10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Bore size 10 16 10 mm 16 mm CJ2 Intermediate strokes are available by the 1 mm interval with no stroke adjustment by spacer.
Operations when "10" is set to the auxiliary function of point table No. 4 Acceleration Deceleration Point Position data Servo motor Dwell time Auxiliary time constant time constant function M code table No. [10STM m] speed [r/min] [ms] [ms] [ms] 1 4.00 1500.00 200 100 150 1 01 2 5.00 3000.00 100 150 100 3 05 3 10.00 2000.00 150 200 200 1 10 4 5.00 1000.00 300 100 150 10 15 Operation sequence
C4 C6 Stations n L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 123 112.5 91.5 15.5 135.5 125 102 16.5 148 137.5 112.5 17.5 148 137.5 123 12.5 160.5 150 133.5 13.5 173 162.5 144 14.5 185.5 175 154.5 15.5 198 187.5 165 16.5 210.5 200 175.5 17.5 SS5Y3-45FUStations B-Q C4 C6 Stations n L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 135.5 125 108 13.5 148 137.5 118.5 14.5 160.5 150 129 15.5 173 162.5 139.5 16.5 185.5 175 150
Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate
C4 C6 Stations n L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 123 112.5 91.5 15.5 160.5 150 133.5 13.5 173 162.5 144 14.5 185.5 175 154.5 15.5 198 187.5 165 16.5 210.5 200 175.5 17.5 148 137.5 123 12.5 148 137.5 112.5 17.5 135.5 125 102 16.5 SS5Y3-45FUStations B-C4 C6 Stations n L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 135.5 125 108 13.5 148 137.5 118.5 14.5 160.5 150 129 15.5 173 162.5 139.5 16.5 185.5 175 150
0.25 20 to 400 8 6 2 10 to 200 5 Step motor (Servo/24 VDC) Series LECP1 50, 100 4 1 20 to 400 10 9 4 10 to 150 8 50, 100 150 Series LECPA LESH25 6 2 20 to 400 16 Page 25 2 0.5 10 to 200 4 Symmetrical type/ L type LESH8A 50, 75 1 0.25 20 to 400 8 5 2 10 to 200 5 Servo motor (24 VDC) Series LECA6 LESH16A 50, 100 2.5 1 20 to 400 10 6 2.5 10 to 150 8 50, 100 150 R L LESH25 A 4 1.5 20 to 400
MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q CV 16 20 25 25, 50, 75, 100, 125, 150, 175, 200, 250 71 58 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8 4.3 8 4.5 M5 x 0.8 40 10 19 16 78 1.5 62 10 10 6 36 10.5 8.5 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.6 9.5 5.5 1/8 37.5 10.5 25 18 25, 50, 75, 100, 125, 150
Model Order no. d: Thread nominal size d: Thread nominal size H H B C B C JA6-3-050 JA10-4-070 JA15-5-080 JA15-6-100 JA20-8-100 JA20-8-125 JA32-10-100 JA30-10-125 JA25-10-150 JA40-12-125 JA40-12-150 JA40-12-175 JA40-14-150 JA50-16-150 JAH40-16-150 JA63-16-200 JA63-18-150 JAH50-20-150 JA80-20-250 JA80-22-150 JAH63-24-150 JAH63-24-200 JA100-24-300 JA100-26-150 JA100-27-150 JA125-27-200 JA140
Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 10kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 150 100 50 10 1 150 100 50 10 1 10 10 15.1 10.1 5.1 1.1 0.2 15.1 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 20 7.6 5.1 2.6 0.6 0.1 7.6 5.1 2.6 0.6 0.1 30 30 5.1 3.4 1.7 0.4 0.1 5.1 3.4 1.7 0.4
6-100 8-125 10-125 14-150 18-150 22-150 26-150 30-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.
6-100 8-125 10-125 14-150 18-150 22-150 26-150 30-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.
