3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

fitting ass'y for 6 C8: One-touch fitting ass'y for 8 DIN rail clamp screw 23 P=22 L1 L2 L3 (C6, C8) (C6, C8) 9.5 9.5 (C6, C8) (C6, C8) Mounting hole for 2-M4 9.5 9.5 4.5 Mounting hole for 2-M6 IN IN IN IN 5.5 80 6.5 (40) 69.5 58 80 37.5 39.5 Residual pressure release manual override U side D side Stations (5) 10.5 1 2 3 n 22 7 (59.5) 58 20.5 2-Rc(PT)1/8, 1/4, C6, C8 C6: One-touch fitting

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

How to Order Manifold Assemblies (Example) Example (OMRON Corporation compatible serial unit) Double solenoid (24VDC) SZ3260-5LOZ-C6 (3 sets) Single solenoid (24VDC) SZ3160-5LOZ-C6 (2 sets) Supply/Exhaust block assembly SS5Z3-60SRID-05U-C6 . 1 set (manifold part number) SZ3160-5LOZ-C6. 2 sets (single solenoid part number) SZ3260-5LOZ-C6. 3 sets (double solenoid part number) (U side mounting

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

manifold 10-SS5Z3-60PD2-05U-P 10-SS5Z3-60PD2-05U-P 1 set (Manifold part no.) 10-SZ3160-5LOZ-C6 2 sets (Single solenoid part no.) 10-SZ3260-5LOZ-C6 3 sets (Double solenoid part no.)

SZ3000

How to Order Valve Manifold Assembly Ordering example (OMRON Corporation compatible serial unit) Double solenoid (24 VDC) SZ3260-5LOZ-C6 (3 sets) SS5Z3-60SR1D-05U 1 set (manifold part number) SZ3160-5LOZ-C6 2 sets (Single solenoid part no.) SZ3260-5LOZ-C6 3 sets (Double solenoid part no.)

Table of Contents

type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Side 1/4 1/4 1,3,5 (P,EA,EB) Port 1/8 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/4 Port size 1/4 C6 (One-touch fitting for 6) 4,2 (A,B) Port C10 (One-touch fitting for 10) C8 (One-touch fitting for 8) Manifold base weight W (g) n: Station W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For more than 10 stations (more than 5 stations in case of SS5Y7), supply pressure to

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(The standerd valve has an individual exhaust for the pilot valve.) 2.10-38 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SY VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

VQC

AN400-04 Conditions (With SGP (Stainless steel gas piping)) Direct piping Series CS1 Series MB, CA SGP10A x 1 m AS420-03 AN400-04 VQC4000 Tube x Length Speed controller Silencer 2-2-10 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

VQ7-6/7-8

03 04 Enter only when using for 2 position single or double.

0.4

fitting assembly VQC 1/2 C8: 8 One-touch fitting assembly C6: 6 One-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 23 P = 22 L1 L2 L3 ( 9.5) ( 9.5) 80 39.5 (For C6, C8) (For C6, C8) (For C6, C8) ( 9.5) VQC 4/5 DIN rail clamp screw 2 x M4 mounting hole 4.5 2 x M6 mounting hole VQZ IN IN IN IN 37.5 5.5 SQ (5) 69.5 (40) 6.5 58 10.5 80 Residual pressure release manual override VFS (For C6, C8

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Caution Use the standard (DC) specification when continuously energizing for long periods of time. 518 VQ1000/2000 1021P. 571 to 572 1021-VQ1000: Manifold Options EXH block base assembly Blanking plate assembly VVQ1000-10A-1 SUP block plate VVQ1000-16A Individual SUP spacer VVQ1000-P-1-C6 N7 Individual EXH spacer VVQ1000-R-1-C6 N7 C3, C4 C6, M5 N1, N3 N7 VVQ1000-19AF P L C6 (EXH port) 6 One-touch

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Caution Use the standard (DC) specification when continuously energizing for long periods of time. 518 VQ1000/2000 1021P. 571 to 572 1021-VQ1000: Manifold Options EXH block base assembly Blanking plate assembly VVQ1000-10A-1 SUP block plate VVQ1000-16A Individual SUP spacer VVQ1000-P-1-C6 N7 Individual EXH spacer VVQ1000-R-1-C6 N7 C3, C4 C6, M5 N1, N3 N7 VVQ1000-19AF P L C6 (EXH port) 6 One-touch

0.4

One-touch fitting assembly C6: 6 One-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 ( 9.5) ( 9.5) 80 39.5 (For C6, C8) (For C6, C8) 23 P = 22 L1 L2 L3 (For C6, C8) ( 9.5) DIN rail clamp screw 4.5 2 x M4 mounting hole 2 x M6 mounting hole IN IN IN IN 5.5 (5) 69.5 (40) 6.5 58 10.5 80 37.5 Residual pressure release manual override (For C6, C8) 22 20.5 7 Stations 1 2 3 n U side D side ( 9.5)

Table of Contents

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(One-touch fitting for 6) P, R port M5 x 0.8, Port size C4 (One-touch fitting for 4) C4 (One-touch fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4

SYJ series valves can be configured on base mounted manifolds, or individually on sub-plates, creating a variety of solutions to meet your broadest engineering needs., SS3YJ5 manifold, 3 PORT SOLENOID VALVE

Vacuum

Wl] Flcl /8 C4: Wlth 04 One-louch fitling, C6: With s6 One-tolrch lining, M5: 1,15 remale threads Nole 1) Eauipped with unit switchirg {u.rction (Types wirho{i the unit swirching lunction use Sl unils (kPa or MPa) only ) Noie 2) For zSE4o (F)/lSFaoS-g Note 3) For ZSE4o (F)/lSE4o-tr* Note 4) For ZSE4OF (compound pressure) with "psi" indication, this rs 0 03 to 0 04 psi Note 5) For ZSE4OF {

Vacuum

Wl] Flcl /8 C4: Wlth 04 One-louch fitling, C6: With s6 One-tolrch lining, M5: 1,15 remale threads Nole 1) Eauipped with unit switchirg {u.rction (Types wirho{i the unit swirching lunction use Sl unils (kPa or MPa) only ) Noie 2) For zSE4o (F)/lSFaoS-g Note 3) For ZSE4o (F)/lSE4o-tr* Note 4) For ZSE4OF (compound pressure) with "psi" indication, this rs 0 03 to 0 04 psi Note 5) For ZSE4OF {

VQ7-6/7-8

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel