0.4

Example) -DN Caution Manifold (DIN rail mounting) 4(A) 2(B) 4(A) 2(B) VVQ2000-FPG06 Air leakage from the pipe between the valve and cylinder or from the fittings will prevent the cylinder from stopping for long periods of time. Check the leakage using neutral household detergent, such as dish washing soap.

0.4

Example) -DN 4(A) 2(B) 4(A) 2(B) Manifold (DIN rail mounting) Caution VVQ2000-FPG06 Air leakage from the pipe between the valve and cylinder or from the fittings will prevent the cylinder from stopping for long periods of time. Check the leakage using neutral household detergent, such as dish washing soap.

CM2

No. of auto switches mounted 2 Different sides C85 Auto switch model Same side n Different sides 1 Same side C95 D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50 15 50 + 45 (n 2) n 2 2 15 + 45 ( ) (n = 2, 4, 6) CP95 10 60 15 60 + 45 (n 2) NCM NCA n 2 2 15 + 50 ( ) (n = 2, 4, 6) 10 65 15 65 + 50 (n 2) Dn 2 2 D-B5/B6 D-G5NTL 15 + 50 ( ) (n = 2, 4, 6) 75 10 15 -X 75 + 55

The 5 port solenoid valves series SQ was designed for applications which demand high speed, high frequency, long life and a precise response time. The SQ uses cassette style valves and manifolds, making it simple to increase or decrease the number of stations on a DIN rail.? Valves are available?with 12VDC or 24VDC rated voltage.??Actuation options include 5 port single solenoid, 5 port

Fieldbus system EtherCAT compatible SI Unit

LBB1 SEC3 DX#B DY#B DN#E AXA AYA -118No.EX-OMA1023 (5) When unit diagnosis is detected, the diagnostic information is displayed on the "SYSTEM CONFIGURATION" screen. Identifies the unit that detected the diagnosis. (6) When selecting I/O Monitor in the left pane, the I/O MONITOR screen is displayed. Unit tab. ON/OFF information can be monitored for each channel.

IZx-OMX0087

Negative ions are generated by setting "dn". Refer to 4-4-3. Frequency set mode for further details. 4-3. High voltage power supply module CH number setting When multiple high voltage power supply modules are connected to one controller, the CH number must be set for each high voltage power supply module to identify the information and set time.

High Vacuum L Type Valve

150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN

High Vacuum L Type Valve

150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN

High Vacuum L Type Valve

150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN

XLA Series

high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN

XLA- ∗ -F7NJ ∗ - ∗ Series

temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN

XL-OMV0002

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002

XL-OMY0002

48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW) D K (DN

XLDV Series

Atmospheric pressure to 1 x 10-6 Main pumping 14 45 80 160 200 300 800 Conductance l/s Note 1 Initial pumping 0.53 28 2.511 48 418 6.531.5 6.531.5 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW) KF(NW),K(DN

XLF Series

high temperature type) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN

High Vacuum L Type Valve

Operating temperature oC 5 to 50 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN

High Vacuum L Type Valve

Conductance l/s Main pumping 14 45 80 160 200 300 800 Note 1) Initial pumping 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 6.5 to31.5 6.5 to 31.5 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN

XLG Series

to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW) KF(NW),K(DN

Low torque Metal seal type Rotary joint

Printed in Japan. 1st printing June, 2002 D-MITAKA P-80 (DN) This catalog is printed on recycled paper with concern for the global environment.

Size: 6 (60), Valve Type: 1 (Normally Closed), Body Material: C (Brass), Seal Material: N (NBR), Port Size: 10 (Thread; 1), Thread Type: F (G), Rated Voltage: 5 (24 VDC), Electrical Entry: DN (without DIN Connector, w/Surge Voltage Suppressor)