Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 5 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 6 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 7 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 8 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 17 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -

Table of Contents

-04 AS121F-M5-03 5/32" M5 x 0.8 M5 x 0.8 8 17.3 22.2 7 9.3 22.1 9.6 4 25 25.8 22.1 28.6 9.3 17.3 AS121F-U10/32-04 AS121F-U10/32-03 5/32" 10-32UNF 10-32UNF AS121F-M5-06 AS121F-M5-05 3/16" M5 x 0.8 M5 x 0.8 11.4 21.3 26.1 7 16.5 13.5 11.7 22.9 11.6 18.1 6 AS121F-U10/32-06 AS121F-U10/32-05 3/16" 10-32UNF 10-32UNF 8 11.7 28.6 25.8 22.2 25 9.6 AS221F-01-23 AS2 1F-M5-07 20.4 16 9.3 27.5 3.2 1/4

2

AS-FS 7.2 5 AS12l1FG-U10/32-01A AS12l1FG-M5-03A 5/32" 8.2 AS12l1FG-U10/32-03A AS12l1FG-M5-07A 1/4" 11.2 18.6 23.1 16.5 6 AS12l1FG-U10/32-07A 17.2 21.7 16.9 M5 x 0.8 10/32UNF 8 9.4 26.5 25.4 23.5 22.4 13.3 Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation INDEX 478 Series AS-FG For M5, 10-32UNF Dimensions/ Universal type Seal method: Gasket seal For M5

ZP

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

Table of Contents

18 41 59 30 96 113 (96) 16 25 32 KQ2E16-03 14 40 127 29 M28 x 1.5 KQ2E16-04 18 44 132 Note) ( ): Values for soft nylon. 15-2-28 20 One-touch Fittings Series KQ2 Adaptor: KQ2N H (width across flats) Applicable fitting size d Connection thread R M d Weight (g) L A Model Applicable fitting size KQ2N04-M5 KQ2N04-01S KQ2N06-M5 KQ2N06-01S 7 34 32 M5 x 0.8 2 6 2 5 13 29 4 2.5 1 8 14 30 M5 x 0.8

CATALOG

BMA2-040 40 BMA2-050 50 BMA2-063 63 BM1-01 20 BM1-02 25 BM1-32 32 BM1-04 40 BM1-05 50 BM1-06 63 BA-01 20 BA-02 25 BA-32 32 BA-04 40 BA-05 50 BA-06 63 BA-08 80 BA-10 100 Courtesy of Steven Engineering, Inc. !

ZP

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

AS

7 12.7 12.3 28.6 25.8 25 22.2 9.6 8 AS121F-M5-23 AS121F-M5-03 5/32" M5 x 0.8 M5 x 0.8 3.2 9.3 22.1 17.3 8.4 22.1 17.3 AS121F-U10/32-23 AS121F-U10/32-03 10-32UNF 5/32" 10-32UNF 12.7 12.3 AS121F-M5-04 AS121F-M5-05 M5 x 0.8 M5 x 0.8 3/16" 4 7 16.5 7 8 11.4 21.3 26.1 9.3 22.2 9.6 25 25.8 28.6 22.1 17.3 AS121F-U10/32-04 AS121F-U10/32-05 10-32UNF 3/16" 10-32UNF 11.7 28.6 25.8 25 22.2 9.6 8 AS121F-M5

ZP

K 46 29.9 21 2.5 10 8 M5 x 0.8 16 46.5 30.4 21.5 20 25 57.6 39.8 29 3.5 12 12 M8 x 1.25 32 58.1 40.3 29.5 10 13 B5 M5 x 0.8 5 D2 Width across flats H 46 29.9 21 2.5 N S U F GN GS 10 8 M5 x 0.8 16 46.5 30.4 21.5 20 25 57.6 39.8 29 3.5 12 12 M8 x 1.25 32 58.1 40.3 29.5 40 60.6 42.8 32 4 50 61.6 43.8 33 20 25 B8 04 06 08 Construction p. 117 ZP R C B6 M6 x 1 6 Adapter Assembly p. 122 57.6 39.8

ZP

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

KJ

18 41 59 30 96 113 (96) 16 25 32 KQ2E16-03 14 40 127 29 M28 x 1.5 KQ2E16-04 18 44 132 Note) ( ): Values for soft nylon. 15-2-28 20 One-touch Fittings Series KQ2 Adaptor: KQ2N H (width across flats) Applicable fitting size d Connection thread R M d Weight (g) L A Model Applicable fitting size KQ2N04-M5 KQ2N04-01S KQ2N06-M5 KQ2N06-01S 7 34 32 M5 x 0.8 2 6 2 5 13 29 4 2.5 1 8 14 30 M5 x 0.8

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Dimensions Applicable fitting size d 4 Model A L D 10-KQP-04 16 32 6 6 10-KQP-06 18 35 8 8 10-KQP-08 20.5 39 10 10 10-KQP-10 22 43 12 Blanking plate assembly : Thread type Nil Rc G F 1 8" 10-KQP-01 16 31.5 5 N NPT 5 32" 10-KQP-03 16 32 6 NPTF T 1 4" 10-KQP-07 18 35 8.5 5 16" 10-KQP-09 20.5 39 10 Caution Mounting screw tightening torque Series Assembly part no.

Table of Contents

M5 8 81.5 1/4, 3/8 VCL31 24 25 59 46 57 60 54.5 48.5 101 57 68 104 30 50 36.5 13.5 15 32 25 23 M5 8 86 1/2 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 107 22 45 41 11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class

Air Fittings & Tubing

M D1 D2 L1 Urethane KQ2LF04-M5 KQ2LF04-M6 KQ2LF04-01 KQ2LF04-02 KQ2LF06-M5 KQ2LF06-M6 KQ2LF06-01 KQ2LF06-02 KQ2LF06-03 KQ2LF08-01 KQ2LF08-02 KQ2LF08-03 KQ2LF10-02 KQ2LF10-03 KQ2LF10-04 KQ2LF12-02 KQ2LF12-03 KQ2LF12-04 M5 X 0.8 M6 X 1.0 14.5 8 8 5 3.5 3.5 15.5 21 24.5 15 16 22 25.5 26 4 10.4 16 18.5 1 8 1 4 14 17 13 20 5 6 13 10 4.2 4.2 M5 X 0.8 M6 X 1.0 3.5 3.5 8 8 6 17 1 8 12.8

Table of Contents

-06 (6) 02 03 04 E300E100-M5 E20002 03 04 E30001 02 03 E60006 10 E60006 10 E60006 10 Piping adapter 02 03 04 06 IS1000E-40 (6) Pressure switch with piping adapter IS1000E-20 02 03 04 IS1000E-30 01 02 03 02 03 04 IS1000E-30 (6) Y14-M5 Y2401 02 Y3401 02 Y3402 03 Y4403 04 Y5401 02 Cross interface Note 1) in part numbers for a round pressure gauge indicates a type of connection thread.

Table of Contents

NBR (50), Conductive silicon rubber (50) Durometer Weight/Male Thread (Female thread) (g) Pad form Flat Flat with ribs Deep Bellows Connection M5 M6 M8 M5 M6 M8 M5 M6 M8 M5 M6 M8 Model ZPY02 to 08 2004 3507 4010 10 to 16 (Thin section series) 15 (11) except 2, 4 15 (11) except 2, 4 15 (11) 15 33 (26) 31 (27) ZPY10 33 (25) 32 (25) 33 (25) 32 (25) 33 (25) 33 () (25) ZPY13 38 (27) 32 (27