Air Preparation Equipment

differential pressure Element 5 elements included Number of elements Size Filtration area 190 x L440 1800 cm2 190 x L770 3400 cm2 190 x L440 5400 cm2 190 x L770 10200 cm2 190 x L440 9000 cm2 190 x L770 17000 cm2 267 Bag Filter Series FGF P.478 2 Replacement Procedure is Replacement Parts and Seal List FGF1 FGF3-40 FGF5-60 Air release Davit for cover Spring washer Nut Air release Fluid release

SQ1000/2000

210 230 250 270 290 430 450 470 490 510 530

5 Port Solenoid Valve Series SY3000/5000/7000/9000

VQZ SQ (Station 1) (Station n) VFS (Light/surge voltage suppressor) VFR 63.3 VQ7 47.9 45.9 40.9 34.5 7.5 Block separation button (Push type) 15 14 13 12 11 10 9 8 7 6 5 4 3 2 stations 16 stations Stations n L1 285.5 273 260.5 260.5 248 235.5 223 210.5 198 185.5 185.5 148 173 298 160.5 L2 275 262.5 250 250 237.5 225 212.5 200 187.5 175 175 137.5 162.5 287.5 150 L3 223.5 213 202.5 192 181.5

C95

, 320, 400, 500 40 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 100 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 Intermediate strokes are available.

Rotary Table/Rack & Pinion Style Series MSQ

190 190 190 190 190 190 10 20 30 50 70 100 200 45 62 68 83 95 108 139 27 35 39 49 54 61 81 31 39 43 53 58 65 85 49 66 72 87 99 112 143 DOperating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

C95

, 125, 160, 200, 250, 320, 400, 500, 600 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 Intermediate strokes are available.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

, 320, 400, 500 2000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Intermediate strokes are available

Rotary Table/

B B When D-F8 is used Size: 10 to 200 B A Reed switch Solid state switch Size 10 20 30 50 70 100 200 Rotation A B Actuation range A B Rotation range m Actuation range Rotation range m 36 50 66 68 78 91 115 10 190 90 10 90 40 54 60 72 82 95 19 21 27 31 37 41 48 61 17 23 27 33 37 44 57 190 80 10 80 10 10 65 10 190 65 10 10 50 190 50 10 190 45 10 45 Operating range at proper mounting position

High Vacuum Angle Valve

0 2-1 o 0.2 153 188 q 190 138 O-ring Part No.

CL

Without rod boot Z 190 207 214 241 With rod boot ZZ 211 228 238 269 Bore size (mm) Z 210 229 236 261 ZZ 231 250 260 289 20 25 32 40 9-2-31 30 Series CLG1 Basic Style with Air Cushion: CLG1BA Refer to page 9-2-31 for mounting bracket, since the dimensions except GA, P , WA, WB, WH, WW, W are the same.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

190 190 190 190 190 190 10 10 10 10 10 10 10 10 10 10 10 10 10 10 90 80 65 50 45 40 35 60 50 50 40 40 30 20 17 23 27 33 37 44 57 36 50 66 68 78 91 115 40 54 60 72 82 95 19 40 54 60 72 82 95 19 21 27 31 37 41 48 61 21 27 31 37 41 48 61 10 20 30 50 70 100 200 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

Table of Contents

81 90 4 101 110 5 121 130 6 141 150 7 161 170 8 181 190 9 201 210 10 221 230 11 241 250 12 261 270 13 281 290 14 301 310 15 321 330 L1 L2 3-7-33 34 Series VZS3000 Manifold Non plug-in type VV5ZS3-51Station 1Port size Grommet (G) 2-4.5 mounting hole 2n-Rc 1/8, 1/4 Manual override U side (n) (2) (1) Stations D side Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

C92

160, 200, 250, 320, 400, 500 2900 125 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 CA1 2900 160 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Intermediate strokes are available.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

80 11 22 22 16 44 44 3/4 65 166 18 60 24 24 155 45 20 124 74 80 17 20 25 to 1800 The maximum stroke is 1500mm for series CH2G only. 100 M18 x 1.5 135 230 102 11 22 22 18 44 44 3/4 75 172 22 71 27 28 190 53 22 122 85 100 19 15 25 to 1800 Rod series Tolerances (mm) B series rod C series rod Bore size (mm) Bore size (mm) LH LX E E A MA D K G H ZZ MM A MA D K G H ZZ MM 32 32 34 25 22 18

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

H 39 45 55 60 UU 134 158 190 220 U 114 136 165 190 N 15 17 20 25 Model U 105 124 153 174 Model H 30 33 43 44 N 15 17 20 25 H 39 45 55 60 U 114 136 165 190 UU 150 177 215 250 Model UU 125 146 178 204 H 30 33 43 44 N 15 17 20 25 U 105 124 153 174 Model CDRA1FW50 CDRA1FW63 CDRA1FW80 CDRA1FW100 CDRA1FX50 CDRA1FX63 CDRA1FX80 CDRA1FX100 CDRA1FY50 CDRA1FY63 CDRA1FY80 CDRA1FY100 CDRA1FZ50 CDRA1FZ63

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

H 39 45 55 60 UU 134 158 190 220 N 15 17 20 25 U 114 136 165 190 Model U 105 124 153 174 Model H 30 33 43 44 N 15 17 20 25 U 114 136 165 190 UU 150 177 215 250 Model UU 125 146 178 204 N 15 17 20 25 U 105 124 153 174 H 39 45 55 60 H 30 33 43 44 Model CDRA1FW50 CDRA1FW63 CDRA1FW80 CDRA1FW100 CDRA1FX50 CDRA1FX63 CDRA1FX80 CDRA1FX100 CDRA1FY50 CDRA1FY63 CDRA1FY80 CDRA1FY100 CDRA1FZ50 CDRA1FZ63

Table of Contents

Up to 700 80 7 RS Q G 25 25 1500 250 Up to 700 80 12 32 32 1500 250 Up to 1000 80 21 RS H A 40 40 1500 250 Up to 1000 80 33 50 50 1500 250 Up to 1200 RZQ 80 47 63 63 1500 250 Up to 1200 80 84 MI W S 80 80 1500 250 Up to 1400 80 127 100 100 1500 250 Up to 1500 80 196 CEP1 Note 1)The cylinder performance may not be as expected when stroke is shorter than recommended stroke (1 to 249 stroke

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

C4 C6 C8 Stations n L1 L2 L3 L4 2 3 4 5 6 7 8 9 10 135.5 148 160.5 185.5 198 210.5 235.5 248 260.5 125 137.5 150 175 187.5 200 225 237.5 250 105 121 137 153 169 185 201 217 233 15 13.5 11.5 16 14.5 12.5 17 15.5 13.5 C4 C6 C8 SS5Y5-45FUStations B-Q 2 3 4 5 6 7 8 9 10 Stations n L1 L2 L3 L4 148 173 185.5 198 210.5 235.5 248 260.5 285.5 137.5 162.5 175 187.5 200 225 237.5 250 275 123 139 155

IDU/IDF

IDF370B Compressed air inlet Compressed air outlet Port size (JIS 10K 6B) (400) (280) (310) Power supply cable entry 1670 Cooling water outlet (Rc 1 1/4) 100 (190) Cooling water inlet (Rc 1 1/4) (250) (90) (210) 75 650 (390) 1050 Rc 3/8 (800) 1810 Anchor bolt hole 4-20 18 Series IDU/IDF Option Specification Refer to pages 1, 5, 9, 13 and 16 for "How to order" of options.

Possible to transfer a workpiece at low-speed.

range 90 to 190 Chart 5.