P1 C4 Ejector Nominal Nozzle Size Body Type Rated Voltage 5 6 Applicable supply valve and standard supply pressure 24 VDC 12 VDC Port specification

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

44 2 position 2 position C4 C4 SJ3l60-C4 SJ2l60-C4 4 onetouch fitting 4 onetouch fitting 3 position 4 position 3 position 4 position 77 48 73 61 69 44 39 42 2 position 2 position C6 SJ3l60-C6 SJ2l60-M3 6 onetouch fitting M3 x 0.5 3 position 4 position 3 position 4 position 73 69 57 65 69 46 42 Note) Please contact SMC for the weight of elbow fittings. 2 position SJ3l60-M5 M5 x 0.8 3 position

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Symbol Description Surface treatment Note Material A VCC12(D)-00 For VVCC12-1A-02FC4 C6 PPS resin C4 C6 VVCC12-1A-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for 2 port valve Manifold block q Hard anodized containing PTFE For VVCC12-1G-02FC4 C6 Aluminum C O-ring Special FKM w C4 C6 VVCC12-1G-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for gate

5 Port Solenoid Valve Series SV

AS2200-01 200 100 70% 50% 30% 10% 0 400 MB 40 300 Stroke mm AS2201F -02-08 AS2200-02 200 100 0 ANA1 -C10 T0806 400 MB 50 300 Stroke mm AS3201F -02-08 AS3000-02 200 100 0 400 MB 63 300 Stroke mm AS4000-03 200 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different

Vacuum

08 Tube a a E E 5 List O Pad Dia.

Plug-in Unit

Electrical Wiring Specifications Lead wire specifications Lead wire length Lead wire 0.3 mm2 25 core VV5QC11 08 C6 LD 0 As the standard electrical wiring specification used is for 12 stations or less, double wiring (connected to SOL. A and SOL. B) is used for the internal wiring of each station regardless of valve and option types.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

-20 Applicable manifold base (sub-plate) SS5YJ3-41 SS5YJ3-S41 SS5YJ3-46 SS5YJ3-S46 SS5YJ3-31 SS5YJ3-S31 SS5YJ3-32 SS5YJ3-S32 Manifold gasket Manifold gasket SS5YJ3-31 SS5YJ3-S31 SS5YJ3-32 SS5YJ3-S32 VJ3000-14-3 VJ3000-14-2 Note) Manifold gasket "VJ3000-14-2" can be used with the following manifold bases.

SYJ300-OMU0003

-20SS5YJ3-21PSS5YJ3-21SA 3SYJ3000-33-1 R SYJ312SYJ312M SYJ300 3 SYJ322SYJ322M SYJ300 3 SS5YJ3-31-S31SS5YJ3-32-S32SS5YJ3-32SA SS5YJ3-46-S46SS5YJ3-32P SYJ3000-33-1 SYJ3000-33-1 3 R R 3AB SYJ314SYJ314M SYJ324SYJ324M SS5YJ3-41-S41 3SYJ3000-33-1 R 3AB SYJ314SYJ314M SYJ324 SYJ324M SS5YJ3-20 SS5YJ3-41 B3 A B3 A M1.7 : 0.12N.m 17 No.SYJ300-OMU0003 Assy SYJ32(R)(-Q)) (SYJ34(R)(-Q)) SYJ300

SYJ Series

SS5YJ3-20,SS5YJ3-21P,SS5YJ3-21SA The 3 port valve can be used by simply sealing off the unused R port with rubber plug SYJ3000-33-1. Applicable solenoid valves SYJ312,SYJ312M,SYJ322,SYJ322M series SS5YJ3-31,-S31,SS5YJ3-32,-S32,SS5YJ3-32SA SS5YJ3-46,-S46,SS5YJ3-32P The 3 port valve can be used without modification. The A port of the valve will flow out of the B port of the manifold.

base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, SS5YJ3 OTHER SIZE RATING, VALVE, SS5YJ3 MFLD SYJ3000, 1K, SS5YJ3 OTHER SIZE RATING, 0.66069 lb

base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, SS5YJ3 BUILT IN FITTING LESS THAN 1/4, VALVE, SS5YJ3 MFLD SYJ3000, UJ, SS5YJ3 BUILT IN FITTING LESS THAN 1/4, 0.99208 lb

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

2

(40) AS321F-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS321F-02-10(S)A 10 15.9 26.7 37 35.7 15.6 42 (42) AS321F-02-12(S)A 12 18.5 29.7 40 34.5 17 43 (43) AS321F-03-06(S)A 6 10.4 21.8 32.1 36.4 50 48.4 44.5 42.9 Flow Control Equipment 1/4 19 16.6 13.3 31 (32) AS321F-03-08(S)A 8 13.2 22.7 33 14.2 AS321F-03-10(S)A 10 15.9 26.7 37 28 15.6 32 (33) AS321F-03-12(S)A 12 18.5 29.7 40 26.8 17 34 (35)

KJ

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

Air Fittings & Tubing

N FA FB L1 L3 L4 L5 L6 P Q1 Q2 MA MB L2 65 40 61.5 47 73 55 86 19 26 29 39 41 57 KM11-04-08-6 6 10 18 29.5 19.5 27 12 16 18.5 6 10.6 8 4 KM11-04-08-10 10 86 KM11-06-10-6 6 76 KM11-06-10-10 10 102 10 19.5 31.5 21.5 31 13.5 17 21 7.5 13 10 6 KM11-08-12-6 6 85 KM11-08-12-10 10 116 11.5 22.5 35.5 24 34.5 14.7 18.5 22 9 15.5 12 8 SKM, #1 to #6 KM12 Thread Rc(PT) T Part No. N H (Hex.)

ZP

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

ZP

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

AS

18.5 43.3 42.8 15.2 41 21 37.8 5/16" 23 43.3 31.8 AS321F-02-12 AS321F-02-11 67 69 12 43.3 21 31.8 17.9 20.9 3/8" 22 44.3 32.8 19 19 AS321F-03-06 AS321F-03-07 55 55 6 39.3 17 27.8 13.2 12.8 1/4" 17 39.3 27.8 AS321F-03-08 AS321F-03-09 57 57 8 41 18.5 29.5 3/8 19.8 45.4 40.4 40.2 35.2 23 15.2 5/16" 15.2 18.5 29.5 41 3/8 23 35.2 19.8 40.2 40.4 45.4 AS321F-03-10 AS321F-03-11 59 59 10 43.3 21