mounting screw M5 x 0.8 x 16 l 1.
-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.
Symbol Specifications -X12 Lubricant: Vaseline -X21 Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X214 Restrictor (Without check valve) 10Clean Series 555 A AS Series Needle Valve/Flow Rate Characteristics AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS2201F-02, AS2211F-02 AS2301F-02, AS2311F-02 600 300 Inlet pressure
2-3/8 Ports R1, R2 (Port A) 17.5 13.5 (Port B) Indicator light SMC 2 4 T 5 1 3 16 16 13 A 40 53 66 53 66 B A VQ5000 2 4 14 5 1 3 12 Manual override 2-6.5 Mounting hole 17.5 13.5 35 53 35 53 3-1/2 Ports P, A, B Bottom ports 16 M5 ground screw SMC (Ports A, B) 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 0 1 G H 2 position
COM. 41 Red Red COM.
Fittings & Tubing Air Cylinders Rotary Actuators 14.5 13.3 13.5 54.1 43.3 35 5.8 19 19 2 x 3.2 M5 x 0.8 (External pilot port) 17 17 (For mounting) 3 A B 22 SMC A B B A PE X EB EA P Manual override 41 2.8 A side: Orange B side: Green (Light/surge voltage suppressor) M5 x 0.8 (Pilot EXH port)
-02-04 (S) 4 8.2 AS221FSG-02-06 (S) 6 10.4 23.4 32.7 (32.8) AS221FSG-02-08 (S) 8 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FSG-02-10 (S) 10 15.9 26.9 36.2 (36.3) 15.6 25 (26) AS321FSG-02-06 (S) 6 1/4 17 (17.5) 13 13.3 10.4 21.8 32.1 36.4 63.1 61.7 57.9 56.5 24.5 28.5 9.3 19.2 47 (48) AS321FSG-02-08 (S) 8 13.2 22.7 33 14.2 AS321FSG-02-10 (S) 10 15.9 26.7 37 35.7 15.6 48 (49) AS321FSG-02-12 (
(mm) Pad type Material Series ZPT Without buffer ZPT U N 02 A5 Vacuum entry/Mounting thread diameter Pad diameter (mm) 2 to 8 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) Connection ZX Symbol 2004 2 x 4 Thread diameter 10 to 16 20 to 32 40, 50 3507 3.5 x 7 ZR 4010 4 x 10 02 04 2 A5 A6 A8 M4 x 0.7 B4 M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 Rc B01 M5 x 0.8 M6 x 1 M8 x 1 Male thread Female
: External pilot port Approx. 9 Approx. 9 D side U side Stations 1 2 3 4 5 6 7 8 n Lead wire length: L0/Approx. 600mm L1/Approx. 1500mm L2/Approx. 3000mm C8: SUP port C8: EXH port For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 44 29.5 2n-C3, C4, C6, M5 (A, B port) C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5
L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-MDIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR251001 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage
Drain Discharge Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 115 Drain Drain (Maintenance space 100 mm or more) M5 x 0.8 5.5 M5 x 0.8 IDG10V/20V IDG10HV/20HV Port size 1/4, 3/8 70 A 41 59 C Purge air for dew point indicator 14 22 IN OUT 35 10 129 11 (B) Purge air
port External pilot specifications (1) NM N1 N3 N7 N9 N11 M5 01 02 Symbol Mixed M5 threads 1/8 thread 1/4 thread 1/8" 5/32" 1/4" 5/16" 3/8" Applicable tubing O.D.
-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions
N02 NPT 1/4 NPT 3/8 Note 2) N03 N04 NPT 3/8 NPT 1/2 NPT 3/8 NPT 1/2 Note 1) AS220-02 Note 2) AS320-02 749 AS20-D Series Construction AS3200-02-D Meter-out M5 type U10/32 type Meter-in M5 type U10/32 type AS3210-02-D Component Parts No.
2-3/8 Ports R1, R2 (Port A) 17.5 13.5 (Port B) Indicator light SMC 2 4 T 5 1 3 16 16 13 A 40 53 66 53 66 B A VQ5000 2 4 14 5 1 3 12 Manual override 2-6.5 Mounting hole 17.5 13.5 35 53 35 53 3-1/2 Ports P, A, B Bottom ports 16 M5 ground screw SMC (Ports A, B) 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 0 1 G H 2 position
30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 17 (18) AS22l1FG-02-04(S)A 4 8.2 AS22l1FG-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS22l1FG-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 18 (19) AS22l1FG-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 19 (20) AS32l1FG-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS32l1FG-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-10(S)A 10 15.9 26.7 37 35.7 15.6 42 (42) AS32l1FG-02
3 8 1 2 VV3P3 VV3P5 VV3P7 Base type 42 41 Individual exhaust Common exhaust VV3P3-41-051-02 Symbol Supply port is common.
Note Symbol 1P Common Common 3R Common Individual 1 Type 41 Type 42 VHS 3 VV3PA3-42-053-02 Stations 02 2 stations ... ... 20 20 stations To order valves and blank plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.
NT-02 NT-03 NT-04 26 30 25.5 M20 x 1.5 8 13 15.0 12.5 M8 x 1.25 5 32 37 31.5 M26 x 1.5 8 17 19.6 16.5 6 M10 x 1.25 41 47.3 40.5 M32 x 2.0 10 22 25.4 21.0 8 M14 x 1.5 Trunnion Nut Material: Carbon steel (mm) C D d H B Applicable bore size (mm) 20 25, 32 40 Part no.