XL

Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

High Vacuum Angle Valve, XL Series

Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMD Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 25, 40, 50, 63, 80 63, 80 40 (070), 63 (114) XYD V V V V V XMD V V V V V Size 25 40 50 63 80 XYD Nil D KF (NW) K (DN) 25, 40, 50, 63, 80 63, 80 3.

High Vacuum Angle Valve

Example) XLAV-16L-2M9NA-1G-XAN1A *1 Produced by Mitsubishi Cable Industries, Ltd. * With solenoid valve: Option specifications/Combinations This model has indicator, auto switch, and K (DN) flange options, but hightemperature/heater options are not available. * Solenoid valves XLAV-16, 25, 40, 50: SYJ319, XLAV-63, 80: SYJ519 Example) SYJ319-1GS, etc.

XM, XY

), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.

Metal Seal/Rubber Seal Series VQ Body Ported

When both options are specified, indicate as DN.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Cable length) PCA-1557633 PCA-1557646 EX500-AC010-DN (1 m) EX500-AC050-DN (5 m) PCA-1557659 PCA-1557662 PCA-1557675 i o !0 !1 !2 !

EX120/121/122

D-DN This catalog is printed on recycled paper with concern for the global environment.

0.4

Features 4 Fieldbus System Series EX600 RoHS How to Order S EX600 SI Unit Version Protocol Symbol Description PROFIBUS DP DeviceNet CC-Link EtherNet/IP Note 1) Symbol Description When MJ or EN or EC is selected When PR or DN is selected PR DN MJ EN EC Nil A EtherCAT Note 1) Output type Symbol Description PNP (Negative common) NPN (Positive common) 1 2 DX EX600 Digital Input Unit Input type

XMD/XYD Series

),CF KF(NW), K (DN) Flange type XYD KF(NW) KF(NW) KF(NW) KF(NW), K(DN) KF(NW), K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2) Actuation pressure MPa (G) 0.4 to 0.7 Main pumping 46 200 360 660 1350 Air consumption cm3 for 0.5MPa Note 3) Initial pumping 2.5 12 15.5 30 42 Port size M5 Rc 1/8 XMD 0.65 1.5(1.86) 2.2 4.10

XMA/XYA Series

) KF(NW), K(DN) ,CF XYA KF(NW) KF(NW) KF(NW) KF(NW) KF(NW) K(DN) K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Actuation pressure MPa(G) 0.4 to 0.7 Air consumption At 0.5MPa 19 46 200 360 660 1350 cm3 Note 3 Port size M5 Rc 1/8 Weight kg Note 4 XMA 0.33 (0.37) 0.61 1.40 (1.76) 2.00 3.60 (4.96) 6.20 XYA 0.66 1.42 2.4 4.30

1

Note) Since the nuts are embedded in the SUP/EXH block. eEX600 SI unit EX600 wValve plate S 1 PR ZMV2 EX600 With mounting screws (2 pcs. of M4 x 6 and 2 pcs. of M3 x 8) Protocol Version Description When MJ, EN, EC or PN is selected When PR or DN is selected Symbol Description Symbol Nil A PR DN MJ EN EC PN PROFIBUS DP DeviceNet CC-Link EtherNet/IP Note) EtherCAT Note) PROFINET Note) rClamp

5 Port Solenoid Valve Series VQZ1000/2000/3000

Example) -DN VVQ2000-FPG06 Manifold (DIN rail mounting style) 2 (B) 4 (A) 2 (B) 4 (A) Caution Since air leakage from the pipe between the valve and cylinder or the fittings will prevent the cylinder from stopping for a long time. Check for air leakage using neutral household detergent, such as dish washing soap.

The 5 port solenoid valves series SQ was designed for applications which demand high speed, high frequency, long life and a precise response time. The SQ uses cassette style valves and manifolds, making it simple to increase or decrease the number of stations on a DIN rail. Valves are available with 12VDC or 24VDC rated voltage. Actuation options include 5 port single solenoid, 5 port double

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, MFLD, SQ1000, MITSUBISHI CC, VALVE, SS5Q1 MANIFOLD SQ1000, 2P, SS5Q1 NO SIZE RATING, 1.70595 lb

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, MFLD, SQ1000, MITSUBISHI CC, VALVE, SS5Q1 MANIFOLD SQ1000, 2P, SS5Q1 NO SIZE RATING, 1.70858 lb

Stations: 5 Stations, Style: V (CC-LINK System), Manifold Mount Style: D (DIN Rail Mounting), Option: BN (Back Pressure Check Valves, Name Plate)

Stations: 5 Stations, Style: V (CC-LINK System), Manifold Mount Style: D (DIN Rail Mounting)

Stations: 5 Stations, Style: V (CC-LINK System), Manifold Mount Style: D (DIN Rail Mounting), Option: NS (Name Plate, Silencer)

Stations: 5 Stations, Style: CC-LINK System, Manifold Mount Style: DIN Rail Mounting, Option: Back Pressure Check Valves, Name Plate