Smooth Cylinder/Low Speed Cylinder

A A1 E1 L1 MM RR1 U1 NZ L 42 56 71 79 14 18 21 21 22 28 38 44 30 40 50 55 M14 x 1.5 12 16 21 24 14 20 27 31 I-G04 I-G05 I-G08 I-G10 10 14 18 22 18 22 28 32 +0.058 0 0.3 0.5 36 42 56 71 79 16 20 23 24 22 28 38 44 30 40 50 55 M14 x 1.5 12 16 21 24 14 20 27 31 41.6 Y-G04 Y-G05 Y-G08 Y-G10 10 18 22 28 32 IY-G04 IY-G05 IY-G08 IY-G10 +0.5 +0.3 +0.058 0 M18 x 1.5 +0.070 0 0.3 0.5 44 M18 x 1.5 50.6

5 Port Solenoid Valve Series SY3000/5000/7000/9000

L Dimension 11 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18 323 19 335.5 20 348 21 360.5 1 8" KQ2P-01 16 31.5 5 No. L Dimension 22 373 23 385.5 24 398 25 410.5 26 423 27 435.5 28 448 29 460.5 30 473 31 485.5 32 498 5 32" KQ2P-03 16 32 6 1 4" KQ2P-07 18 35 8.5 No.

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Title not found

16 Hex 13/64 13/64 5/16 Hex Typ. 80 M3-LB4 M3-LB1 M3-LB2 M3-LB3 M3F-LB3 M3-LB2 1/2 1" 15/16 5/8 5/8 5/8 5/16 Hex Typ. 3/16 Hex Typ. 81 M3-T1 M3-T2 M3-T3 M3-T4 M3-T2 1/2 See complete selection of adapters on pages 23 & 24 1/4 5 32 /32 3/16 Hex 7/16 Ref 1/4 Hex 5/16 Hex M3 x 0.5 M6 x 1 Thd .085 5 32 9 32 M3 0.5 Thd to 10-32 Thd .241 Ref 82 M3 x 0.5 to M6 x 1 (F) Adapter M3 Plain Plug M3

0.4

Digital Unit M12 connector (5 pins) M8 connector (3 pins) D-sub connector Spring type terminal block Input Unit 8 inputs 8 inputs 8 inputs 16 inputs 16 inputs 16 inputs 8 inputs 8 inputs 8 inputs 16 inputs 16 inputs 16 inputs 16 inputs 16 inputs 16 inputs Output Unit 8 outputs 8 outputs 8 outputs 16 outputs 16 outputs 16 outputs 16 outputs 16 outputs 16 outputs Input/ Output Unit 8 inputs

Air Slide Table

M6 x 16 18 16 25 16 MXQR-AS20-X11 37.5 M12 x 1.25 25 MXQR-AS20-X12 47.5 J 5 MXQR-AS25 32.5 K H MXQR25 22 54 16 15 19 6 M8 x 18 M8 x 18 20 18 31 17 MXQR-AS25-X11 42.5 M14 x 1.5 25 MXQR-AS25-X12 52.5 1) Size of hexagon socket head bolt 2) Mounting the adjuster on the left side is also available.

Sine Rodless Cylinder Series REA/REB

10 10 REAH20 16 16 13 13 REAH25 25 M3 REAHT25 W REAHT32 40 W M1 M2 Static Moment Moment generated by the workpiece mass even when the cylinder is stopped Pitch moment M1 = WL Yaw moment M3 = W (L A) Roll moment M2 = WL (mm) Model REAH10 REAH15 REAH20 REAH25 REAHT25 REAHT32 A 15 17.5 19.5 23.5 0 0 L L A L M2 M1 M3 Since there are 2 guides, the guides central axis and the cylinders

Fluoropolymer Piping Equipment

6 6 LQ1R51-M 19 1/2" 30.5 29 10 10 LQ1R5B-M1/2" 9 LQ1R5C-M3/4" 3/4" 30 39 16 15 LQ1R5D-M1/2" 9 LQ1R5G-M3/4" 1/4" 27.5 33.5 6 6 LQ1R5H-M3/4" 3/8" 29 35 10 10 LQ1R6A-M 1" 3/4" 36 38 6 24 9 18 21 43 28 10 7 29 14 28 26 54 39 10 10 LQ1R52-M 12 9.4 LQ1R53-M 19 3/4" 30 39 16 15 LQ1R54-M 12 9.4 LQ1R58-M 19 1/4" 27.5 33.5 6 6 LQ1R59-M 19 3/8" 29 35 10 10 LQ1R61-M 25 3/4" 36 38 16 16 LQ1R6B-M3/4"

