Table of Contents

Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option Body Option Pilot type 0 1 Standard Direct manual override R Internal pilot External pilot Nil Option How to Order Pilot Valve Assembly Option SF4 F 1 22 Coil rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

VFS Manifold Specifications VS SS5Y5-60 SY560 SS5Y3-60 SY360 Model SS5Y7-60 SY760 Applicable valve VS7 Manifold type Stacking DIN rail mounted type P (SUP)/R (EXH) type Common SUP/Common EXH VQ7 Valve stations 2 to 20 stations Note 1) Ports A, B location Valve C10 (10 One-touch fitting) C8 (8 One-touch fitting) C12 (12 One-touch fitting) Ports P, R 1/8 C4 (4 One-touch fitting) C6 (6 One-touch

NCG/CG1

(169.5) 80 60 (74) 95 14 28.5 197.5 (211.5) + l 20 5 188.5 (202.5) 100 60 (74) 95 16 201 (215) + l 30 20 7 192 (206) Note) ( ): Denotes the dimensions for long stroke.

Air Slide Table Series MXS

60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load (N) Load (N) Load (N) 56 Air Slide Table Series MXS The graphs below show the table displacement when the static moment load is applied to the table.

MXS

Model F 50 50 50 60 35 60 70 75 80 Z 90.5 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5 K 35 45 55 65 75 100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 G 22 22 22 22 20 26 32 40 30 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 ZZ 108 108 108 118 131 172 213 271 311 NA 2 2 2 2 2 2 4 4 4 FF 40 40 40 50 35 60

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

MHS4-32D MHS4-32D 75 75 Pressure 0.6 MPa Pressure 0.6 MPa 60 60 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 0.4 MPa 0.4 MPa 45 45 0.3 MPa 0.3 MPa 30 30 0.2 MPa 0.2 MPa 15 15 0.1 MPa 0.1 MPa F 0 0 10 10 20 20 30 30 40 40 50 50 F Gripping point L (mm) Gripping point L (mm) F MHS4-40D MHS4-40D F 125 125 Pressure 0.6 MPa Pressure 0.6 MPa 100 100 0.5 MPa 0.5 MPa Gripping force (N) Gripping

ZP

How to Order B01 H N 40 25 ZPX A18 J Mounting thread Pad diameter (mm) A18 A22 M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) 40 50 40 50 63 63 Vacuum entry 80 80 100 100 B01 Rc 1 8 125 125 Pad type Buffer stroke (Rotating) H Heavy duty Stroke 40 50 63 80 100 125 50 25 Material 75 N S NBR Silicon rubber 100 Spring Force U Urethane rubber F Fluoro rubber 40 to 80 Pad diameter 100, 125 E EPR 6.9

Base Mounted Metal Seal/Rubber Seal Series VQ

Coil rated voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Wiring Specifications The lead wires are connected to the valve as shown below. Connect each to the power supply side.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

to 100 42 41 105 to 120 75 125 to 200 59 49.5 205 to 400 76 58 25 20 46 29 63 50 to 200 98.5 138.5 12.5 (13.5)* 138.5 178.5 12.5 (13.5)* 4 8 205 to 500 505 to 800 20 to 35 22 36 50 * L lead M6 x 1 8.5 5 6 40 to 100 36 43 105 to 120 80 125 to 200 53 51.5 205 to 500 70 60 32 25 55 30 50 to 70 24 50 44 65 M8 x 1.25 10 6 7 75 to 120 45 60.5 125 to 200 58 67 205 to 500 86 81 100 505 to 800 135

CXS

CXS15 CXS20 CXS25 CXS32 Model 120 150 200 175 150 125 120 110 200 175 150 125 120 110 200 175 150 125 120 110 125 120 110 150 125 110 100 90 80 Stroke SS ZZ Z 175 210 282 257 232 207 202 192 272 247 222 197 192 182 270 245 220 195 190 180 185 180 170 205 180 165 155 145 135 Symbol Made to Order 192 229 312 287 262 237 232 222 296 271 246 221 216 206 294 269 244 219 214 204 204 199 189 222

MGP

WB WA E A + Stroke Dimensions (mm) 1in = 25.4mm MGPM, MGPL-XB10/Dimensions WA, WB WA WB (mm) Bore size (mm) Standard stroke (mm) 10 to 39st 20 24 40 to 100st 40 44 101 to 200st 110 110 201 to 250st 200 200 10 to 39st 15 17 40 to 100st 25 27 101 to 200st 60 60 201 to 250st 105 105 12 16 10 to 250 WA WB Bore size (mm) Standard stroke (mm) 20 to 39st 24 24 40 to 124st 44 44 125 to 200st 120

