Table of Contents

Description Material Gasket Hexagon socket head screw Pilot valve assembly Sub-plate assembly NBR Steel AXT624-20-2 AXT624-26 (M3 x 31) AXT624-20-2 AXT624-26 (M3 x 31) AXT624-20-2 AXT624-26 (M3 x 31) Refer to How to Order Pilot Valve Assembly on page 3-5-10. Refer to How to Order Sub-plate Assembly on page 3-5-11. !3 !4 !

CRB2/CRBU2/CRB1

R E (g6) Q3 Q2 F (h9) B Q1 P C D G1 G2 J K L M N Model A 90 180 270 M5 M3 3.4 (5.5) CRB2BW10-S CRB2BW10-SE CRB2BW15-S CRB2BW15-SE CRB2BW20-S CRB2BW20-SE CRB2BW30-S CRB2BW30-SE M3 (6) 5 8.5 5 11 9 14 10 15.5 25 9.5 25 10 25 13 25 14 0 0.036 15 24 8 14 9 3 1 5 9 0.5 0.004 0.012 29 4 M3 M3 (5) 3.4 (6) M5 M3 M3 (10) 0.004 0.012 0 0.043 20 29 9 18 12 4 1.5 6 10 0.5 5 34 M3 M4 (7.5) 4.5 (11) M4

1

M3 x 0.5 M3 7.5 15 34 3.3 10.5 10 6.5 23 3.4 5.5 3.5 9.5 5 7 26 M3 x 0.5 M3 7.5 15 38 3.3 13 12 6.5 30 3.4 7 3.5 11.5 5 7 33 -X M4 x 0.7 M4 8.5 17 53 4.4 14.5 14 8 35.5 4.5 7.5 4.5 18 4.5 6.5 38.5 M4 x 0.7 M3 14.5 29 62 6.5 3 26 14 34 4 4.5 16.5 6 45 7 20M5 x 0.8 M4 14.5 29 70 8 3 31 17 39 4 5.5 20.5 7 51 8 M6 x 1 M5 17 34 76 9.5 3 41 22 50 4.5 6.5 21 7.5 62.5 10

Table of Contents

VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.

MXS

Model Mounted to body B C D E H F M P* I A J Q* MXS-AS6 5 16.5 MXS 6 P M 17.8 10.5 M2.5 X 10 12.5 8.5 M2.5 X 8 7 2.5 6 6 M5 X 0.8 C A MXS-AS6-X11 15 26.5 MXS-AS8 5 16.5 MXS 8 21.5 14.6 10 M3 X 10 11 M3 X 12 8 3 7 7 MXS-AS8-X11 15 26.5 M6 X 1 MXS-AS8-X12 25 5 36.5 B MXS-AS12 20 E MXS12 18.5 13 M4 X 12 16 M4 X 15 12 4 31 10 9.5 M8 X 1 MXS-AS12-X11 15 30 D F MXS-AS12-X12 25 40 MXS-AS16 5 24.5

F

Applicable Connection Thread Model H (Width D1 D2 L1 L2 A M Effective Tube OD mm Uni Thread Across Flats) Orifice (mm 2) Nylon 4 18 KQK04-U01 10 10.4 10 17 18.5 30 16 3.4 4 14 KQK04-U02 14 10.4 10 17 20.5 30.5 16 3.4 6 18 KQK06-U01 10 12.8 10 18 18.5 31 17 8.7 6 14 KQK06-U02 14 12.8 10 18 20.5 31 17 8.7 6 38 KQK06-U03 17 12.8 10 18 21.5 32 17 8.7 8 18 KQK08-U01 12 15.2 12 20.5 20 35 18.5

CQS

10 12 16 20 5 6.5 8 10 14 15 18 20 7 10 12 14 4 4 5 5 5 5 8 10 * Refer to P.2.3-18 for detail of the rod end nut and mounting brackets.