42

) + Individual EXH (Middle, Bottom) q AXT632-17-16 (M3 x 137) 3 For manifold w AXT632-41-3 (M3 x 103) 2 Valve q AXT632-17-16 (M3 x 137) 3 For manifold The individual EXH and restrictor can be mounted on the top. w AXT632-41-3 (M3 x 103) 2 Valve + Spacer (Top): Interface regulator Spacer (Middle): Individual SUP or Individual EXH/Restrictor Spacer (Bottom): Restrictor/Individual SUP or Individual

Free Mount Cylinder

(mm) DQ HQ HP 4 6 8 10 13 16 20 25 32 40 50 10 16 25 40 6 8 10 13 16 20 25 32 40 50 2.6 4.8 31 12 7 26 10 7 31 12 9 26 10 9 10 10 26 26 2.6 4.8 32 13 7 32 13 9 DQ HQ HP ZP ZC(D)UKD16 ZC(D)UKR16 12 12 31 31 15 12 33 18 16 37 28 20 44 DQ HQ HP 12 18 12 15 36 15 18 20 41 12 16 37 ZC(D)UKD20 ZC(D)UKR20 ZP 12 33 12.5 18.5 33.5 23 14 38 39.5 28 14 38 34 29 53 35 22 27 24 48 DQ HQ HP ZC(D)UKD25

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

70 100 300 500 1000 W Piston speed (mm/s) Graph (1) Moment M1, M3 M2 Allowable Moment (Static moment/Dynamic moment) 100 100 85 96 CY1HT32 CY1HT25 CY1H25 CY1H20 CY1H15 CY1HT32 CY1HT25 CY1H25 64 56 (Nm) 50 40 30 50 40 30 20 28 26 M1 M2 M3 M2 M3 M1 Model Model 20 CY1H20 CY1H15 16 Moment (Nm) Moment (Nm) CY1H10 CY1H25 1.5 2.5 1.5 28 26 28 13 10 10 CY1H15 CY1HT25 10 16 10 56 85 56 2 2.5 3 4

Vacuum Unit

PE EXH Common Port open to atmosphere *1 PS 4 5/32" PD *2 M3 M3 : Not applicable 1 Air is also exhausted from the pilot valve when the valve type is R. Piping for PE port is available as an option (M3). (Refer to pages 15 and 16.) MExhaust Noise 2 A model with PD port is available as an option. (Refer to pages 9, 10, and 15.)

Compact 5-Port Solenoid Valve

Stations Note 02 2 stations Double wiring*1 Nil Internal pilot S Internal pilot, Built-in silencer 32 M12 NB NBN 16 NC NCN 32 *3 D-sub ND NDN 16 VA VAN CC-Link 32 M12 VB VBN 16 DA DAN EtherCAT 32 M12 DB DBN 16 FA FAN PROFINET 32 M12 FB FBN 16 EA EAN EtherNet/IP 32 M12 EB EBN 16 *2 GAN Ethernet POWERLINK 32 M12 *2 GBN 16 *2 KAN IO-Link 32*4 M12 08 8 stations 02 2 stations Specified layout

Electric Actuator

Body fixed A L Maintenance L (mm) A (mm) 20 24 30 31 Model Bolt Warning LEF;16 LEF;25 LEF;32 LEFS40 3.5 4.5 5.5 6.6 M3 M4 M5 M6 Maintenance frequency Perform maintenance according to the table below.

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Electric Actuators

Motor side 16 pulse End side 1 A Parameter no.

LEC-OM071xx

Bit 16 to 31: Reserved (0) Binary Data Extended Address Setting (for Future Use) 4 bytes 05H 1 This is the number of extended addresses used.

MGP

lb 1 in = 25.4 mm 7 Series MGP Compact Guide Cylinder Horizontal Mounting Ball Bushing 1 7 l = 50mm V = 200m/s 1 8 l = 100mm V = 200m/s MGPL12 to 25 MGPL12 to 25 10 10 25 20 25 5 5 25 25 25 20 Load weight m (kg) Load weight m (kg) 20 20 25 16 20 20 16 16 12 16 16 16 12 12 1 1 12 12 12 0.5 10 20 30 31 50 100 101 200 300 0.5 10 20 30 31 50 100 101 200 300 Stroke (mm) Stroke (mm) MGPL32 to