Special cap bolt Double Clevis CD hole H10 axis d9 [mm] Stroke range (mm) A CL CD CT size 10 to 100 160.5 150.5 25 10 5 101 to 200 185.5 175.5 CU RR CW L CL + Stroke A + Stroke +0.4 +0.2 CX 10 to 100 180.5 170.5 32 10 6 0.1 0.3 CZ 101 to 200 210.5 200.5 Stroke range (mm) CW CX CZ L RR CU size 10 to 100 25 14 20 18 36 14.5 10 101 to 200 10 to 100 32 14 22 18 36 18.5 10 101 to 200 Material:
Bore Bore B C d H 10 16 NTJ-015A 10 16 7 8 8.1 9.2 M4 X 0.7 M5 X 0.8 3.2 4 NTJ-010A Dimensions by stroke (mm) Symbol S Z ZZ Stroke Bore 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 10 16 48.5 56 68 80 84.5 92
Option J: With drain guide Bracket (Option) 1/4B female thread T: With element service indicator Maintenance space HA Drain AT ID AMG AFF Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5
1 pc. 5 *1 5 2 pcs. 10 *1 10 D-A9V 1 pc. 5 2 pcs. 10 D-Z7 D-Z80 1 pc. 5 *1 5 2 pcs. 10 D-Y59 D-Y7P 1 pc. 5 *1 5 2 pcs. 10 D-Y69 D-Y7PV 1 pc. 5 2 pcs. 5 D-Y7W D-Y7WV 1 pc. 5 *2 2 pcs. 10 *2 D-Y7BA 1 pc. 5 *2 2 pcs. 10 *2 D-P3DWA 1 pc. 15 2 pcs. 15 D-P4DW 1 pc. 5 *2, 3 2 pcs.
63 MGPA -400 50 63 0.6 Plate displacement mm Plate displacement mm 0.3 50 63 MGPA -300 50 63 MGPA -300 0.5 MGPA16-150 MGPA16-150 MGPA16-100 0.25 MGPA16-100 0.4 50 63 MGPA -200 50 63 MGPA -150 50 63 MGPA -100 50 63 MGPA -200 0.2 MGPA16-75 MGPA16-75 50 63 MGPA -150 0.3 0.15 50 63 MGPA -100 MGPA16-50 MGPA16-50 0.2 0.1 MGPA16-10 MGPA16-10 0.1 0.05 50 63 MGPA -50 50 63 MGPA -50 0 0 0 10 20 30
Allowable lateral load (F) Allowable plate rotation torque (T) Load (N) Torque (Nm) Stroke 50 75 100 125 150 175 200 Stroke 50 75 100 125 150 175 200 L L 42 2.87 m m 42 2.47 40 2.17 42 2.38 32 2.16 24 1.98 17 1.82 50 to 200mm stroke F T 10 Load weight m (kg) F 125 to 200mm stroke Plate non-rotating accuracy () 50 to 100mm stroke Non-rotating accuracy () 0.09 1 + 0.1 10 50 100 Eccentric distance
200 150 100 50 0 50 100 150 200 250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (650) (550) (450) (350) (250) (150) (50) 50 150 250 350 450 550 650 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to work piece [mm] 50 50 100 100 1s 150 150 2s 200 200 0.5s 1s 2s 250
SY7000222-1A [for 10 valves (30 pcs.)] SY5000222-1A [for 10 valves (20 pcs.)] SY7000221-1A [for 10 valves (30 pcs.)] SY3000222-1A [for 10 valves (20 pcs.)] SY5000221-1A [for 10 valves (20 pcs.)] SY300023-24A [for 10 valves (20 pcs.)]
20 17 36 30 68 81 93 106 131 156 181 25 60 40 40 10 9 62 122 112 25 17 36 32 72 85 97 110 135 160 185 32 60 40 40 10 9 64 124 114 32 17 36 32 72 85 97 110 135 160 185 40 77 53 53 11 10 88 154 143.5 40 19 46 41 77 90 102 115 140 165 190 With Rod Boot l ZZ Symbol Z Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151