CA2

n = 2, 4, 6, 8 Same side 15 90 100 110 35 75 80 90 100 1 Different sides With 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30(n2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 100 + 100(n 2) n = 2, 3, 4 100 + 100 (n2), n = 2, 4, 6, 8 Different sides With n Same side 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides With 2 Same side 35

Smooth Cylinder/Low Speed Cylinder

x 110L x 115L x 140L x 165L CQ-M10 x 85L x 90L x 95L x 100L x 105L x 110L x 115L x 120L x 125L x 150L x 175L 70 75 80 85 90 95 100 105 110 135 160 75 80 85 90 95 100 105 110 115 140 165 85 90 95 100 105 110 115 120 125 150 175 50 55 60 65 70 75 80 85 90 95 120 145 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L x 80L x

Electric Actuator with Integrated Guide

point distance mm LTF8 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% 1000 Load 50% 10 Amount of deflection m Amount of deflection m 100 1000 10 100 1 No load 10 No load 0.1 1 0.01 100 1000 100 1000 Load point distance mm Load point distance mm w w With single end support and table moved to the end of the stroke Load point distance Load point distance Figure 2.

High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

CL

77 85 69 78 84 92 100 44 52 64 78 92 115 128 144 16 20 20 25 30 36 36 40 42 50 59 76 92 100 112 118 60 70 86 102 116 15 17 17 21 21 16 16 11 11 11 11 11 16 16 40 50 55 65 80 90 90 90 6.5 6.0 6.0 8.0 8.0 43 43 43 32 40 40 52 52 14 14 14 9.0 9.0 30 35 35 40 40 50 50 56 27 32 32 37 37 47 47 53 60 70 86 102 116 145 161 182 MGG 11.5 MGC 13.5 13.5 19 19 19 MGF 112.5 121 133 141.5 150 167 CY1 18.5

Combination Cylinder

to 1000 30 35 35 40 40 50 50 56 27 32 32 37 37 47 47 53 60 70 86 102 116 145 161 182 22 27 27 32 41 71 81 101 119 133 145 160 180 59 67 73 77 85 69 78 84 92 100 44 52 64 78 92 115 128 144 16 20 20 25 30 36 36 40 40 50 55 65 80 90 90 90 32 40 40 52 52 59 59 59 43 43 43 42 50 59 76 92 100 112 118 100 110 130 160 180 230 255 275 12 12 15 18 18 14 20 20 9.0 9.0 80 90 105 130 150 190 212 236

ZP

/125) H ZP (100/125) HB 100, 125 M22 x 1.5 Heavy-duty Ball Joint Pad Product part no.

Vacuum Pad

/125) H ZP (100/125) HB 100, 125 M22 x 1.5 Heavy-duty Ball Joint Pad Product part no.

Vacuum Pad

/125) H ZP (100/125) HB 100, 125 M22 x 1.5 Heavy-duty Ball Joint Pad Product part no.

Vacuum Pad

/125) H ZP (100/125) HB 100, 125 M22 x 1.5 Heavy-duty Ball Joint Pad Product part no.

Vacuum Pad

/125) H ZP (100/125) HB 100, 125 M22 x 1.5 Heavy-duty Ball Joint Pad Product part no.

Air Slide Table Series MXS

35 70 70 76 80 I 12 12 12 12 12 33 50 67 82 J 47 47 47 57 70 90 114 155 180 K 35 45 55 65 75 100 125 150 175 KA 162 218 258 NA 2 2 2 2 2 2 4 4 4 M 92 92 92 102 115 156 197 255 295 Z 90.5 ZZ 108 108 108 118 131 172 213 271 311 FF 40 40 40 50 35 60 70 75 80 Model MXS25-10 MXS25-20 MXS25-30 MXS25-40 MXS25-50 MXS25-75 MXS25-100 MXS25-125 MXS25-150 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5

Magnetically Coupled Rodless Cylinder

, 200, 300 Bore size (mm) 0.3 0.2 0.4 0.5 0.6 0.7 100, 200, 300, 400, 500 15 750 1 axis 10 15 23 78 31 39 54 46 100, 200, 300, 400, 500, 600 20 1000 15 35 52 176 70 88 123 105 100, 200, 300, 400, 500, 600, 800 25 1200 CY3B CY3R 20 62 94 314 125 157 219 188 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axes 98 147 25 490 196 245 343 294 1500 32 CY1S 161 241 804 322 402 563 32 483 Note) Strokes

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

[mm] 100 1000 70 10 75 LEY u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s LES 10 10 Load mass m [kg] Load mass m [kg] LEYG32M LEYG32M LEPY LEPS LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LER LEYG25M LEYG25M LEH 0.1 0.1 LEY -X5 Stroke [mm] 100 1000 70 10 75 Stroke [mm] 100 1000 70 10 75 11LEFS Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max. speed = 200

Table of Contents

VAC, 100 VDC or less.

Mechanically Jointed Rodless Cylinder Series MY1

220 50 17.5 (mm) Model PL QE S Z RR SS TT UU YH YW MY1HT50 180 384 6 414 23.5 10 103.5 57 136.4 253 MY1HT63 200 439 10 474 29 13.5 108 71.5 162.6 273 D-X Individual -X Technical data 1049 Series MY1HT Side Support Side support A MY-S63A 2 x 17.5 10.5 18.3 18.3 2 x 11.5 A B 70 100 Side support B MY-S63B 2 x M12 x 1.75 70 100 A B Dimensions (mm) Model A Applicable bore size B 304 MY1HT50 284

Electric Actuator

less 50 70 85 100 100 70 20 15 104F (40C) LEY25 LEY25 112 31.5 Lead 3: LEY25AC Lead 3: LEY25C 27 Lead 6: LEY25AB 90 Lead 6: LEY25B 22.5 Lead 12: LEY25AA Force [lbf] Force [lbf] Lead 12: LEY25A 67.4 8 13.5 45 9 22.5 4.5 Max. 65% 0 30 40 50 60 70 80 90 0 40 50 60 70 80 90 100 Set value of pushing force [%] Set value of pushing force [%] Max. 95% Set value of pushing force [%] Duty ratio [%

1

Standard external (B) 17 25 35 36 46 60 70 86 100 Dimensions except mentioned above are the same as standard type.

Table of Contents

How to Order . 64 64 67 68 69 70 70 70 71 71 72 73 75 76 76 76 77 79 80 81 82 83 83 83 84 85 85 86 87 87 87 88 89 90 91 91 91 92 93 94 95 95 96 99 99 100 101 102 103 105 105 105 106 106 107 107 107 108 108 108 109 109 109 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Air Cylinder Series MB

4, 6, 8) 60 + 30 (n 2) (n = 2, 4, 6, 8) n (Different surfaces) 90 + 100 (n 2) (n = 2, 4, 6, 8) 100 + 100 (n 2) (n = 2, 4, 6, 8) 105 + 100 (n 2) (n = 2, 4, 6, 8) 110 + 100 (n 2) (n = 2, 4, 6, 8) 125 + 100 (n 2) (n = 2, 4, 6, 8) 95 + 100 (n 2) (n = 2, 4, 6, 8) n (Same surface) 1 60 65 75 80 85 90 2 (Different surfaces) 2 (Same surface) 70 75 80 90 85 75 + 30 (n 2) (n = 2, 4, 6, 8) 80