REA/REB

PA Model HS PW LD M N PB L JK NN P MM HT J High Precision Guide Type REBH Order Made Auto Switches REAL15 REAL20 REAL25 REAL32 REAL40 7.5 70 95 8 45 9.5 75 5.6 M5 x 0.8 M6 x 1.0 M5 x 0.8 M8 x 1.0 21 25 120 5.6 10 10 50 90 86 10 M10 x 1.0 Rc 1/8 M6 x 1.0 31 10 M6 x 1.0 11 100 130 10 60 10 86 7 Rc 1/8 M8 x 1.25 M6 x 1.0 M14 x 1.5 10 39 160 9.2 12 11.5 70 120 100 15 M20 x 1.5 Rc 1/8 M8 x 1.25

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Round head combination screw Round head combination screw ( ) M3 x 47 With spring washer ( ) M3 x 31 With spring washer Adapter plate assembly DXT201-3-1A Round head combination screw ( ) M3 x 31 With spring washer Gasket Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

0.5

[mm] 10 Fan Type Ionizer IZF21/31 Series RoHS How to Order IZF 21 B Model Air suction side filter Nil None U With filter1 Symbol Max. air flow 21 1.8 m3/min 31 4.4 m3/min 1: Filter + Filter holder Automatic cleaning unit, Louver (Refer to page 12 for detail.)

CQS

6 8 7 12 M3 x 0.5 15.5 20 25.5 28 M4 x 0.7 32 38 47 52 6.5 6.5 9 9 3.5 3.5 5.4 5.4 6 8 10 12 5 6 8 10 7.5 7.5 9 11 30.5 40.5 22 27 35.5 45.5 27 27 34.5 37.5 32 32 39.5 42.5 8.5 8.5 9.5 10 13.5 13.5 14.5 15 25 29 36 40 7 7 10 10 4 4 7 7 0.5 0.5 1 1 M4 x 0.7 M4 x 0.7 30.5 40.5 22 27 35.5 45.5 5, 10 M5 x 0.8 M6 x 1.0 34 44 24.5 29.5 44 54 M6 x 1.0 M6 x 1.0 37.5 47.5 27.5 32.5 47.5 57.5 Note

Made to Order

15 20 25 32 40 50 63 M3 x 0.5 9.5 3.4 6.5 3.3 5 7 5.5 10.5 26 23 34 15 7.5 M3 3.5 10 M3 x 0.5 11.5 3.4 6.5 3.3 5 7 7 13 33 30 38 15 7.5 M3 3.5 12 M4 x 0.7 18 4.5 8 4.4 4.5 6.5 7.5 14.5 38.5 35.5 53 17 8.5 M4 4.5 14 M4 x 0.7 16.5 6 4 45 14 62 29 14.5 M3 4.5 26 6.5 7 34 3 M5 x 0.8 20.5 7 4 51 17 70 29 14.5 M4 5.5 31 8 8 39 3 M6 x 1 21 7.5 4.5 62.5 22 76 34 17 M5 6.5 41 9.5 10 50 3 M6 x 1 25.5

ISO Cylinder

GKM4-8 4 8 16 4 8 8 11 M4 x 0.7 21 12 GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 16 GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 20 GKM8-16 8 16 32 8 16 14 23 M8 x 1.25 42 25 GKM10-20 10 20 40 10 20 18 27 M10 x 1.25 52 Bore size Part no. b1 b3 dH7 d6 d7 h l l3 d3 a 8 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 10 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 12 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 16 KJ6D 9 6.75

MXS Series Air Slide Table

Applicable model P(Hexagon socket head screw) Q(Hexagon socket head screw) Mounted to body J M I F B C D E H A MXS-AS6 5 16.5 MXS 6 P M 17.8 10.5 M2.5 X 10 12.5 8.5 M2.5 X 8 6 2.5 7 6 M5 X 0.8 C A MXS-AS6-X11 15 26.5 MXS-AS8 5 16.5 MXS 8 21.5 14.6 10 M3 X 10 11 M3 X 12 7 3 8 7 MXS-AS8-X11 15 26.5 M6 X 1 MXS-AS8-X12 25 5 36.5 B MXS-AS12 20 E MXS12 18.5 13 M4 X 12 16 M4 X 15 10 4 12 31 9.5

