Electric Actuator

27.4 53.5 101.6 42.5 83.2 159 6.7 13 25 7.9 16.2 29.2 10 5 2.5 12 6 3 16 8 4 10 5 2.5 12 6 3 LEYG16m 30 to 200 Series LECP6 Step motor (Servo/24 VDC) LEYG25m 30 to 300 Series LECP1 Motor Parallel Type LEYG32m Page 19 30 to 300 LEYG16mA 30 to 200 Servo motor (24 VDC) Series LECA6 LEYG25mA 30 to 300 In-line Motor Type Controller LEC Number of positioning pattern points Power voltage supply

NCQ8

5 1/2 6 1/4-20UNC-2 1/2 2 5/8 2 3/4 2 7/8 3 3 1/8 3 1/4 3 1/2 3 3/4 4 4 1/4 4 3/4 5 1/4 5 3/4 6 1/4 2 3/8 2 1/2 2 5/8 2 3/4 2 7/8 3 3 1/8 3 3/8 3 5/8 3 7/8 4 1/8 4 5/8 5 1/8 5 5/8 6 1/8 2 7/8 3 3 1/8 3 1/4 3 3/8 3 1/2 3 5/8 3 7/8 4 1/8 4 3/8 4 5/8 5 1/8 5 5/8 6 1/8 6 5/8 1/4-20UNC-2 3/8 2 1/2 2 5/8 2 3/4 2 7/8 3 3 1/8 3 3/8 3 5/8 3 7/8 4 1/8 4 5/8 5 1/8 5 5/8 6 1/8 5/16-18UNC-2 7/8 3 3 1/

Air Cylinder Series CM2

Up to 400 6.8 3.2 102 131 133 142 to 400 Up to 300 Up to 300 4 4 8 7 9 9 41 111 19 10 9 40 37 60 75 30 14 10 40 40 60 40 112 120 122 47 28 40 55 20 25 6.8 3.2 102 135 Up to 300 Up to 450 137 146 to 450 Up to 300 Up to 300 4 4 8 7 9 9 41 113 19 10 9 40 37 60 75 30 14 10 40 40 60 40 114 122 124 47 28 40 55 20 25 6.8 3.2 104 137 Up to 300 Up to 450 139 148 to 450 Up to 300 Up to 300 5 4 7

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

connector (M): SY7 20-M-Q DIN terminal (D): SY7 20-D-Q 3 4 5 SY7 20-L-Q 3 4 5 3 4 5 VQ C8 C10 C8 C10 C8 C10 32.1 VQ4 Applicable cable O.D. 3.5 to 7 64.3 22.6 56.8 (lead wire length) Max.10 VQ5 45.5 Approx. 300 Approx. 300 46.1 (lead wire length) VQZ 32.1 VQD VFS 70.6 80.6 79.7 61 70 Pg.7 57 VS VS7 135 154.2 174.2 172.4 VQ7 24.5 47.6 (5.5) 24.5 47.6 (5.5) 24.5 47.6 (5.5) 1.2-23 Body Ported

0.55

3EB 1P 5EA 1.7 2 x 4.3 (Indicator light) (For mounting) Grommet (G) (H) DC without light/surge voltage suppressor 84.5 4.5 43 G: Approx. 300 H: Approx. 600 165.9 G: Approx. 300 H: Approx. 600 (Lead wire length) 168.3 (Lead wire length) 73 44.3 2 x PE port 27 22 13 44.2 1/4, 3/8 25 25 [1(P), 5(EA), 3(EB) port] 43 81 3 4 5 DIN terminal (D) (Y): VF3 40-; ;;1; D Y 3 4 5 L-type plug connector

Magnetically Coupled Rodless Cylinder

speed mm/s Piston speed mm/s (1Nm = 0.74 ftlb) 4 CY1F/m1 5 CY1F/m2 6 CY1F/m3 7 CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm

5 Port Solenoid Valve Series VQZ1000/2000/3000

3 P 1 16.5 59.5 38.7 Approx. 300 (Lead wire length) 120.4 + + 49.8 34.4 2 x PE port 22 16 16 14 X 12 Y 9 9 9 2.1 2.1 M5 x 0.8 (Not used) 18 18 M5 x 0.8 (External pilot port) 1/8, 1/4 [1(P), 5(R1), 3(R2) port] 28 56 L-type plug connector (L): VQZ2 5 (R)-L10 1 3 4 5 01 02 DIN terminal (Y): VQZ2 5 (R)-Y10 1 3 4 5 01 02 Approx. 300 (Lead wire length) 140 [144.4] 48.5 [50.7

SY

C10 C12 3 4 5 C8 C10 C12 3 4 5 Applicable cable O.D. 3.5~7 73 65.5 28.5 202.5 Max. 10 54.2 Approx. 300 (lead wire length) 52 Approx. 300 [58.5] Pg.7 (lead wire length) 93.9 93 83.8 74.2 70.2 [167.5] 164.9 184.1 204.3 86.7 36.6 61 (5.5) 36.6 36.6 61 (5.5) (5.5) 61 17 18 SY3000/5000/7000/9000 Base Mounted Type Single Valve How to Order 5 L SY 5 2 40 Port size Series Port size Without sub-plate

24

32, 40 5 10 30 51 50 100 101 300 200 5 10 30 51 50 100 101 300 200 Stroke [mm] Stroke [mm] MGPL80/100, MGPA80/100 MGPL80/100, MGPA80/100 50 50 100 100 100 80 100 100 Load mass m [kg] Load mass m [kg] 80 80 80 100 80 10 10 80 5 10 29 30 51 50 300 200 100 5 10 29 30 51 50 300 200 100 Stroke [mm] Stroke [mm] 444 Model Selection MGP Series L L m m Horizontal Mounting Ball Bushing (19) L = 50

MG

50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load weight m (kg) Load weight m (kg) 80 80 100 10 10 80 5 10 100 20 29 30 49 50 300 200 5 10 100 20 29 30 49 50 300 200 Stroke (mm) Stroke (mm) 8-19-17 Series

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

40-lMll-M5 3 4 5 3 4 5 L plug connector (L): SYJ3 40-lLll-M5 VQD VZS VFS 33.5 16.5 33.5 16.5 2-3.2 (Mounting holes) 2-3.2 (Mounting holes) 22 3 22 3 VS 2.5 2.5 A B A B 11 11 17.5 17.5 VS7 A B A B 47.4 50.7 33.7 300 111.6 39.2 [40.5] (Lead wire length) 92.3 [94.9] (Lead wire length) 52.6 [59.1] 300 41.5 [48] 41.5 [48] 33.5 33.5 29.1 22.5 22.5 R2 R1 P R2 R1 P 13 13 5 5 10 10 5-M5 X 0.8 (

MY1

H unit 500 400 300 500 400 300 L unit Air cushion 200 200 100 1 2 3 4 5 10 20 30 1002 3 5 10 20 50 40 50 100 30 m2 max. m1 max. m3 max. m3 max. m1 max. Load weight kg m2 max.

Basic type / Direct mount type Series CY3B/CY3R

CY3B15 CY3B50 1000 500 50 40 30 20 300 200 10 5 100 Usable range Usable range 20 30 40 50 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 7 8 9 10 11 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) CY3B63 CY3B20 200 1000 100 500 400 50 300 200 100 10 5 Usable range 20 30 40 50 Usable range 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder

REA/REB

10 10 10 5 5 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 1 0 1 2 3 4 5 6 8 9 10 11 13 7 12 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 50 63 1000 1000 Recommended driving force Fn (N) Recommended driving force Fn (N) 500 400 500 300 300 200 200 Usable range 100 100

VQZ1000/2000/3000

10 (47.5) 3-M5 x 0.8 1(P), 3(R2), 5(R1) port 9.9 9.9 5 3 1 2-PE port 22.2 die-cast hole (For manifold gasket positioning) 3 4 5 3 4 5 L plug connector (L): VQZ1 20 1-L-C3/C4/C6/M5 M plug connector (M): VQZ1 20 1-M-C3/C4/C6/M5 300 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 119 300 131 55 (Lead wire length) Indicator light Indicator light 61 27.5 <32.5> 34 <39> Cover diameter

Environment

SpeedWork Load Graph (Guide) For Step Motor (Servo/24 VDC) LECP6, LECP1, LECPMJ Horizontal Vertical LEY16m LEY16m for acceleration/deceleration: 2000 mm/s2 10 40 Lead 2.5: LEY16C 35 Horizontal work load [kg] Lead 2.5: LEY16C 8 Vertical work load [kg] 30 15 17 20 23 25 Lead 5: LEY16B 5 Lead 5: LEY16B 4 Lead 10: LEY16A 10 6 2 Lead 10: LEY16A 5 0 0 0 300 200 400 100 500 600 0 300 200 400 100

MGP

40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load weight m (kg) Load weight m (kg) 80 100 80 10 10 80 5 10 100 20 29 30 49 50 300 200 5 10 100 20 29 30 49 50 300 200 Stroke (mm) Stroke (mm) Note: 1 kg = 2.2046 lb 1 in = 25.4 mm 10 Compact Guide Cylinder Series

Air Cylinder Series MB

5 !

MY1

L unit 1000 1000 Air cushion Adjusting bolt 500 400 300 500 400 300 0.5 200 200 100 1 2 3 4 5 10 20 30 1002 3 5 10 20 50 40 50 30 100 Shock absorber m2, m3max m1max m2max m3max m1max 2.

SYJ300/500/700

28.5 26.1 X R P S070 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5