Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

8 @4 CS type snap ring Parallel pin Parallel key Seal washer Plug O-ring Steel balls Shock absorber @5 Size: 10 to 50 Size: 70 to 200 Carbon steel @6 NBR Brass NBR Stainless steel @7 @8 @9 #0 #1 Size: 70 to 200 only Size: 70 to 200 only Replacement Parts Description Kit no. Note 10 P523020-5 30 A set of above numbers r, !2, !3, !7, !

C95

200 70 90 90 110 70 90 90 110 Max. 26 90 115 135 165 Max. 25 8 9 12 14.5 270 320 345 380 250 300 320 350 90 115 135 165 16 18 22 26 Max. 50 145 170 185 205 25 32 32 40 25 32 32 40 160 200 250 320 Max. 160 180 230 270 330 Max. 224 Max. 157 199 242 257 289 125 160 200 250 Max. 209 Min. 35 Max. 31 Max. 25 Max. 50 Max. 220 Max. 280 Max. 195 Max. 209 Min. 35 Max. 31 Max. 35 Max. 50 Max. 260 Max

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

, 300 10 -X 100, 200, 300, 400, 500 750 15 1 axis 100, 200, 300, 400, 500, 600 1000 20 20100, 200, 300, 400, 500, 600, 800 25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 Data 2 axes 1500 32 Note) Please contact SMC if it is used by exceeding the maximum stroke length.

REA/REB

0 to 1.8mm Piping type Centralized piping Rc 1/8 M5 x 0.8 Piping port size Standard Strokes Number of axes Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 150, 200, 300 500 10 150, 200, 300, 400, 500 750 15 1 axis 200, 300, 400, 500, 600 1000 20 200, 300, 400, 500, 600, 800 25 1200 25 2 axes 200, 300, 400, 500, 600, 800, 1000 1500 32 Note 1) Strokes exceeding the standard

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

32A 173.6 67.5 42 160 21 51.5 135 12 100 36 80 40A 179.3 70 42 170 21 54.5 140 14 105 42 90 50A 192.3 77.5 42 180 21 59 155 14 120 52 Specific Product Precautions Size Applicable flange Grommet Grommet with PCB Conduit DIN terminal DIN terminal without connector M12 connector T U T U T U T U V T U T U 70 32A 68.4 31.1 74.1 41 75.7 51.9 77.2 58.3 70 77.2 34.3 76 44.1 80 40A 71.6 31.1 77.3

smcmaintenancepartslist

Fiber Paper Micromesh Specifications Model 4 65 to 70 x L250 FGETB FGETC FGETA FGESA Note 1) FGESB Note 1) FGESC Note 1) FGELA Note 1) FGELB Note 1) FGELC Note 1) Number of elements 8 65 x L250 12 65 x L250 4 Note 2) 8 4 Note 2) 12 4 65 to 70 x L250 4 Note 2) 8 4 Note 2) 12 4 65 x L250 4 Note 2) 4 Note 2) 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to

Compact Cylinder Series CQS

D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 C C' Cylinder model Mounting bolt size Mounting bolt size CQ2 CDQSKB12-5D -10D -15D -20D -25D -30D M3 x 30L x 35L x 40L x 45L x 50L x 55L M3 x 30L x 35L x 40L x 45L x 50L x 55L M5 x 35L x 40L x

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

200 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 150 150 0.2 MPa 0.2 MPa 100 100 0.1 MPa 0.1 MPa 50 50 0 0 10 10 50 50 20 20 30 30 40 40 60 60 70 70 Gripping point L (mm) Gripping point L (mm) MHS3-63D MHS3-63D 500 500 Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) 400 400 Gripping force (N) 0.5 MPa 0.5 MPa 300 300 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 200 200 0.2 MPa 0.2 MPa 100 100 0.1 MPa 0.1 MPa

REA/REB

70 192 Mounting Nuts: 2 pcs.

REA/REB

, 250, 300, 350, 400, 450, 500, 600, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 Made to Order Specifications (For details, refer to page 10-21-1.)

MB

, 250, 300, 350, 400, 450, 500 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400

Thermo-con/Rack Mount Type

400 400 Ambient temperature 35C 200 200 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] HECR006-A Circulating fluid: Tap water Circulating fluid: Ethylene glycol 20% 1800 1800 1600 1600 Ambient temperature 15C 1400 1400 Cooling capacity [W] Cooling capacity [W] 1200 1200 Ambient temperature 25C Ambient temperature 25C

Aluminum High Vacuum Angle Valve

M12, L = 70 Refer to part no.

CV/MVGQ

C J G5-S Standard Stroke CV Bore size (mm) Standard stroke (mm) Symbol Specifications 40 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500 -XA Change of rod end shape MVGQ 50, 63 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper 80, 100 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700 Piston rod and rod end nut

CV/MVGQ

C J G5-S Standard Stroke CV Bore size (mm) Standard stroke (mm) Symbol Specifications 40 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500 -XA Change of rod end shape MVGQ 50, 63 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper 80, 100 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700 Piston rod and rod end nut

CS1

CS160-1618-G5 SDR-70 P7 G90 NLP-300A PNY-70 Air-hydro Bore (mm) Kit No.

LX

200/230VAC Note) Refer to pages starting with 205 for driver dimensions.

LX

Positioning Time Guide (for Horizontal Mount) For transfer load of 3kg For transfer load of 0kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 200 50 10 1 200 100 50 10 1 50 50 2.1 4.1 1.1 0.3 0.1 4.2 2.1 1.1 0.3 0.1 Speed (mm/s) Speed (mm/s) 100 100 1.1 2.1 0.6 0.2 0.1 2.1 1.1 0.6 0.2 0.1 200 200 0.6 1.1 0.3 0.1 0.1 1.1 0.6 0.3 0.1 0.1

Electric Slide Tables

LES25/Step Motor 200 180 160 140 120 100 80 60 40 20 0 70 50 30 Lead 8: LES25K Force (N) Lead 16: LES25J Set value of pushing force [%] Step 2 Check the set value of pushing force.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

Without shims 700.05 With shims 70 Without shims 700.05 With shims 70 Without shims 400.05 With shims 40 Without shims 400.05 With shims 40 Without shims 400.05 With shims 40 Without shims 400.05 With shims 40 Without shims 700.05 With shims 70 Without shims 700.05 With shims 70 Without shims 700.05 With shims 70 Without shims 700.05 With shims 70 12.5 12.7 12.8 12.9 13.0 14.5 14.7 14.8