Air Slide Table Series MXS

35 70 70 76 80 I 12 12 12 12 12 33 50 67 82 J 47 47 47 57 70 90 114 155 180 K 35 45 55 65 75 100 125 150 175 KA 162 218 258 NA 2 2 2 2 2 2 4 4 4 M 92 92 92 102 115 156 197 255 295 Z 90.5 ZZ 108 108 108 118 131 172 213 271 311 FF 40 40 40 50 35 60 70 75 80 Model MXS25-10 MXS25-20 MXS25-30 MXS25-40 MXS25-50 MXS25-75 MXS25-100 MXS25-125 MXS25-150 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5

Best Pneumatics Vol. 14

70 G 27 40 54 54 66 66 D 25 40 53 70 70 90 95 A B 77 115 142 176 176 250 268 E 47 47 H 22 23 26 25 35 35 C 26 36 38 40 38 41 45 J 5.4 6.5 8.5 8.5 11 11 K 8.4 8 10.5 10.5 13 13 L 40 53 70 70 90 90 M 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specifications Metal bowl B 82 121 142 176

Battery-less

E LEYG16M E 1 LEYG16M E 1 LEYG16M E LEYG16M E 0.1 0.1 10 100 1000 70 75 10 100 1000 70 75 Stroke [mm] Stroke [mm] Set the speed to less than or equal to the values shown below.

CL

Bore e f 1 to 50 68 72 72 77 51 to 100 81 85 85 90 101 to 150 93 97 97 102 151 to 200 106 110 110 115 201 to 300 131 135 135 140 301 to 400 156 160 160 165 401 to 500 185 185 190 51 to 100 25 25 25 25 101 to 150 37.5 37.5 37.5 37.5 151 to 200 50 50 50 50 201 to 300 75 75 75 75 301 to 400 100 100 100 100 401 to 500 125 125 125 1 to 50 12.5 12.5 12.5 12.5 20 25 32 40 68 72 72 77 35 35 35

Combination Cylinder

BC 38 45 45 52 BN 80 90 90 BP 1/8 1/8 1/8 1/8 BQ 1/8 1/8 1/8 1/8 BZ C1 30 37 37 47.3 D 8 10 12 14 E F 13 13 13 16 FZ 75 75 75 82 GA GB 8 8 8 11 GC 8 9 9 8 GD 55 GK 3.5 4 4 4 20 25 32 40 0 to 400 to 450 to 450 to 500 0 26 20 57.5 69 69 76 73.5 0.033 83.5 64.5 0.033 0 0.033 0 0.033 26 83.5 64.5 70 100.5 90.5 32 Boss cut (mm) ZZ 181 195 197 233 Bore 20 25 32 40 GL 6 9 9 11 GQ 4 7 7 8 GR 4 7

CA2

side 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides With 2 Same side 35 + 30(n2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 90 + 50(n 2) n = 2, 4, 6, 8 55 + 50(n 2) n = 2, 3, 4 75 + 50(n 2) n = 2, 4, 6, 8 80 + 50(n 2) n = 2, 4, 6, 8 Different sides With n D-A44 Same side 10 20 100 75 80 90 75 80 90 100 100 100 1 Different sides

Modular F.R.L. Unit

70 S 15.4 8 10.5 10.5 Q 5.4 6.5 8.5 8.5 P 44 46 54 56 N 34 40 54 54 M 30 41 50 50 K 5 3.5 1.5 1.2 J 27 30.5 38.5 38.5 H 63 70 76 76 E 40 57 73 73 D 52 59 75 75 C 73 86 92 93 B 160 201 239 242 A 40 53 70 75 G 80 80 105 105 1/8, 1/4 1/4, 3/8 AW20K AW30K AW40K AW40K-06 1/4, 3/8, 1/2 3/4 Optional specifications With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model Port

MXS

4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 ZZ 108 108 108 118 131 172 213 271 311 F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 M 92 92 92 102 115 156 197 255 295 MXS25-10 MXS25-20 MXS25-30 MXS25-40 MXS25-50 MXS25-75 MXS25-100 MXS25-125 MXS25-150 90.5 90.5 90.5 SMXS25A, #5(#1+#5) SMXS25A, #6(#2+#6) SMXS25A, #7(#3+#7) SMXS25A, #8(#4+#8+#9) SMXS25B

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

[mm] 100 1000 70 10 75 LEY u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s LES 10 10 Load mass m [kg] Load mass m [kg] LEYG32M LEYG32M LEPY LEPS LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LER LEYG25M LEYG25M LEH 0.1 0.1 LEY -X5 Stroke [mm] 100 1000 70 10 75 Stroke [mm] 100 1000 70 10 75 11LEFS Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max. speed = 200

