Base Mounted Metal Seal/Rubber Seal Series VQ

Coil rated voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Wiring Specifications The lead wires are connected to the valve as shown below. Connect each to the power supply side.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

to 100 42 41 105 to 120 75 125 to 200 59 49.5 205 to 400 76 58 25 20 46 29 63 50 to 200 98.5 138.5 12.5 (13.5)* 138.5 178.5 12.5 (13.5)* 4 8 205 to 500 505 to 800 20 to 35 22 36 50 * L lead M6 x 1 8.5 5 6 40 to 100 36 43 105 to 120 80 125 to 200 53 51.5 205 to 500 70 60 32 25 55 30 50 to 70 24 50 44 65 M8 x 1.25 10 6 7 75 to 120 45 60.5 125 to 200 58 67 205 to 500 86 81 100 505 to 800 135

CXS

CXS15 CXS20 CXS25 CXS32 Model 120 150 200 175 150 125 120 110 200 175 150 125 120 110 200 175 150 125 120 110 125 120 110 150 125 110 100 90 80 Stroke SS ZZ Z 175 210 282 257 232 207 202 192 272 247 222 197 192 182 270 245 220 195 190 180 185 180 170 205 180 165 155 145 135 Symbol Made to Order 192 229 312 287 262 237 232 222 296 271 246 221 216 206 294 269 244 219 214 204 204 199 189 222

MGP

WB WA E A + Stroke Dimensions (mm) 1in = 25.4mm MGPM, MGPL-XB10/Dimensions WA, WB WA WB (mm) Bore size (mm) Standard stroke (mm) 10 to 39st 20 24 40 to 100st 40 44 101 to 200st 110 110 201 to 250st 200 200 10 to 39st 15 17 40 to 100st 25 27 101 to 200st 60 60 201 to 250st 105 105 12 16 10 to 250 WA WB Bore size (mm) Standard stroke (mm) 20 to 39st 24 24 40 to 124st 44 44 125 to 200st 120

Guide Cylinder Series MGG

Bore size (mm) Stroke range (mm) S A AA AB AG AH AI AJ AL AP B I J K L M N O P T U V AK 20 25 32 40 50 6.6 75, 100, 125, 150, 200 90 11 11 112 125 82 95 9 25 108 30 55 60 80 25 45 1/8 26 12 82 48 M6 x 1 depth 9 9 100 14 13 134 150 92 108 9 30 130 35 65 70 100 35 54 1/8 31 13 100 57 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 9 120 14 16 134 150 102 118 9 35 135 40 73 80 106 35 60 1/8 38

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(When using 10-SS5Y-60-D, block disk is assembled on D side.) sheet. (When using 10-SS5Y-60-D, block disk is assembled on D side.)

5-Port Solenoid Valve

SY3000 SY30M-60-1A SY5000 SY50M-60-1A SY7000 SY70M-60-1A Intermediate stop Drop prevention Applicable valve SY 3 5 7400 1 SY 3 5 7 1 2 00 1 With Residual Pressure Release Valve EXH. 2(B) 4(A) 3(EB) 1(P) 5(EA) Circuit diagram (Intermediate stop: When 3-position exhaust center valve is mounted) Vacuum Release Valve with Restrictor Double check spacer assembly with residual pressure release

15

60 M3 x 12 1.5 M6 x 60 5.2 14 18 NY M4 x 0.7 8 70 50 3.3 60 60 M4 x 12 3.6 M6 x 60 5.2 11 18 NX M5 x 0.8 8.5 63 40 3.5 63 60 M4 x 12 3.6 M6 x 60 5.2 9 5 NW M5 x 0.8 8.5 70 50 3.3 60 60 M4 x 12 3.6 M6 x 60 5.2 11 12 NV M4 x 0.7 8 63 40 3.3 63 60 M4 x 12 3.6 M6 x 60 5.2 9 5 NU M5 x 0.8 8.5 70 50 3.3 60 60 M4 x 12 3.6 M6 x 60 5.2 11 12 NT M5 x 0.8 8.5 70 50 3.3 60 60 M3 x 12 1.5 M6 x 60 5.2

