Environment

40 Work load [kg] Work load [kg] LEJS40B LEJS63B 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] The value of 50% or less is the same as duty ratio 50% Duty ratio: 50% 15000 15000 Duty ratio: 25% 10 10 Duty ratio: 50% 5000 5000 Duty ratio: 100% Duty ratio: 100% Duty ratio: 75% Duty ratio: 75% 0 0 0 10 20 30 40 50 60 70 80 0 10 20 30 40 50 Work load [kg] Work load

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 NA 2 2 2 2 2 2 4 4 4 G 22 22 22 22 20 26 32 40 30 KA 162 218 258 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 13-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25-30 13-/22-MXS25

SMC

100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 NA 2 2 2 2 2 2 4 4 4 G 22 22 22 22 20 26 32 40 30 KA 162 218 258 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 FF 40 40 40 50 35 60 70 75 80 F 50 50 50 60 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 13-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25-30 13-/22-MXS25

CQS

Model C D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 C' D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 Mounting bolt Mounting bolt CDQSKB12-5D -10D -15D -20D -25D -30D CDQSKB16-5D -10D -15D -20D -25D -30D CDQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQSKB25-5D -10D -15D -20D

CL

3.5 Up to 400 18 57.5 55 8 20 25 90 45 4 32 60 17 13 40 10 7 19.5 37 75 4 Up to 450 22 69 83.5 9 64.5 8 26 32 26 90 45 4 32 60 17 13 40 12 7 19.5 37 75 4 Up to 450 22 69 83.5 9 64.5 8 40 32 36 52 5 41 66 22 16 52 14 7 21 47.3 82 4 Up to 500 24 76 90.5 8 70 100.5 11 Boss-cut Bore (mm) PH GL H2 H1 K I NA N S PW ZZ Z PG P NN MM ZZ PL H GR GQ Bore (mm) 20 168 1/8 1/8 1/8 1/4 20 24 15 20 22

2 Phase Stepper Motor/Without Motor Brake Series LXS

85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5BD-50B LXSH5BD-75B LXSH5BD-100B LXSH5BD-125B LXSH5BD-150B Refer to page 301 for mounting.

ISO Cylinder

Single foot: Cl85WEl lL (With mounting bracket) (W) LT NH LT (XS) 2 x AB Double foot: Cl85WEl lM (With mounting bracket) (W) LT UR 4 x AB NH LT (XL + Stroke) LS + Stroke AV US TR AO [mm] Bore size AB AO AV LS LT NH TRJS14 UR US (W) (XL) (XS) 8 4.5 5 11 70 {76} 3.2 16 25 26 35 12.8 75 {81} 23.8 10 4.5 5 11 70 (75) 3.2 16 25 26 35 12.8 75 (80) 23.8 12 5.5 6 14 80 (82) 4 20 32 33 42 18 88 (

Air Cylinder Series CS1

40 145 145 115 190 100 230 110 238 133 261 M14 x 1.5 Up to 1400 M30 x 1.5 Lube Non-lube Air-hydro 50 47 36 90 59 43 14 19 20 16 15 31 24 98 35 82 75 40 160 161 128 212 112 255 110 232 133 255 M14 x 1.5 Up to 1400 M30 x 1.5 0.2 x Stroke 56 53 40 90 59 43 14 19 20 17 36 26 39 82 75 40 180 182 144 236 118 275 106 120 252 141 273 M16 x 1.5 Up to 1400 18.5 M36 x 1.5 63 60 45 70 48 17 24 25 20

Cylinder with Lock

75 80 85 2 (Different surfaces) 70 75 80 85 2 (Same surface) n (Different surfaces) 70 + 30 (n 2) (n = 2, 4, 6, 8)1 75 + 30 (n 2) (n = 2, 4, 6, 8)1 80 + 30 (n 2) (n = 2, 4, 6, 8)1 85 + 30 (n 2) (n = 2, 4, 6, 8)1 D-A44 n (Same surface) 70 + 50 (n 2) (n = 2, 4, 6, 8)1 75 + 50 (n 2) (n = 2, 4, 6, 8)1 80 + 50 (n 2) (n = 2, 4, 6, 8)1 85 + 50 (n 2) (n = 2, 4, 6, 8)1 1 70 75 80 85 D-F5/J59