Dual Rod Cylinder Series CXSJ/CXS

, 75 90, 100 80 25 20 15 100 10 30 35 40 45 50 60 70 75 80 90 40 35 30 25 20 15 100 10 45 50 60 70 75 80 90 Model CXS10 CXS15 CXSJ 30 40 50 97 92 87 82 102 107 112 117 122 132 142 147 95 90 85 80 75 70 65 100 105 115 125 130 55 45 25 35 45 99 94 89 109 114 119 124 129 139 149 154 104 159 169 179 95 90 85 80 75 70 105 110 120 130 135 100 140 150 160 CXS D-X Individual -X 567 Series CXS

CQS

CQ2 Mounting Bolt for CDQSK MU Mounting bolt Mounting bolt C' D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 Model C D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 Special long bolt for through hole mounting is available as an option. How to Order: Specify the required bolts.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Same surface) 60 65 75 80 85 90 10 With 1 pc. With 2 pcs. (Different surfaces) 70 75 80 85 90 35 With 2 pcs. (Same surface) 70 75 80 85 90 55 D-A44 70 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 90 + 30 (n 2) n = 2, 4, 6, 8 35 + 30 (n 2) n = 2, 3, 4 With n pcs. (Different surfaces) With n pcs.

MXS Series Air Slide Table

Model F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 KA NA 2 2 2 2 2 2 4 4 4 M 92 92 92 102 115 156 197 255 295 HA 45 45 45 55 35 70 70 76 80 ZZ 108 108 108 118 131 172 213 271 311 N 4 4 4 4 6 6 6 8 8 G 22 22 22 22 20 26 32 40 30 H 45 45 45 55 35 35 35 38 40 NN 2 2 2 2 3 4 5 6 7 I 12 12 12 12 12 33 50 67 82 J 47 47 47 57 70 90 114 155 180 K 35

Table of Contents

Thin Flat/Thin Flat with Ribs Deep A B Y Model Model A B C D E F Y G H G H I: M5 x 0.8 I: M6 x 1 ZPR10UT 10 11 1 ZPR10D 10 16 12 18 16 25 33.9 50 71 76 7 15 24 32.9 49 20 25 70 75 6 ZPR16D ZPR13UT 13 14 1.5 ZPR16UT 16 17 Applicable Tubing ZPR10CT 10 11 0.8 Applicable tubing O.D.

CXS

, 75 90, 100 25 20 15 100 80 10 30 35 40 45 50 60 70 75 80 90 100 10 15 20 25 30 35 40 45 50 60 70 75 80 90 Model 30 40 50 100 105 115 125 130 65 70 75 80 85 90 95 CXS10 97 92 87 82 102 107 112 117 122 132 142 147 99 94 179 89 109 114 119 124 129 139 149 154 159 169 104 25 35 45 CXS15 55 45 100 105 110 120 130 135 140 150 160 70 75 80 85 90 95 16 Standard Type Dual-Rod Cylinder Series

1

55 65 80 65 75 90 25 11 61 10 51 10 11 56 61 71 66 71 81 61 71 86 71 81 96 32 13 12 65 55 12 13 60 65 75 70 75 85 65 75 90 75 85 100 Dimensions except mentioned above are the same as standard type. 6-17-90 72 Made to Order Common Specifications: -XC35: With Coil Scraper Symbol -XC35 34 With Coil Scraper It gets rid of frost, ice, weld spatter, cutting chips adhered to the piston rod, and

High Vacuum Angle Valve

181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

Compact Cylinder Series CQS

D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 C C' Cylinder model Mounting bolt size Mounting bolt size CQ2 CDQSKB12-5D -10D -15D -20D -25D -30D M3 x 30L x 35L x 40L x 45L x 50L x 55L M3 x 30L x 35L x 40L x 45L x 50L x 55L M5 x 35L x 40L x

Table of Contents

T-slot A dimension T-slot B dimension 6.5 T-slot B 27.5 4H9 Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model LXSH2BD-50 LXSH2BD-75 LXSH2BD-100 LXSH2BD-125 LXSH2BD-150 Refer to page 301 for mounting.

Cylinder with Lock

16)*2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 75 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 2 (Different surfaces, same surface) 1 70 75 80 85 90 D-A9m n 70 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 75 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 85 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 90 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 2 (Different surfaces, same surface) 1 45 50 55 60 70 D-A9mV