MXS Series Air Slide Table

35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 KA NA 2 2 2 2 2 2 4 4 4 M 92 92 92 102 115 156 197 255 295 HA 45 45 45 55 35 70 70 76 80 ZZ 108 108 108 118 131 172 213 271 311 N 4 4 4 4 6 6 6 8 8 G 22 22 22 22 20 26 32 40 30 H 45 45 45 55 35 35 35 38 40 NN 2 2 2 2 3 4 5 6 7 I 12 12 12 12 12 33 50 67 82 J 47 47 47 57 70 90 114 155 180 K 35 45 55 65 75 100 125

7.5

SJ 60 X90 (T) 2 3 Part no. Entry is the same as standard products.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

20 11 16 23 40 60 60 AC-A1bore size +0.027 0 80 M12 x 28 31 100 65 28 16 R 22 13 18 26 45 67 75 U D drill through C 0.3 +0.033 0 100 M12 x 32 35 118 80 28 17 R 24 13 20 30 50 74 90 F E +0.033 0 125 M14 x 36 41 140 90 31 20 R 26 15 22 30 55 81 112 0 0.3 G A +0.033 0 160 M16 x 40 54 174 100 34 22 R 30 17 25 40 65 95 140 H B Knuckle pin Material: Carbon steel C (f8) Order no.

LJ1H

Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 20 40 60 m Transfer load m (kg) 2000 a = 1000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145 for deflection data. 60 61 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

MXQ

F A F MX MTS Lr MY 16 16 16 Lr = 120 mm MXQ16-10 MXQ16-10 MXQ16-10 0.04 MXQ16-75 MXQ16-100 MXQ16-125 MXQ16-75 MXQ16-100 MXQ16-125 MXQ16-125 MXQ16-125 MXQ16-125 CY MXQ16-50 MXQ16-50 MXQ16-50 0.06 MXQ16-75 MXQ16-20 MXQ16-30 MXQ16-20 MXQ16-20 MXQ16-30 MXQ16-30 0.12 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ16-75 MXQ16-40 MXQ16-75 MXQ16-75

ISO Cylinder

JA30-10-125 1 floating joint * Refer to page 12 for dimensions of accessories.

Air Cylinder Series CA2

TY 4 x TT TD TH TF TS 4 x TR TA TL TU TU TY TC (mm) TD-H10 (Hole) Bore size (mm) TA TL TU TC TX TE TO TR TT TS TH TF TY Z Part no. 40 +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 93 15 CA2-S04 50 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 103 15 CA2-S06 63 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 107 18 80 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 129 25

MGG

(mm) Stroke range (mm) Bore size (mm) AP AK AL AJ AI N AH M AG L AB K AA J I V B U T O P S A 20 25 32 40 50 75, 100, 125, 150, 200 25 6.6 9 95 82 45 125 25 112 80 11 60 12 55 30 48 108 82 12 99 M6 x 1 depth 9 Rc 1/8 26 30 9 9 108 92 54 150 35 134 100 13 70 16 65 35 57 130 100 109 M6 x 1 depth 13 Rc 1/8 13 31 75, 100 125, 150 200, 250 300 35 9 9 118 102 60 150 35 134 106 16 80 16 73 40 65

Table of Contents

60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

5 Port Solenoid Valve Series VQZ1000/2000/3000

Coil voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC [115 VAC] (50/60 Hz) 220 VAC [230 VAC] (50/60 Hz) 24 VDC 12 VDC Note) For sub-plate part no., refer to page 967.

CA2

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-TT TH TD TF TS 4-TR TY TC TA TL TU TU Z TD-H10 (Hole) Bore size (mm) TA TL TU TC TX TE TO TR TT TS TH TF TY Part no. 40 +0.070 0 85 9 60 60 10 102 119 17 17 12 45 62 93 80 15 CA2-S04 50 +0.070 0 95 9 60 60 10 112 129

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Stroke range (mm) Bore size (mm) A N AD AC M AF L AE F K AB C E J AA AP B D G H I 99 45 75 16.5 25 80 30 60 11 92 55 24 5.5 12 25 108 60 30 20 75, 100, 125, 150, 200 M5 x 0.8 depth 10 9.5 depth 6 M8 x 1.25 depth 14 109 54 85 16.5 35 100 30 70 13 26.5 113 6.6 65 16 30 130 65 35 25 11 depth 8 M10 x 1.5 depth 18 M6 x 1 depth 12 75, 100 125, 150 200, 250 300 129 60 100 19 35 106 35 80 16 118