Smooth Cylinder/Low Speed Cylinder

MQ CUX20-PS Rod seal: 1 pc. 10 16 20, 25 32 0.54 10% M3 CUX25-PS Gasket: 1 pc. RHC 1.23 10% M4 Grease pack (10 g): 1 pc. CUX32-PS 2.55 10% M5 It is impossible to replace seals in bore size 10 mm. RZQ 4.02 10% M6 Operating Precautions Warning 2. Grease pack When maintenance requires only grease, use the following part numbers to order.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Model Tightening torque Thread size 10-SY3000 M2 0.8Nm 0.16Nm 10-SY5000 10-SY7000 10-SY9000 M3 M4 M3 1.4Nm 0.8Nm 491

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

70 100 300 500 1000 W Piston speed (mm/s) Graph (1) Moment M1, M3 M2 Allowable Moment (Static moment/Dynamic moment) 100 100 85 96 CY1HT32 CY1HT25 CY1H25 CY1H20 CY1H15 CY1HT32 CY1HT25 CY1H25 64 56 (Nm) 50 40 30 50 40 30 20 28 26 M1 M2 M3 M2 M3 M1 Model Model 20 CY1H20 CY1H15 16 Moment (Nm) Moment (Nm) CY1H10 CY1H25 1.5 2.5 1.5 28 26 28 13 10 10 CY1H15 CY1HT25 10 16 10 56 85 56 2 2.5 3 4

ZP

Weight(g) ZP3B-Y1J -B3 ZP3B-Y1K -B3 ZP3B-Y1J3-B3 ZP3B-Y1J6-B3 ZP3B-Y1K3-B3 ZP3B-Y1K6-B3 ZP3-015U ZP3-02U ZP3-035U 7.6 8.5 10.9 12.1 5 7 Width across flat 6 Width across flat 4 Width across flat 10 Width across flat 8 2 2 D 2 2 D A M6 x 0.75 B B M3 x 0.5 M8 x 0.75 A 10 0.4 4 3 M3 x 0.5 1.5 0.8 3 1.5 0.8 1.5 2 2 1.5 Dimensions (per stroke) Dimensions (per stroke) A 27 34 B 10 14 D A 31 37.5

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

9 4 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 8.5 9.5 10.5 10.5 -0.004 -0.012 0 -0.043 12 5 15.5 0.5 M3 x 0.5 34 25 9 18 1.5 6 10 29 3.5 M3 x 0.5 21 3 29 36 48 11 10 11.5 11 -0.004 -0.012 0 -0.043 14 6 17 0.5 M4 x 0.7 42 34.5 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 D12 13 -0.005 -0.014 0 -0.043 16 8 1 4.5 17.5 M5 x 0.8 50 47.5 13 22 2 8 12 43 5.5 M5

Fluoropolymer Piping Equipment

6 6 LQ1R51-M 19 1/2" 30.5 29 10 10 LQ1R5B-M1/2" 9 LQ1R5C-M3/4" 3/4" 30 39 16 15 LQ1R5D-M1/2" 9 LQ1R5G-M3/4" 1/4" 27.5 33.5 6 6 LQ1R5H-M3/4" 3/8" 29 35 10 10 LQ1R6A-M 1" 3/4" 36 38 6 24 9 18 21 43 28 10 7 29 14 28 26 54 39 10 10 LQ1R52-M 12 9.4 LQ1R53-M 19 3/4" 30 39 16 15 LQ1R54-M 12 9.4 LQ1R58-M 19 1/4" 27.5 33.5 6 6 LQ1R59-M 19 3/8" 29 35 10 10 LQ1R61-M 25 3/4" 36 38 16 16 LQ1R6B-M3/4"