Air Cylinder

12 2 35 5 26 5 6 M8 x 1.25 24 69 (77) 25 Up to 300 301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 17 10 14 2 40 6 31 5.5 8 M10 x 1.25 29 69 (77) 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 17 12 18 2 40 6 38 5.5 10 M10 x 1.25 35.5 71 (79) 40 Up to 300 301 to 1500 13 10 (13) 1/8 13 10 (10) 1/8 30 27 19 16 25 2 50 8 47 6 14 M14 x 1.5 44 78 (87) 50 Up to 300

5 Port Solenoid Valve Series VQZ1000/2000/3000

14.6 14 X 12 Y 12 10 10 7.2 M5 x 0.8 (External pilot port) 1.1 M5 x 0.8 (Not used) 13.4 13.4 1.1 1/8 [1(P), 5(R1), 3(R2) port] 21 42 L-type plug connector (L): VQZ125 (R)-L1-01 0 1 M-type plug connector (M): VQZ125 (R)-M1-01 0 1 Approx. 300 (Lead wire length) 58.5 [65.5] 95.6 [100] 85.6 115.2 [119.6] Approx. 300 (Lead wire length) 47.2 [54.2] R2 R1 R2 R1 P P Unless

MY1

L unit 1000 1000 Air cushion Adjusting bolt 500 400 300 500 400 300 0.5 200 200 100 1 2 3 4 5 10 20 30 1002 3 5 10 20 50 40 50 30 100 Shock absorber m2, m3max m1max m2max m3max m1max 2.

Integrated Controller

10 80 70 60 50 40 30 20 10 0 100 200 300 400 500 600 30 25 Work load: W [kg] Work load: W [kg] 3000 mm/s2 3000 mm/s2 20 15 10 5000 mm/s2 5 10 mm/s2 0 0 0 Speed: V [mm/s] 50 100 150 200 250 300 350 400 450 Speed: V [mm/s] EQFS40HC/Ball Screw Drive Horizontal/Lead 5 Vertical/Lead 5 90 80 70 60 50 40 30 20 10 0 45 40 35 30 25 20 15 10 5 0 3000 mm/s2 Work load: W [kg] Work load: W [kg] 10 mm

Air Cylinder

9 14 133 142 Up to 300 8 10 32 32 52 36 108 116 118 25 Up to 450 47 4 6.8 28 102 3.2 40 55 20 8 25 135 Up to 450 Up to 300 40 37 7 4 60 75 41 111 Up to 300 9 10 19 30 9 14 137 146 Up to 300 9 10 40 40 60 40 112 120 122 32 Up to 450 47 4 6.8 28 104 3.2 40 55 20 8 25 137 Up to 450 Up to 300 40 37 7 4 60 75 41 113 Up to 300 9 10 19 30 9 14 139 148 Up to 300 9 10 40 40 60 40 114 122 124 40

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Positioning distance (mm) 1 10 100 300 600 10 0.5 1.5 10.5 30.5 60.5 100 0.5 0.6 1.5 3.5 6.5 Speed (mm/s) 150 0.5 0.6 1.2 2.5 4.5 300 0.5 0.6 0.9 1.6 2.6 Values will vary slightly depending on the operating conditions.

REA/REB

Model selected 10-2-66 66 Series REBR Model Selection 2 Caution on Design 1 Selection Method RE A B 25 32 15 REC 500 400 300 200 300 CX 200 Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 CY 40 30 40 50 20 30 40 50 30 MQQ M 20 20 Usable range 10 RHC 10 10 Usable

REA/REB

REA (300 mm/s) Series REB (600 mm/s) DGuide type Model Page Guide type Model Page -X Direct mount type REBR 10-2-63 Basic type REA 10-2-6 20High precision guide type (Single axis) REBH 10-2-73 10-2-13 Direct mount type REAR Data Slider type (Slide bearing) REAS 10-2-14 10-2-73 High precision guide type (Double axis) REBHT Slider type (Ball bushing bearing) REAL 10-2-36 High precision guide

SYJ300/500/700

port) VP 35.6 28.5 26.1 X R P S070 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23

Table of Contents

VDW 2 0 1 C1 1 VC OUT (2) VDW Series Lead wire length 1 2 3 10 20, 200 30, 300 300 mm 600 mm Nil L1 (1) IN 2 Port Valve VQ Note) Note) Type L1 is optional.

Sine Rodless Cylinder Series REA/REB

Lo (cm) CY 40 32 CX 500 400 300 200 100 80 300 MQ REAR40 50 40 30 200 REAR32 100 Allowable driving force Fn (N) RHC Allowable driving force Fn (N) 100 REAR25 20 20 30 40 50 Load mass W (kg) 20 30 40 50 RZQ REAR20 10 REAR15 Usable range Usable range 10 10 REAR10 D5 5 -X 1 1 0 1 2 3 4 5 6 1 Individual -X 0.5 100 200 300 7 8 9 10 1 112 13 1415 0 1 2

Table of Contents

, IDF6E-10 IDF8E-10, IDF11E-10 Type 100 V 10 A IDU3E-10, IDU4E-10 IDU6E-10 30 mA IDF4E-20, IDF6E-20 IDF8E-20, IDF11E-20 Type 200 V 5 A IDU3E-20, IDU4E-20 IDU6E-20 S Option symbol IDF1E-10 to 11E-10, IDU3E-10 to IDU6E-10 With power cord connection The option allows the connection of a power cord to a terminal block.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

7.5 M5 x 0.8 (P, R port) 17.5 23 L plug connector (L): 10-SYJ34M-L-M5 M plug connector (M): 10-SYJ34M-M-M5 M8 connector (WO): 10-SYJ34M-WO-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to page 646 for dimensions

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

5 Port Solenoid Valve Series SV1000/2000/3000/4000

30% 70% 300 Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) 50% AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 AS3201F -03-10 200 100 0 SV300 ANA1 -C12 T1075 400 MB 80 300 AS4000-03 200 100 0 400 MB 100 300 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Applicable related components For details

VQZ1000/2000/3000

part number consists of 10 units.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Allowable driving force Fn (N) H H MTS 500 H H 300 10 L 200 MY 3.

Electric Slide Tables

(LESH16J) 1.5 1.5 4 3 Lead 10 (LESH16AJ) Lead 10 (LESH16J) Lead 10 (LESH16AJ) 3 1 1 2 2 0.5 0.5 1 1 0 0 0 0 0 50 100 150 200 250 300 350 400 0 50 100 150 200 250 300 350 400 450 0 50 100 150 200 250 300 350 400 450 0 50 100 150 200 250 300 350 400 450 Speed [mm/s] Speed [mm/s] Speed [mm/s] Speed [mm/s] LESH25 A R L LESH25 Vertical Horizontal Horizontal Vertical 7 3 10 4.5 Lead 8 (LESH25K

1

Model Port size Control method With One-touch fitting Stainless steel specifications (Stainless steel 300) 15-10-5

NCG/CG1

Rc 1/8 106(114) 11 11 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 12 12 12 13 14 14 20 20 Up to 200 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 201 to 350 29 M5 x 0.8 depth 7.5 Rc 1/8 10(12) M10 x 1.25 111(119) 301 to 400 35.5 M5 x 0.8 depth 8 Rc 1/8 10(11) 10(12) M10 x 1.25 113(121) 301 to 450 44 M6 x 1 depth 12 M14 x 1.5 Rc 1/8 10(12) 10(13) 130(139) 301 to 800 55