Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMD Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 25, 40, 50, 63, 80 63, 80 40 (070), 63 (114) XYD V V V V V XMD V V V V V Size 25 40 50 63 80 XYD Nil D KF (NW) K (DN) 25, 40, 50, 63, 80 63, 80 3.

High Vacuum Angle Valve

Example) XLAV-16L-2M9NA-1G-XAN1A *1 Produced by Mitsubishi Cable Industries, Ltd. * With solenoid valve: Option specifications/Combinations This model has indicator, auto switch, and K (DN) flange options, but hightemperature/heater options are not available. * Solenoid valves XLAV-16, 25, 40, 50: SYJ319, XLAV-63, 80: SYJ519 Example) SYJ319-1GS, etc.

XM, XY

), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.

This product is obsolete. Please contact us for the latest version.sales@ocaire.com, MFLD, PLUG-IN, SQ1000, VALVE, SS5Q1 MANIFOLD SQ1000, 2M, SS5Q1 NO SIZE RATING, 1.98415 lb

Metal Seal/Rubber Seal Series VQ Body Ported

When both options are specified, indicate as DN.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Cable length) PCA-1557633 PCA-1557646 EX500-AC010-DN (1 m) EX500-AC050-DN (5 m) PCA-1557659 PCA-1557662 PCA-1557675 i o !0 !1 !2 !

EX120/121/122

D-DN This catalog is printed on recycled paper with concern for the global environment.

0.4

Features 4 Fieldbus System Series EX600 RoHS How to Order S EX600 SI Unit Version Protocol Symbol Description PROFIBUS DP DeviceNet CC-Link EtherNet/IP Note 1) Symbol Description When MJ or EN or EC is selected When PR or DN is selected PR DN MJ EN EC Nil A EtherCAT Note 1) Output type Symbol Description PNP (Negative common) NPN (Positive common) 1 2 DX EX600 Digital Input Unit Input type

XMD/XYD Series

),CF KF(NW), K (DN) Flange type XYD KF(NW) KF(NW) KF(NW) KF(NW), K(DN) KF(NW), K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2) Actuation pressure MPa (G) 0.4 to 0.7 Main pumping 46 200 360 660 1350 Air consumption cm3 for 0.5MPa Note 3) Initial pumping 2.5 12 15.5 30 42 Port size M5 Rc 1/8 XMD 0.65 1.5(1.86) 2.2 4.10

XMA/XYA Series

) KF(NW), K(DN) ,CF XYA KF(NW) KF(NW) KF(NW) KF(NW) KF(NW) K(DN) K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Actuation pressure MPa(G) 0.4 to 0.7 Air consumption At 0.5MPa 19 46 200 360 660 1350 cm3 Note 3 Port size M5 Rc 1/8 Weight kg Note 4 XMA 0.33 (0.37) 0.61 1.40 (1.76) 2.00 3.60 (4.96) 6.20 XYA 0.66 1.42 2.4 4.30

1

Note) Since the nuts are embedded in the SUP/EXH block. eEX600 SI unit EX600 wValve plate S 1 PR ZMV2 EX600 With mounting screws (2 pcs. of M4 x 6 and 2 pcs. of M3 x 8) Protocol Version Description When MJ, EN, EC or PN is selected When PR or DN is selected Symbol Description Symbol Nil A PR DN MJ EN EC PN PROFIBUS DP DeviceNet CC-Link EtherNet/IP Note) EtherCAT Note) PROFINET Note) rClamp

5 Port Solenoid Valve Series VQZ1000/2000/3000

Example) -DN VVQ2000-FPG06 Manifold (DIN rail mounting style) 2 (B) 4 (A) 2 (B) 4 (A) Caution Since air leakage from the pipe between the valve and cylinder or the fittings will prevent the cylinder from stopping for a long time. Check for air leakage using neutral household detergent, such as dish washing soap.

XMC/XYC Series

) ,CF KF(NW),K(D N) XYC KF(NW) KF(NW) KF(NW) KF(NW) K(DN) KF(NW) K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Actuation pressure MPa (G) 0.3 to 0.6 0.4 to 0.6 Air consumption cm3 Note 3 At 0.5MPa 38 91 430 280 500 1000 Port size M5 Rc 1/8 XMC 0.36 (0.40) 0.62 1.40(1.76) 2.10 3.80 (5.16) 6.30 Mass kg Note 4 XYC 0.67 1.42

SV

How to Order EX500 G DN 1 Communication protocol Applicable GW unit DN PR AB DeviceNet PROFIBUS-DP Remote I/O (RIO) DeviceNet PROFIBUS-DP Remote I/O (RIO) Nil -X1 Dimensions 148 EX500-GAB1-X1 VOLTAGE 24 VDC/200 mA INPUT/OUTPUT 64/64 IP CODE IP65 SERIAL NO.

VQZ1000/2000/3000

-DN Manifold Drop prevention Stoppage in the middle Caution VVQ2000-FPG 06 2 (B) 4 (A) 2 (B) 4 (A) Since air leakage from the pipe between the valve and cylinder or the fittings will prevent the cylinder from stopping for a long time. Check for air leakage using neutral household detergent, such as dish washing soap.

Series SV

How to Order EX500 G DN 1 Applicable GW unit Communication protocol DeviceNet PROFIBUS-DP Remote I/O (RIO) DN PR AB DeviceNet PROFIBUS-DP Nil Remote I/O (RIO) -X1 Dimensions 148 E x 500-GAB1-X1 VOLTAGE 24VDC/200mA INPUT/OUTPUT 64/64 IP CODE IP65 SERIAL NO.

Series VQ Metal Seal/Rubber Seal Body Ported

How to order manifold VV5Q14 P, R port size 08FS0 DN 00T SY 1. How to Order VQ0 VQ1000 VQ2000 1/4 1/4 5/16 Indicate an option symbol, K, for the manifold No. and be sure to specify the mounting position and number of stations of the single and double wiring by means of a manifold specification form.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

0.4

D-DN This catalog is printed on recycled paper with concern for the global environment.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

When both options are specified, indicate as DN.