3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

1 3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported SeriesVQZ100/200/300 Series Variations V100 SY Sonic conductance C [dm3/(sbar)] Type of actuation Voltage Electrical entry With light/surge voltage suppressor Manual override SYJ Rubber Metal VQZ100 VK Grommet (G) VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-

Table of Contents

Inch size ARJ310F-N01 5/32" 1/4" 03 07 14-4-11 9 Series ARJ310 Flow Characteristics Inlet pressure: 0.7 MPa ARJ310-01 ARJ310F-01-04 ARJ310F-01-06 0.7 0.7 0.7 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Note) Standard lead wire length: 300 mm.

C85

With Rod Boot (mm) Item h KK 1 to 50 AM C e f K Stroke 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 20 20 8 36 20 6 M8 x 1.25 71 84 96 134 159 109 25 22 10 36 20 8 M10 x 1.25 74 87 99 137 162 112 187 Item Wh I Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore

Thermo-chiller/Rack Mount Type

VAC) p. 14 qConcentration Meter p. 36 Water-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 14 wParticle Filter Element for Replacement p. 36 Specifications eDI Filter Replacement Cartridge p. 36 Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 15 rAnti-quake Bracket p. 36 Water-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 16 tPiping Conversion Fitting

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

16 16 0.2 0.05 0.1 0.2 0.1 0.05 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

L3 L2 L1 IN port 2-3/8 (N) N 2.5 E D A F B Q C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com S U 16 V W X Approx. 300 Approx. 280 G1/2 33 25 D side Stations 1 2 3 4 5 n U side Y R 44 16 T 5.5 21 H J H OUT port n-1/4, 1/8 (Pitch) 2 (mm) n (stations) Model Dimension

C76

301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82 95 120 145 170 64 77 89 102 127 152 177 32 12.5 25 37.5 50 75 100 125

0.55

wire Note) Be sure to select the power saving circuit type length 300 mm length 300 mm (length 300 mm) when it is continuously energized for long periods of time.

Refrigerated Air Dryers

Terminal block Ventilation direction Ventilation direction F 42 L 14 H 4 x 13 M N P [100 VAC specification] Power cable (Length: approx. 1.9 m) [200 VAC specification] Power cable outlet (17) Drain tube (O.D. 10, length approx. 0.8 m) Dimensions [mm] Model Port size A B C D E F G H L M N P Q IDU8E Rc3/4 270 485 859 31 90 365 130 230 300 80 300 328 15 IDU11E 909 IDU15E1 Rc1 300 620 960 79

VM

Main valve Rc Lubrication 1 4 Port size Pilot valve (EXH)/M5 x 0.8 Option Foot bracket (2) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Weight (Basic) 300 g Please contact SMC for manifold mounting style.

Vacuum System Peripherals:

Grommet (Lead wire length 600 mm) Grommet (Lead wire length 300 mm) Electrical entry ZM G H L LN LO M MN MO ZH Manual override With lead wire Without lead wire Without connector With lead wire Without lead wire Without connector L type plug connector Nil Non-locking push type Push-locking slotted type Push-locking manual type ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

0.

Yes Note) Standard lead wire length: 300 mm Caution Use standard (DC) specification for continuous duty. Coil voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC [115 VAC] (50/60 Hz) 220 VAC [230 VAC] (50/60 Hz) 24 VDC 12 VDC 8 Series VQZ100/200/300 Made to Order (For details, refer to page 34.)

70astamb1

301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 750 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 32 40 50 63 80 100 36 23 12.5 25 37.5 50 125 86 98 111 75 136 100 161 73 186 230 256 280 306 356 406 456 41 23 12.5 25 37.5

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s 8-16-7 7 Series CY1F Vertical Actuation 1.

LJ1H

VAC Single phase 200 to 230 VAC CNP3 CNP3 L2 L2 U U U Motor U Motor L3 L3 V V V V M M N () N W W W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should be connected to L1 and L2 terminals, with nothing connected to L3.

Environment

230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 LEC !

MXQ

Cylinder: MXQ16-50 Cushion: Rubber stopper Workpiece table mounting Mounting: Horizontal wall mounting Average speed: Va = 300 [mm/s] Load weight: W = 1 [kg] L1 = 10 mm L2 = 30 mm L3 = 30 mm Kinetic Energy L1 L2 + A5 L3 2 1 V 2 E = W () 2 1000 Collision speed V = 1.4Va Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

7

S CAC408 50 50A Flange R 230 VAC G N.O.

MXW

400 500 100 200 300 400 600 500 100 200 300 400 600 Load (N) Load (N) Load (N) 8-7-5 6 Long Stroke Slide Table Series MXW 8, 12, 16, 20, 25 How to Order MXW 16 100 B M9N S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.