Guide Cylinder Series MGG

Bore size (mm) Stroke range (mm) S A AA AB AG AH AI AJ AL AP B I J K L M N O P T U V AK 20 25 32 40 50 6.6 75, 100, 125, 150, 200 90 11 11 112 125 82 95 9 25 108 30 55 60 80 25 45 1/8 26 12 82 48 M6 x 1 depth 9 9 100 14 13 134 150 92 108 9 30 130 35 65 70 100 35 54 1/8 31 13 100 57 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 9 120 14 16 134 150 102 118 9 35 135 40 73 80 106 35 60 1/8 38

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(When using 10-SS5Y-60-D, block disk is assembled on D side.) sheet. (When using 10-SS5Y-60-D, block disk is assembled on D side.)

5-Port Solenoid Valve

SY3000 SY30M-60-1A SY5000 SY50M-60-1A SY7000 SY70M-60-1A Intermediate stop Drop prevention Applicable valve SY 3 5 7400 1 SY 3 5 7 1 2 00 1 With Residual Pressure Release Valve EXH. 2(B) 4(A) 3(EB) 1(P) 5(EA) Circuit diagram (Intermediate stop: When 3-position exhaust center valve is mounted) Vacuum Release Valve with Restrictor Double check spacer assembly with residual pressure release

15

60 M3 x 12 1.5 M6 x 60 5.2 14 18 NY M4 x 0.7 8 70 50 3.3 60 60 M4 x 12 3.6 M6 x 60 5.2 11 18 NX M5 x 0.8 8.5 63 40 3.5 63 60 M4 x 12 3.6 M6 x 60 5.2 9 5 NW M5 x 0.8 8.5 70 50 3.3 60 60 M4 x 12 3.6 M6 x 60 5.2 11 12 NV M4 x 0.7 8 63 40 3.3 63 60 M4 x 12 3.6 M6 x 60 5.2 9 5 NU M5 x 0.8 8.5 70 50 3.3 60 60 M4 x 12 3.6 M6 x 60 5.2 11 12 NT M5 x 0.8 8.5 70 50 3.3 60 60 M3 x 12 1.5 M6 x 60 5.2

MXS Series Air Slide Table

35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 KA NA 2 2 2 2 2 2 4 4 4 M 92 92 92 102 115 156 197 255 295 HA 45 45 45 55 35 70 70 76 80 ZZ 108 108 108 118 131 172 213 271 311 N 4 4 4 4 6 6 6 8 8 G 22 22 22 22 20 26 32 40 30 H 45 45 45 55 35 35 35 38 40 NN 2 2 2 2 3 4 5 6 7 I 12 12 12 12 12 33 50 67 82 J 47 47 47 57 70 90 114 155 180 K 35 45 55 65 75 100 125

7.5

SJ 60 X90 (T) 2 3 Part no. Entry is the same as standard products.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

20 11 16 23 40 60 60 AC-A1bore size +0.027 0 80 M12 x 28 31 100 65 28 16 R 22 13 18 26 45 67 75 U D drill through C 0.3 +0.033 0 100 M12 x 32 35 118 80 28 17 R 24 13 20 30 50 74 90 F E +0.033 0 125 M14 x 36 41 140 90 31 20 R 26 15 22 30 55 81 112 0 0.3 G A +0.033 0 160 M16 x 40 54 174 100 34 22 R 30 17 25 40 65 95 140 H B Knuckle pin Material: Carbon steel C (f8) Order no.

LJ1H

Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 20 40 60 m Transfer load m (kg) 2000 a = 1000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145 for deflection data. 60 61 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

MXQ

F A F MX MTS Lr MY 16 16 16 Lr = 120 mm MXQ16-10 MXQ16-10 MXQ16-10 0.04 MXQ16-75 MXQ16-100 MXQ16-125 MXQ16-75 MXQ16-100 MXQ16-125 MXQ16-125 MXQ16-125 MXQ16-125 CY MXQ16-50 MXQ16-50 MXQ16-50 0.06 MXQ16-75 MXQ16-20 MXQ16-30 MXQ16-20 MXQ16-20 MXQ16-30 MXQ16-30 0.12 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ16-75 MXQ16-40 MXQ16-75 MXQ16-75