Electric Slide Tables

F F A Servo Motor (24 VDC)/Step Motor (Servo/24 VDC) LES LESH LECA6 LECP6 LEC-G LECP1 LECPA Lr Lr: Distance between the center of the table and the work load center of gravity LESH8 LESH8 LESH8 Lr = 70 mm 0.03 0.10 0.20 Table displacement [mm] Table displacement [mm] Table displacement [mm] LESH8-75 LESH8-75 LESH8-50 0.08 0.15 0.02 0.06 0.10 LESH8-50 0.04 LESH8-75 0.01 0.05 LESH8-50 0.02

Air Cylinder

, 16) 2 (Different surfaces and same surface) 1 65 70 75 10 60 D-M970 + 30 (n 4) 75 + 30 (n 4) 10 + 30 2 2 2 2 2 n (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 2 (Different surfaces and same surface) 1 D-A5

Aluminum High Vacuum Angle Valve

3310-75 UA4640 Compound No.

C95

sides) 35 + 30 (n 2) 35 + 30 (n 2) 60 + 30 (n 2) 65 + 30 (n 2) 65 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 85 + 30 (n 2) n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 1 10 10 70 75 75 80 80 85 2 (Same side) 55 55 70 75 75 80 80 85 2 (Different sides) 35 35 70 75 75 80 80 85 A44 55 + 50 (n 2) 55 +

5 Port Solenoid Valve Series SY3000/5000/7000/9000

L Dimension 66 923 67 935.5 68 948 69 960.5 70 973 71 985.5 No.

C95

sides) 35 + 30 (n 2) 35 + 30 (n 2) 60 + 30 (n 2) 65 + 30 (n 2) 65 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 85 + 30 (n 2) n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 1 10 10 70 75 75 80 80 85 2 (Same side) 55 55 70 75 75 80 80 85 2 (Different sides) 35 35 70 75 75 80 80 85 A44 55 + 50 (n 2) 55 +

Free Mount Cylinder

65 80 65 55 75 65 60 65 55 50 55 45 9 8 25 96 81 71 86 71 61 81 71 66 71 61 56 61 51 11 10 32 100 85 75 90 75 65 85 75 70 75 65 60 65 55 13 12 The dimensions other than the table above are the same as those of standard type. 44 46 Related Products For details, refer to the respective catalog. 1011-CDU Clean Series Compliant with clean environment Specifications 10-CDU (Relief type) 11-CDU

CL

size (mm) LS LT LX LY MM N S W X YA P YB H ZZ e f h ZZ 13 13 16 16 17 20 30 25 l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/5 stroke 1/5 stroke 1/5 stroke 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 40 50 63 80 100 125 140 160 244 36 45 45 60 60 75 75 75 252 207 3.2 3.2 3.2 4.5 6.0 8 9 9 70 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M30 x 1.5 M36 x 1.5 16.5 16.0 16.0 18.0

JIS Standard Hydraulic Cylinder

x 1.5 C B-series M6 x 1.0 M8 x 1.25 40 145 115 75 60 E 31.5 30 20 24 M30 x 1.5 dH10 L L M6 x 1.0 M8 x 1.25 40 145 115 75 60 31.5 30 20 24 M39 x 1.5 M8 x 1.25 M10 x 1.5 50 185 145 95 80 40 40 25 26 M48 x 1.5 H +0.4 +0.1 D M5 x 0.8 M6 x 1.0 25 76 60 41 32 16 16 12.5 20 M16 x 1.5 M5 x 0.8 M6 x 1.0 31.5 90 70 50 40 20 20 16 20 M20 x 1.5 B J M6 x 1.0 M8 x 1.25 40 145 115 75 60 31.5 30 20 24 C-series

2–4

-30 -35 -40 -45 -50 -75 -100 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 30 35 40 45 50 55 60 65 70 75 30 35 40 45 50 55 60 65 70 75 110 135 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 115 x 140 M6 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 120 x 145 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65

CQM

-30 -35 -40 -45 -50 -75 -100 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 30 35 40 45 50 55 60 65 70 75 30 35 40 45 50 55 60 65 70 75 110 135 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 115 x 140 M6 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 120 x 145 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65