CE

2 #1 Rolled steel Cushion seal Cushion ring A 40 to 63 NBR !3 #2 J Rolled steel Cushion ring B 40 to 63 Piston gasket NBR #3 !4 Cushion valve Port seal 40 to 63 NBR #4 !5 DPiston nut Rolled steel Joint seal 40 to 63 NBR #5 !6 Port joint Stainless steel Valve seal NBR 40 to 63 #6 !

XLAQ/XLDQ

55 75 F 17 26 41 52 G 40 39 63 68 H 87 91 129 142 J XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 40 50 65 70 Note) The heater (Option) is not available with XLAQ-16. 471 Aluminum One-touch Connection and Release High Vacuum Angle Valve 2-step Control, Single Acting/Bellows Seal, O-ring Seal XLDQ Series How to Order XLDQ M9N A 40 q w e r t y w Actuator port direction q Flange size Rear flange surface

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

-X1247 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500 600, 700, 800 20, 25 32, 40, 50 63, 80 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Intermediate strokes and strokes shorter than 75 mm are also available.

NCQ8

Indicator light Conforming to CE Standards Standard Lead wires Oilproof vinyl heavy -duty cord 0.1"(2.7 mm) x 0.13"(3.2mm) ellipse, 2.3 x 10-4in2(0.15mm2), 2 cores: D-M9B(V), 3 cores: D-M9N(V), D-M9P(V) Note 1) Refer to page 40 for solid state switch common specifications. Note 2) Refer to page 40 for lead wire lengths.

NCQ8

Nil (Example) M9N 118in (3 m) . L M9NL 197in (5 m) .

MXF

F A A MX Lr MTS MXF16 Lr = 40 mm MY 0.20 0.07 0.07 CY 0.06 0.06 MXF16-75 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.16 MXF16-75 MXF16-75 MXF16-50 MXF16-30 0.05 0.05 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

MXW

40 40 (Y) (Y) 10 Operating direction (B) 6H9 +0.030 depth 5.5 0 41 160 (Hexagon socket head taper thread plug) 10.5 Operating direction (B) (A) 9.5 11 24 24 16 12.5 A 30.5 60 50 32.5 A Cross section AA Z 5-M6 x 1 thread depth 12 4 x H G depth 5.5 6H9 +0.030 H 7 Bottom through-hole 5.1 0 F E 6H9 +0.030 depth 5.5 0 (mm) Z H G F E Model MXW20-100 337 48 75 168 87 MXW20-125 362 52 79.5 185 91

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 40 10 10 10 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load (N) 20 40

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Double acting single rod only 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30 12, 16 5, 10, 15, 20, 25, 30 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches Mounting Bracket Part No.

CJ2X/CUX/CQSX/CQ2X/CM2X

Standard stroke (mm) Bore size (mm) CEP1 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 CE1 50, 63 80, 100 CE2 Precautions ML2B Be sure to read before handling. For Safety Instructions and Actuator Precautions, refer to pages 10-24-3 to 10-24-6. C J G5-S CV Snap Ring Installation/Removal Maintenance Caution Caution MVGQ 1.

CJ2X/CUX/CQSX/CQ2X/CM2X

Standard stroke (mm) Bore size (mm) CEP1 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 CE1 50, 63 80, 100 CE2 Precautions ML2B Be sure to read before handling. For Safety Instructions and Actuator Precautions, refer to pages 10-24-3 to 10-24-6. C J G5-S CV Snap Ring Installation/Removal Maintenance Caution Caution MVGQ 1.

CJ2X/CUX/CQSX/CQ2X/CM2X

Standard stroke (mm) Bore size (mm) CEP1 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 CE1 50, 63 80, 100 CE2 Precautions ML2B Be sure to read before handling. For Safety Instructions and Actuator Precautions, refer to pages 10-24-3 to 10-24-6. C J G5-S CV Snap Ring Installation/Removal Maintenance Caution Caution MVGQ 1.

Stroke Reading Cylinder and Counter

100 125 150 175 200 300 500 25 50 75 100 250 400 12 20 32 40 50 63 12 equivalent 25 to 150 1 to 150 20 equivalent 25 to 300 1 to 300 Strokes other than standard strokes are available upon request.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

In the case of MVGQM50-40 st, an interface of 10 mm wide is installed inside of the MVGQ50-50 st, and thus the full length dimension of the body is the same as 50 st. 20, 30, 40, 50, 75, 100 125, 150, 175, 200 25 M L MVGQ 25, 50, 75, 100, 125, 150, 175, 200 M L 32, 40 MVGQ 50, 63 Applicable Auto Switch/Refer to pages 1719 to 1827 for further information on auto switches.

Cylinder with Lock

2 (n = 4, 8, 12, 16)*2 65 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 75 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 2 (Different surfaces, same surface) 1 70 75 80 85 90 D-A9m n 70 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 75 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 85 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 90 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 2

Dual Rod Cylinder Series CXSJ/CXS

139 149 Dimensions other than those listed above are the same as for the standard type. 581 Series CXS Dimensions: 20, 25, 32 ZZ SS Z 3 Z Manual lever insertion 1.7 KK Hexagon (O) Z (mm) O Model CXS20-R CXS25-R CXS32-R Width across flats13 Width across flats16 Width across flats19 (mm) Symbol ZZ Z SS KK Stroke 20 10 50 40 30 75 100 10 20 30 40 75 50 100 10 20 40 10 20 40 75 75 30 50 100

Table of Contents

(g) Stroke (mm) Model 60 40 30 25 20 15 10 5 50 70 80 90 100 27 (32) 30 (40) 34 (44) 37 (47) 40 (50) 44 (54) 51 (61) 58 (68) 65 (75) C(D)UW6-D 44 (49) 49 (59) 53 (63) 58 (68) 62 (72) 67 (77) 76 (86) 85 (95) 94 (104) C(D)UW10-D 74 (99) 81 (111) 88 (118) 95 (125) 102 (132) 109 (139) 123 (153) 137 (167) 151 (181) C(D)UW16-D 132 (165) 145 (182) 158 (195) 171 (208) 184 (221) 197 (234) 223 (260

Cylinder with Lock

surfaces, same surface) 1 55 60 65 70 75 D-M9AV n 55 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 60 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 65 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 75 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 2 (Different surfaces, same surface) 1 70 75 80 85 95 D-A9 n 70 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 75 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 80 + 40 (n 4) 2 (n =

Air Slide Table

Bore size (Stroke (mm)) 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 Applicable Auto Switches/Refer to Best Pneumatics No. 3 for further information on auto switches.